FR2179267A1 - Etching copper - with alkaline soln contg ammonium salt for dissolving copper, and complex former - Google Patents

Etching copper - with alkaline soln contg ammonium salt for dissolving copper, and complex former

Info

Publication number
FR2179267A1
FR2179267A1 FR7312965A FR7312965A FR2179267A1 FR 2179267 A1 FR2179267 A1 FR 2179267A1 FR 7312965 A FR7312965 A FR 7312965A FR 7312965 A FR7312965 A FR 7312965A FR 2179267 A1 FR2179267 A1 FR 2179267A1
Authority
FR
France
Prior art keywords
copper
complex former
ammonium salt
alkaline soln
contg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7312965A
Other languages
English (en)
French (fr)
Other versions
FR2179267B3 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HOELLMUELLER MASCHBAU H
Original Assignee
HOELLMUELLER MASCHBAU H
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HOELLMUELLER MASCHBAU H filed Critical HOELLMUELLER MASCHBAU H
Publication of FR2179267A1 publication Critical patent/FR2179267A1/fr
Application granted granted Critical
Publication of FR2179267B3 publication Critical patent/FR2179267B3/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/34—Alkaline compositions for etching copper or alloys thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
FR7312965A 1972-04-05 1973-04-02 Etching copper - with alkaline soln contg ammonium salt for dissolving copper, and complex former Granted FR2179267A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722216269 DE2216269A1 (de) 1972-04-05 1972-04-05 Verfahren zum aetzen von kupfer und kupferlegierungen

Publications (2)

Publication Number Publication Date
FR2179267A1 true FR2179267A1 (en) 1973-11-16
FR2179267B3 FR2179267B3 (enExample) 1976-03-26

Family

ID=5841002

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7312965A Granted FR2179267A1 (en) 1972-04-05 1973-04-02 Etching copper - with alkaline soln contg ammonium salt for dissolving copper, and complex former

Country Status (4)

Country Link
DE (1) DE2216269A1 (enExample)
FR (1) FR2179267A1 (enExample)
IT (1) IT980767B (enExample)
NL (1) NL7303601A (enExample)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0122963A1 (de) * 1983-04-13 1984-10-31 Forschungszentrum Jülich Gmbh Anlage zum Regenerieren einer ammoniakalischen Ätzlösung
EP0144742A1 (de) * 1983-11-08 1985-06-19 Forschungszentrum Jülich Gmbh Verfahren und Anlage zum Regenerieren einer ammoniakalischen Ätzlösung
EP0117068A3 (en) * 1983-01-20 1986-04-16 The Electricity Council Method and apparatus for etching copper
EP0137123A3 (en) * 1983-07-07 1986-05-07 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung Etching solution containing ammonium sulfate, and process for regenerating it
EP0158910A3 (en) * 1984-04-16 1987-10-07 Lancy International, Inc. Process for recovering copper from an ammoniacal copper-etching solution, and regeneration of this solution
EP0349600A4 (en) * 1987-12-29 1990-04-10 Macdermid Inc Copper etching compositions.
FR2712607A1 (fr) * 1993-11-18 1995-05-24 Elochem Aetztechnik Gmbh Procédé accéléré de rongeage et de séparation des métaux dans les installations de rongeage en milieu ammoniacal.
EP0722512A4 (enExample) * 1993-09-08 1996-07-31
FR2854905A1 (fr) * 2003-05-16 2004-11-19 Airbus France Procede de recuperation du cuivre d'une solution de gravure ammoniacale usee et de regeneration d'un sel d'ammonium
RU2622072C1 (ru) * 2016-01-11 2017-06-09 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" (ФГБОУ ВПО "Пензенский государственный университет") Способ утилизации отработанного медно-аммиачного раствора
CN118186394A (zh) * 2024-05-16 2024-06-14 苏州高芯众科半导体有限公司 Tf液晶面板刻蚀腔铝板清洁再生的方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3348401C2 (en) * 1983-02-16 1993-08-26 Siemens Ag, 8000 Muenchen, De Electrolyte regeneration of ammoniacal etching soln.
DE3305319A1 (de) * 1983-02-16 1984-08-16 Siemens AG, 1000 Berlin und 8000 München Elektrolytisches vollregenerierverfahren einer ammoniakalischen aetzloesung

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0117068A3 (en) * 1983-01-20 1986-04-16 The Electricity Council Method and apparatus for etching copper
EP0122963A1 (de) * 1983-04-13 1984-10-31 Forschungszentrum Jülich Gmbh Anlage zum Regenerieren einer ammoniakalischen Ätzlösung
EP0137123A3 (en) * 1983-07-07 1986-05-07 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung Etching solution containing ammonium sulfate, and process for regenerating it
EP0144742A1 (de) * 1983-11-08 1985-06-19 Forschungszentrum Jülich Gmbh Verfahren und Anlage zum Regenerieren einer ammoniakalischen Ätzlösung
EP0158910A3 (en) * 1984-04-16 1987-10-07 Lancy International, Inc. Process for recovering copper from an ammoniacal copper-etching solution, and regeneration of this solution
EP0349600A4 (en) * 1987-12-29 1990-04-10 Macdermid Inc Copper etching compositions.
EP0722512A4 (enExample) * 1993-09-08 1996-07-31
FR2712607A1 (fr) * 1993-11-18 1995-05-24 Elochem Aetztechnik Gmbh Procédé accéléré de rongeage et de séparation des métaux dans les installations de rongeage en milieu ammoniacal.
FR2854905A1 (fr) * 2003-05-16 2004-11-19 Airbus France Procede de recuperation du cuivre d'une solution de gravure ammoniacale usee et de regeneration d'un sel d'ammonium
WO2004104269A1 (fr) * 2003-05-16 2004-12-02 Airbus France Procede de recuperation du cuivre d'une solution de gravure ammoniacale usee et de regeneration d'un sel d'ammonium
RU2622072C1 (ru) * 2016-01-11 2017-06-09 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" (ФГБОУ ВПО "Пензенский государственный университет") Способ утилизации отработанного медно-аммиачного раствора
CN118186394A (zh) * 2024-05-16 2024-06-14 苏州高芯众科半导体有限公司 Tf液晶面板刻蚀腔铝板清洁再生的方法

Also Published As

Publication number Publication date
IT980767B (it) 1974-10-10
NL7303601A (enExample) 1973-10-09
DE2216269A1 (de) 1973-10-18
FR2179267B3 (enExample) 1976-03-26

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Legal Events

Date Code Title Description
ST Notification of lapse