ES2005280A6 - Procedimiento y aparato para corregir la posicion de reposo, no desviada, de un haz de electores. - Google Patents

Procedimiento y aparato para corregir la posicion de reposo, no desviada, de un haz de electores.

Info

Publication number
ES2005280A6
ES2005280A6 ES8702510A ES8702510A ES2005280A6 ES 2005280 A6 ES2005280 A6 ES 2005280A6 ES 8702510 A ES8702510 A ES 8702510A ES 8702510 A ES8702510 A ES 8702510A ES 2005280 A6 ES2005280 A6 ES 2005280A6
Authority
ES
Spain
Prior art keywords
electron beam
reference point
resting position
electron
displaced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES8702510A
Other languages
English (en)
Inventor
William J Farrell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ferranti Sciaky Inc
Original Assignee
Ferranti Sciaky Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ferranti Sciaky Inc filed Critical Ferranti Sciaky Inc
Publication of ES2005280A6 publication Critical patent/ES2005280A6/es
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/0013—Positioning or observing workpieces, e.g. with respect to the impact; Aligning, aiming or focusing electronbeams

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PROCEDIMIENTO Y APARATO PARA CORREGIR LA POSICION DE REPOSO, NO DESVIADA, DE UN HAZ DE ELECTRONES QUE SE HA DESPLAZADO DESDE SU POSICION DE REPOSO ANTERIOR DEBIDO A CAMBIOS FISICOS O POSICIONALES DE LOS ELEMENTOS DEL CAÑON ELECTRONICO GENERADOR DEL HAZ DE ELECTRONES. EL HAZ DE ELECTRONES ES DIRIGIDO HACIA UN DETECTOR QUE DETERMINA LA DIRECCION Y AMPLITUD DE LA DESVIACION A LO LARGO DE EJES MUTUAMENTE PERPENDICULARES DEL PUNTO DE INCIDENCIA DEL HAZ DE ELECTRONES A PARTIR DE UN PUNTO DE REFERENCIA DADO. LAS SEÑALES GENERADAS POR EL DETECTOR, EN COOPERACION CON UN SISTEMA DE DESVIACION, CONTROLADO POR ORDENADOR, DEL CAÑON ELECTRONICO, HACE QUE EL HAZ SE DESVIE EN UNA SERIE DE ETAPAS ITERATIVAS HACIA EL PUNTO DE REFERENCIA. LA DISTANCIA Y DIRECCION DEL HAZ DESDE SU POSICION DE REPOSO AL PUNTO DE REFERENCIA SE MANTIENE EN LA MEMORIA DEL ORDENADOR.
ES8702510A 1986-08-29 1987-08-28 Procedimiento y aparato para corregir la posicion de reposo, no desviada, de un haz de electores. Expired ES2005280A6 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/901,947 US4721842A (en) 1986-08-29 1986-08-29 Beam position correction device

Publications (1)

Publication Number Publication Date
ES2005280A6 true ES2005280A6 (es) 1989-03-01

Family

ID=25415109

Family Applications (1)

Application Number Title Priority Date Filing Date
ES8702510A Expired ES2005280A6 (es) 1986-08-29 1987-08-28 Procedimiento y aparato para corregir la posicion de reposo, no desviada, de un haz de electores.

Country Status (7)

Country Link
US (1) US4721842A (es)
EP (1) EP0280714B1 (es)
CA (1) CA1285621C (es)
DE (1) DE3784915T2 (es)
ES (1) ES2005280A6 (es)
IL (1) IL83675A (es)
WO (1) WO1988001551A1 (es)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3160315B2 (ja) * 1991-06-28 2001-04-25 川崎製鉄株式会社 電子ビームの照射方法及び照射装置
US6102164A (en) * 1996-02-28 2000-08-15 Applied Materials, Inc. Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
DE19745771B4 (de) * 1997-10-16 2005-12-22 Unaxis Deutschland Holding Gmbh Verfahren für den Betrieb eines Hochleistungs-Elektronenstrahls
DE60127677T2 (de) * 2001-10-05 2007-12-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Elektronenstrahlvorrrichtung mit Mehrfachstrahl
WO2018217646A1 (en) 2017-05-22 2018-11-29 Howmedica Osteonics Corp. Device for in-situ fabrication process monitoring and feedback control of an electron beam additive manufacturing process
AU2019206103A1 (en) 2018-07-19 2020-02-06 Howmedica Osteonics Corp. System and process for in-process electron beam profile and location analyses
CN111650635B (zh) * 2020-06-11 2022-10-21 中国航发航空科技股份有限公司 一种电子束焊接束流垂直度验证及找正方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1212780A (en) * 1967-11-27 1970-11-18 Omron Tateisi Electronics Co An automatic water supply system
FR2181467B1 (es) * 1972-04-25 1974-07-26 Thomson Csf
FR2274122A1 (fr) * 1974-06-07 1976-01-02 Cgr Mev Procede de centrage d'un faisceau de balayage a rayonnement ionisant et dispositif permettant la mise en oeuvre de ce procede
JPS59163506A (ja) * 1983-03-09 1984-09-14 Hitachi Ltd 電子ビ−ム測長装置
US4560854A (en) * 1983-12-27 1985-12-24 The Babcock & Wilcox Company Electron beam welder control

Also Published As

Publication number Publication date
EP0280714A1 (en) 1988-09-07
US4721842A (en) 1988-01-26
IL83675A0 (en) 1988-01-31
EP0280714A4 (en) 1989-11-14
DE3784915D1 (de) 1993-04-22
WO1988001551A1 (en) 1988-03-10
IL83675A (en) 1990-07-12
CA1285621C (en) 1991-07-02
EP0280714B1 (en) 1993-03-17
DE3784915T2 (de) 1993-07-08

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Legal Events

Date Code Title Description
FD1A Patent lapsed

Effective date: 20001204