FR2197235A1 - - Google Patents

Info

Publication number
FR2197235A1
FR2197235A1 FR7330591A FR7330591A FR2197235A1 FR 2197235 A1 FR2197235 A1 FR 2197235A1 FR 7330591 A FR7330591 A FR 7330591A FR 7330591 A FR7330591 A FR 7330591A FR 2197235 A1 FR2197235 A1 FR 2197235A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7330591A
Other languages
French (fr)
Other versions
FR2197235B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of FR2197235A1 publication Critical patent/FR2197235A1/fr
Application granted granted Critical
Publication of FR2197235B1 publication Critical patent/FR2197235B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/135—Cine film

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Architecture (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • ing And Chemical Polishing (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
FR7330591A 1972-08-23 1973-08-23 Expired FR2197235B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US283143A US3884698A (en) 1972-08-23 1972-08-23 Method for achieving uniform exposure in a photosensitive material on a semiconductor wafer

Publications (2)

Publication Number Publication Date
FR2197235A1 true FR2197235A1 (enrdf_load_stackoverflow) 1974-03-22
FR2197235B1 FR2197235B1 (enrdf_load_stackoverflow) 1978-04-28

Family

ID=23084714

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7330591A Expired FR2197235B1 (enrdf_load_stackoverflow) 1972-08-23 1973-08-23

Country Status (6)

Country Link
US (1) US3884698A (enrdf_load_stackoverflow)
JP (1) JPS5232953B2 (enrdf_load_stackoverflow)
DE (1) DE2338160C3 (enrdf_load_stackoverflow)
FR (1) FR2197235B1 (enrdf_load_stackoverflow)
GB (1) GB1439153A (enrdf_load_stackoverflow)
HK (1) HK67978A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2452118A1 (fr) * 1979-03-23 1980-10-17 Siemens Ag Procede pour fabriquer des structures formees de couches de laque photosensible positive sans effets d'interferences nuisibles
EP0087582A3 (en) * 1982-02-26 1985-01-23 International Business Machines Corporation Optical lithography process for creating patterns in a silicon semiconductor substrate
EP0098582A3 (en) * 1982-07-05 1986-05-07 Kabushiki Kaisha Toshiba Method for patterning layer having high reflectance using photosensitive material

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5293273A (en) * 1976-01-31 1977-08-05 Nippon Telegr & Teleph Corp <Ntt> Fine pattern forming method
JPS5593225A (en) * 1979-01-10 1980-07-15 Hitachi Ltd Forming method of minute pattern
US4456677A (en) * 1981-08-19 1984-06-26 The United Stated Of America As Represented By The Secretary Of The Army Composite resist structures for submicron processing in electron/ion lithography
JPS5846635A (ja) * 1981-09-14 1983-03-18 Toshiba Corp 半導体素子パタ−ン形成法
US4529685A (en) * 1984-03-02 1985-07-16 Advanced Micro Devices, Inc. Method for making integrated circuit devices using a layer of indium arsenide as an antireflective coating
JPH0652702B2 (ja) * 1984-05-15 1994-07-06 富士通株式会社 半導体装置の製造方法
US4612275A (en) * 1985-04-26 1986-09-16 International Business Machines Corporation Multilayer resists with improved sensitivity and reduced proximity effect
US4839010A (en) * 1985-08-30 1989-06-13 Texas Instruments Incorporated Forming an antireflective coating for VLSI metallization
US4619887A (en) * 1985-09-13 1986-10-28 Texas Instruments Incorporated Method of plating an interconnect metal onto a metal in VLSI devices
US4640886A (en) * 1985-10-10 1987-02-03 Eastman Kodak Company Subbed lithographic printing plate
DE3730644A1 (de) * 1987-09-11 1989-03-30 Baeuerle Dieter Verfahren zur vorgegeben strukturierten abscheidung von mikrostrukturen mit laserlicht
DE3901864A1 (de) * 1989-01-23 1990-07-26 Siemens Ag Verfahren zur verringerung interferenzbedingter strukturgroessenschwankungen bei der strukturierung einer photolackschicht durch monochromatische belichtung
JPH0775221B2 (ja) * 1990-08-06 1995-08-09 エイ・ティ・アンド・ティ・コーポレーション 半導体集積回路の製造方法
KR950011563B1 (ko) * 1990-11-27 1995-10-06 가부시끼가이샤 도시바 반도체장치의 제조방법
US5302240A (en) * 1991-01-22 1994-04-12 Kabushiki Kaisha Toshiba Method of manufacturing semiconductor device
JPH0590224A (ja) * 1991-01-22 1993-04-09 Toshiba Corp 半導体装置の製造方法
US5219788A (en) * 1991-02-25 1993-06-15 Ibm Corporation Bilayer metallization cap for photolithography
US5480748A (en) * 1992-10-21 1996-01-02 International Business Machines Corporation Protection of aluminum metallization against chemical attack during photoresist development
JPH06302539A (ja) * 1993-04-15 1994-10-28 Toshiba Corp 半導体装置及び半導体装置の製造方法
JP3284687B2 (ja) * 1993-08-31 2002-05-20 ソニー株式会社 配線パターンの製造方法
JPH08241858A (ja) * 1995-01-25 1996-09-17 Toshiba Corp 半導体の反射防止膜及びこの反射防止膜を用いた半導体の製造方法
US6300253B1 (en) 1998-04-07 2001-10-09 Micron Technology, Inc. Semiconductor processing methods of forming photoresist over silicon nitride materials, and semiconductor wafer assemblies comprising photoresist over silicon nitride materials
US6323139B1 (en) 1995-12-04 2001-11-27 Micron Technology, Inc. Semiconductor processing methods of forming photoresist over silicon nitride materials
US5926739A (en) 1995-12-04 1999-07-20 Micron Technology, Inc. Semiconductor processing method of promoting photoresist adhesion to an outer substrate layer predominately comprising silicon nitride
US5741626A (en) * 1996-04-15 1998-04-21 Motorola, Inc. Method for forming a dielectric tantalum nitride layer as an anti-reflective coating (ARC)
US5670062A (en) * 1996-06-07 1997-09-23 Lucent Technologies Inc. Method for producing tapered lines
US6127262A (en) * 1996-06-28 2000-10-03 Applied Materials, Inc. Method and apparatus for depositing an etch stop layer
US6051369A (en) * 1998-01-08 2000-04-18 Kabushiki Kaisha Toshiba Lithography process using one or more anti-reflective coating films and fabrication process using the lithography process
US6635530B2 (en) 1998-04-07 2003-10-21 Micron Technology, Inc. Methods of forming gated semiconductor assemblies
US5985771A (en) * 1998-04-07 1999-11-16 Micron Technology, Inc. Semiconductor wafer assemblies comprising silicon nitride, methods of forming silicon nitride, and methods of reducing stress on semiconductive wafers
US6316372B1 (en) 1998-04-07 2001-11-13 Micron Technology, Inc. Methods of forming a layer of silicon nitride in a semiconductor fabrication process
US6103456A (en) * 1998-07-22 2000-08-15 Siemens Aktiengesellschaft Prevention of photoresist poisoning from dielectric antireflective coating in semiconductor fabrication
DE19852852A1 (de) * 1998-11-11 2000-05-18 Inst Halbleiterphysik Gmbh Lithographieverfahren zur Emitterstrukturierung von Bipolartransistoren
KR100445004B1 (ko) * 2002-08-26 2004-08-21 삼성전자주식회사 모노리틱 잉크 젯 프린트 헤드 및 이의 제조 방법
US7502155B2 (en) * 2005-03-15 2009-03-10 Texas Instruments Incorporated Antireflective coating for semiconductor devices and method for the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1534173A (fr) * 1966-08-10 1968-07-26 Gen Precision Inc Procédé pour former des réserves photographiques sur des supports transparents outranslucides avec une résolution élevée
US3567506A (en) * 1968-03-22 1971-03-02 Hughes Aircraft Co Method for providing a planar transistor with heat-dissipating top base and emitter contacts
FR1597073A (enrdf_load_stackoverflow) * 1968-12-23 1970-06-22

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2452118A1 (fr) * 1979-03-23 1980-10-17 Siemens Ag Procede pour fabriquer des structures formees de couches de laque photosensible positive sans effets d'interferences nuisibles
EP0087582A3 (en) * 1982-02-26 1985-01-23 International Business Machines Corporation Optical lithography process for creating patterns in a silicon semiconductor substrate
EP0098582A3 (en) * 1982-07-05 1986-05-07 Kabushiki Kaisha Toshiba Method for patterning layer having high reflectance using photosensitive material
US4714668A (en) * 1982-07-05 1987-12-22 Tokyo Shibaura Denki Kabushiki Kaisha Method for patterning layer having high reflectance using photosensitive material

Also Published As

Publication number Publication date
US3884698A (en) 1975-05-20
FR2197235B1 (enrdf_load_stackoverflow) 1978-04-28
HK67978A (en) 1978-12-01
GB1439153A (en) 1976-06-09
DE2338160C3 (de) 1981-05-07
DE2338160A1 (de) 1974-03-07
JPS5232953B2 (enrdf_load_stackoverflow) 1977-08-25
JPS4955280A (enrdf_load_stackoverflow) 1974-05-29
DE2338160B2 (de) 1976-08-26

Similar Documents

Publication Publication Date Title
FR2197235B1 (enrdf_load_stackoverflow)
JPS4914864A (enrdf_load_stackoverflow)
JPS4975483A (enrdf_load_stackoverflow)
FR2180331A5 (enrdf_load_stackoverflow)
JPS4958210A (enrdf_load_stackoverflow)
CS159447B1 (enrdf_load_stackoverflow)
FR2170918A1 (enrdf_load_stackoverflow)
JPS5327005Y2 (enrdf_load_stackoverflow)
JPS5316122Y2 (enrdf_load_stackoverflow)
JPS5012222B2 (enrdf_load_stackoverflow)
CS160370B1 (enrdf_load_stackoverflow)
CS162126B1 (enrdf_load_stackoverflow)
JPS4879497A (enrdf_load_stackoverflow)
JPS4995819U (enrdf_load_stackoverflow)
CS161352B1 (enrdf_load_stackoverflow)
CS160306B1 (enrdf_load_stackoverflow)
CS162156B1 (enrdf_load_stackoverflow)
CS159514B1 (enrdf_load_stackoverflow)
JPS4924676U (enrdf_load_stackoverflow)
CS154547B1 (enrdf_load_stackoverflow)
CS159020B1 (enrdf_load_stackoverflow)
CS159014B1 (enrdf_load_stackoverflow)
CH577604A5 (enrdf_load_stackoverflow)
CH573364A5 (enrdf_load_stackoverflow)
CH573868A5 (enrdf_load_stackoverflow)