FR2211754A1 - Depositing aluminium-cermet layers onto semiconductors - or integrated circuits, from argon contg. triethylaluminium and oxygen at elevated temp under atmos press - Google Patents
Depositing aluminium-cermet layers onto semiconductors - or integrated circuits, from argon contg. triethylaluminium and oxygen at elevated temp under atmos pressInfo
- Publication number
- FR2211754A1 FR2211754A1 FR7345286A FR7345286A FR2211754A1 FR 2211754 A1 FR2211754 A1 FR 2211754A1 FR 7345286 A FR7345286 A FR 7345286A FR 7345286 A FR7345286 A FR 7345286A FR 2211754 A1 FR2211754 A1 FR 2211754A1
- Authority
- FR
- France
- Prior art keywords
- contg
- press
- triethylaluminium
- argon
- oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D1/00—Resistors, capacitors or inductors
- H10D1/40—Resistors
- H10D1/47—Resistors having no potential barriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body (electrodes)
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body (electrodes) consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31786072A | 1972-12-22 | 1972-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2211754A1 true FR2211754A1 (en) | 1974-07-19 |
Family
ID=23235568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7345286A Withdrawn FR2211754A1 (en) | 1972-12-22 | 1973-12-18 | Depositing aluminium-cermet layers onto semiconductors - or integrated circuits, from argon contg. triethylaluminium and oxygen at elevated temp under atmos press |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS5122339B2 (enExample) |
| DE (1) | DE2364182A1 (enExample) |
| FR (1) | FR2211754A1 (enExample) |
-
1973
- 1973-12-13 JP JP48138238A patent/JPS5122339B2/ja not_active Expired
- 1973-12-18 FR FR7345286A patent/FR2211754A1/fr not_active Withdrawn
- 1973-12-21 DE DE2364182A patent/DE2364182A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5122339B2 (enExample) | 1976-07-09 |
| JPS4991382A (enExample) | 1974-08-31 |
| DE2364182A1 (de) | 1974-07-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS56130374A (en) | Thermal head | |
| FR2211754A1 (en) | Depositing aluminium-cermet layers onto semiconductors - or integrated circuits, from argon contg. triethylaluminium and oxygen at elevated temp under atmos press | |
| JPS6422051A (en) | Manufacture of semiconductor device | |
| GB1373051A (en) | Chromium oxide photomask material and the production thereof | |
| JPS5255475A (en) | Production of semiconductor device | |
| JPS5460558A (en) | Electrode forming method | |
| FR2148167A1 (en) | Electronic device - composed of a dielectric substrate with molybdenum contg circuit pattern and gold plated | |
| GB1079046A (en) | Improvements in and relating to semiconductor devices | |
| JPH0317280A (ja) | 色彩模様板の製造方法 | |
| JPS55152161A (en) | Thermal treatment of copper coating | |
| JPS5489344A (en) | Manufacture of heater resistor | |
| JPS5655910A (en) | Production of optical multilayer film | |
| JPS53133800A (en) | Method of manufacturing thin film resistor element | |
| GB1312183A (en) | Semiconductor arrangements | |
| JPS5257787A (en) | Production of semiconductor device | |
| JPS6461933A (en) | Integrated circuit device and its manufacture | |
| GB1390752A (en) | Lead frames for holding and contacting semiconductor bodies | |
| JPS5599770A (en) | Transistor | |
| GB757897A (en) | Method of producing an intermediate metallic oxide film in a multiple layer article | |
| GB1265049A (enExample) | ||
| JPS5667939A (en) | Preparation method of semiconductor system | |
| JPS57147273A (en) | Manufacture of semiconductor device | |
| KR950024265A (ko) | 반도체 장치의 금속 콘택부 구조 및 형성방법 | |
| JPS54162967A (en) | Manufacture of semiconductor device | |
| JPS5715442A (en) | Production of semiconductor device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |