FR2235482A1 - Eliminating interface states in MIOS structures - at low temp to avoid degradation of electrical props - Google Patents
Eliminating interface states in MIOS structures - at low temp to avoid degradation of electrical propsInfo
- Publication number
- FR2235482A1 FR2235482A1 FR7416726A FR7416726A FR2235482A1 FR 2235482 A1 FR2235482 A1 FR 2235482A1 FR 7416726 A FR7416726 A FR 7416726A FR 7416726 A FR7416726 A FR 7416726A FR 2235482 A1 FR2235482 A1 FR 2235482A1
- Authority
- FR
- France
- Prior art keywords
- interface states
- mios
- structures
- substrate
- low temp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 102100037807 GATOR complex protein MIOS Human genes 0.000 title 1
- 101000950705 Homo sapiens GATOR complex protein MIOS Proteins 0.000 title 1
- 230000015556 catabolic process Effects 0.000 title 1
- 238000006731 degradation reaction Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 4
- 239000004065 semiconductor Substances 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 238000000137 annealing Methods 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7416726A FR2235482A1 (en) | 1974-05-07 | 1974-05-07 | Eliminating interface states in MIOS structures - at low temp to avoid degradation of electrical props |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7416726A FR2235482A1 (en) | 1974-05-07 | 1974-05-07 | Eliminating interface states in MIOS structures - at low temp to avoid degradation of electrical props |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2235482A1 true FR2235482A1 (en) | 1975-01-24 |
| FR2235482B1 FR2235482B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-12-24 |
Family
ID=9138828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7416726A Granted FR2235482A1 (en) | 1974-05-07 | 1974-05-07 | Eliminating interface states in MIOS structures - at low temp to avoid degradation of electrical props |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2235482A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1603354A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1967-08-02 | 1971-04-13 |
-
1974
- 1974-05-07 FR FR7416726A patent/FR2235482A1/fr active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1603354A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1967-08-02 | 1971-04-13 |
Non-Patent Citations (1)
| Title |
|---|
| UE US "JOURNAL OF THE ELECTROCHEMICAL SOCIETY", VOLUME 116, NO. 11, NOVEMBRE 1969, "ANNEALING MECHANIST IN RADIATION DAMAGED MNOS STRUCTURES",J.J. TENTOR, ABSTRACT 233, PAGE 337C) * |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2235482B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-12-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |