FR2188310A2 - Microcircuit prodn using laser beam - in which the beam promotes diffusion doping - Google Patents

Microcircuit prodn using laser beam - in which the beam promotes diffusion doping

Info

Publication number
FR2188310A2
FR2188310A2 FR7220695A FR7220695A FR2188310A2 FR 2188310 A2 FR2188310 A2 FR 2188310A2 FR 7220695 A FR7220695 A FR 7220695A FR 7220695 A FR7220695 A FR 7220695A FR 2188310 A2 FR2188310 A2 FR 2188310A2
Authority
FR
France
Prior art keywords
prodn
microcircuit
diffusion doping
laser beam
promotes diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7220695A
Other languages
English (en)
French (fr)
Other versions
FR2188310B2 (en:Method
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bpifrance Financement SA
Original Assignee
Agence National de Valorisation de la Recherche ANVAR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR7028660A external-priority patent/FR2104699B1/fr
Application filed by Agence National de Valorisation de la Recherche ANVAR filed Critical Agence National de Valorisation de la Recherche ANVAR
Priority to FR7220695A priority Critical patent/FR2188310A2/fr
Publication of FR2188310A2 publication Critical patent/FR2188310A2/fr
Application granted granted Critical
Publication of FR2188310B2 publication Critical patent/FR2188310B2/fr
Granted legal-status Critical Current

Links

Classifications

    • H10P34/42—
    • H10P32/141—
    • H10P32/171—

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
FR7220695A 1970-08-03 1972-06-08 Microcircuit prodn using laser beam - in which the beam promotes diffusion doping Granted FR2188310A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7220695A FR2188310A2 (en) 1970-08-03 1972-06-08 Microcircuit prodn using laser beam - in which the beam promotes diffusion doping

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7028660A FR2104699B1 (en:Method) 1970-08-03 1970-08-03
FR7220695A FR2188310A2 (en) 1970-08-03 1972-06-08 Microcircuit prodn using laser beam - in which the beam promotes diffusion doping

Publications (2)

Publication Number Publication Date
FR2188310A2 true FR2188310A2 (en) 1974-01-18
FR2188310B2 FR2188310B2 (en:Method) 1974-12-27

Family

ID=33161166

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7220695A Granted FR2188310A2 (en) 1970-08-03 1972-06-08 Microcircuit prodn using laser beam - in which the beam promotes diffusion doping

Country Status (1)

Country Link
FR (1) FR2188310A2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2433238A1 (fr) * 1978-08-09 1980-03-07 Us Energy Procede de fabrication d'une jonction p-n

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1550390A (en:Method) * 1967-11-08 1968-12-20
US3486221A (en) * 1967-06-14 1969-12-30 Sprague Electric Co High energy beam trimming of electrical components

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3486221A (en) * 1967-06-14 1969-12-30 Sprague Electric Co High energy beam trimming of electrical components
FR1550390A (en:Method) * 1967-11-08 1968-12-20

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
REVUE AMERICAINE: "IBM TECHNICAL DISCLOSURE BULLETIN" VOLUME 11, NO. 2, JUILLET 1968: "INDUCING IMPURITY MIGRATION IN SEMICONDUCTORS BY LASERS"M.L.JOSHI ET AL, PAGES 104-105 *
REVUE AMERICAINE: "THE BELL SYSTEM TECHNICAL JOURNAL" VOLUME 47, MARS 1968 "LASER MACHINING OF THIN FILMS AND INTEGRATED CIRCUITS" M.I.COHEN ET AL, PAGES 385-405 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2433238A1 (fr) * 1978-08-09 1980-03-07 Us Energy Procede de fabrication d'une jonction p-n

Also Published As

Publication number Publication date
FR2188310B2 (en:Method) 1974-12-27

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