FR2211754A1 - Depositing aluminium-cermet layers onto semiconductors - or integrated circuits, from argon contg. triethylaluminium and oxygen at elevated temp under atmos press - Google Patents

Depositing aluminium-cermet layers onto semiconductors - or integrated circuits, from argon contg. triethylaluminium and oxygen at elevated temp under atmos press

Info

Publication number
FR2211754A1
FR2211754A1 FR7345286A FR7345286A FR2211754A1 FR 2211754 A1 FR2211754 A1 FR 2211754A1 FR 7345286 A FR7345286 A FR 7345286A FR 7345286 A FR7345286 A FR 7345286A FR 2211754 A1 FR2211754 A1 FR 2211754A1
Authority
FR
France
Prior art keywords
contg
press
triethylaluminium
argon
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7345286A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of FR2211754A1 publication Critical patent/FR2211754A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00Resistors, capacitors or inductors
    • H10D1/40Resistors
    • H10D1/47Resistors having no potential barriers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body (electrodes)
    • H01L23/485Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body (electrodes) consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
FR7345286A 1972-12-22 1973-12-18 Depositing aluminium-cermet layers onto semiconductors - or integrated circuits, from argon contg. triethylaluminium and oxygen at elevated temp under atmos press Withdrawn FR2211754A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US31786072A 1972-12-22 1972-12-22

Publications (1)

Publication Number Publication Date
FR2211754A1 true FR2211754A1 (en) 1974-07-19

Family

ID=23235568

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7345286A Withdrawn FR2211754A1 (en) 1972-12-22 1973-12-18 Depositing aluminium-cermet layers onto semiconductors - or integrated circuits, from argon contg. triethylaluminium and oxygen at elevated temp under atmos press

Country Status (3)

Country Link
JP (1) JPS5122339B2 (enExample)
DE (1) DE2364182A1 (enExample)
FR (1) FR2211754A1 (enExample)

Also Published As

Publication number Publication date
JPS5122339B2 (enExample) 1976-07-09
JPS4991382A (enExample) 1974-08-31
DE2364182A1 (de) 1974-07-11

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Legal Events

Date Code Title Description
ST Notification of lapse