JPS4879663A - - Google Patents

Info

Publication number
JPS4879663A
JPS4879663A JP12681372A JP12681372A JPS4879663A JP S4879663 A JPS4879663 A JP S4879663A JP 12681372 A JP12681372 A JP 12681372A JP 12681372 A JP12681372 A JP 12681372A JP S4879663 A JPS4879663 A JP S4879663A
Authority
JP
Japan
Prior art keywords
photo
disc
cell
interference
scanned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12681372A
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4879663A publication Critical patent/JPS4879663A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9506—Optical discs

Landscapes

  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP12681372A 1972-01-04 1972-12-19 Pending JPS4879663A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722200222 DE2200222A1 (de) 1972-01-04 1972-01-04 Vorrichtung zur bestimmung der oberflaechenguete

Publications (1)

Publication Number Publication Date
JPS4879663A true JPS4879663A (enrdf_load_stackoverflow) 1973-10-25

Family

ID=5832302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12681372A Pending JPS4879663A (enrdf_load_stackoverflow) 1972-01-04 1972-12-19

Country Status (5)

Country Link
JP (1) JPS4879663A (enrdf_load_stackoverflow)
CA (1) CA1017139A (enrdf_load_stackoverflow)
DE (1) DE2200222A1 (enrdf_load_stackoverflow)
FR (1) FR2166390B1 (enrdf_load_stackoverflow)
GB (1) GB1406470A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4069484A (en) * 1976-05-28 1978-01-17 Rca Corporation Defect plotting system
US4030835A (en) * 1976-05-28 1977-06-21 Rca Corporation Defect detection system
DE3472300D1 (en) * 1983-04-22 1988-07-28 Sick Optik Elektronik Erwin Device for the detection of faults
JPS60147945A (ja) * 1984-01-10 1985-08-05 Victor Co Of Japan Ltd 光デイスク検査装置
US5168412A (en) * 1989-06-28 1992-12-01 Toan Doan Surface interference detector
US10816482B2 (en) 2016-10-26 2020-10-27 Board Of Regents, The University Of Texas System High throughput, high resolution optical metrology for reflective and transmissive nanophotonic devices

Also Published As

Publication number Publication date
FR2166390A1 (enrdf_load_stackoverflow) 1973-08-17
CA1017139A (en) 1977-09-13
FR2166390B1 (enrdf_load_stackoverflow) 1974-01-04
DE2200222A1 (de) 1973-07-12
GB1406470A (en) 1975-09-17

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