FR2166390A1 - - Google Patents

Info

Publication number
FR2166390A1
FR2166390A1 FR7247204A FR7247204A FR2166390A1 FR 2166390 A1 FR2166390 A1 FR 2166390A1 FR 7247204 A FR7247204 A FR 7247204A FR 7247204 A FR7247204 A FR 7247204A FR 2166390 A1 FR2166390 A1 FR 2166390A1
Authority
FR
France
Prior art keywords
photo
disc
cell
interference
scanned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7247204A
Other languages
English (en)
French (fr)
Other versions
FR2166390B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2166390A1 publication Critical patent/FR2166390A1/fr
Application granted granted Critical
Publication of FR2166390B1 publication Critical patent/FR2166390B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9506—Optical discs

Landscapes

  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
FR7247204A 1972-01-04 1972-12-26 Expired FR2166390B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722200222 DE2200222A1 (de) 1972-01-04 1972-01-04 Vorrichtung zur bestimmung der oberflaechenguete

Publications (2)

Publication Number Publication Date
FR2166390A1 true FR2166390A1 (enrdf_load_stackoverflow) 1973-08-17
FR2166390B1 FR2166390B1 (enrdf_load_stackoverflow) 1974-01-04

Family

ID=5832302

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7247204A Expired FR2166390B1 (enrdf_load_stackoverflow) 1972-01-04 1972-12-26

Country Status (5)

Country Link
JP (1) JPS4879663A (enrdf_load_stackoverflow)
CA (1) CA1017139A (enrdf_load_stackoverflow)
DE (1) DE2200222A1 (enrdf_load_stackoverflow)
FR (1) FR2166390B1 (enrdf_load_stackoverflow)
GB (1) GB1406470A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2353107A1 (fr) * 1976-05-28 1977-12-23 Rca Corp Systeme de detection de defauts d'une surface, notamment de la surface d'un sillon de disque
FR2353111A1 (fr) * 1976-05-28 1977-12-23 Rca Corp Systeme pour effectuer le trace de defauts
EP0123929A3 (en) * 1983-04-22 1985-12-04 Erwin Sick Gmbh Optik-Elektronik Device for the detection of faults
EP0152165A3 (en) * 1984-01-10 1986-06-04 Victor Company Of Japan, Limited Defect inspecting apparatus for inspecting defects in optical type disc

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5168412A (en) * 1989-06-28 1992-12-01 Toan Doan Surface interference detector
US10816482B2 (en) 2016-10-26 2020-10-27 Board Of Regents, The University Of Texas System High throughput, high resolution optical metrology for reflective and transmissive nanophotonic devices

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2353107A1 (fr) * 1976-05-28 1977-12-23 Rca Corp Systeme de detection de defauts d'une surface, notamment de la surface d'un sillon de disque
FR2353111A1 (fr) * 1976-05-28 1977-12-23 Rca Corp Systeme pour effectuer le trace de defauts
EP0123929A3 (en) * 1983-04-22 1985-12-04 Erwin Sick Gmbh Optik-Elektronik Device for the detection of faults
EP0152165A3 (en) * 1984-01-10 1986-06-04 Victor Company Of Japan, Limited Defect inspecting apparatus for inspecting defects in optical type disc

Also Published As

Publication number Publication date
CA1017139A (en) 1977-09-13
JPS4879663A (enrdf_load_stackoverflow) 1973-10-25
FR2166390B1 (enrdf_load_stackoverflow) 1974-01-04
DE2200222A1 (de) 1973-07-12
GB1406470A (en) 1975-09-17

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Legal Events

Date Code Title Description
ST Notification of lapse