GB1406470A - Testing the quality of surfaces - Google Patents

Testing the quality of surfaces

Info

Publication number
GB1406470A
GB1406470A GB5890372A GB5890372A GB1406470A GB 1406470 A GB1406470 A GB 1406470A GB 5890372 A GB5890372 A GB 5890372A GB 5890372 A GB5890372 A GB 5890372A GB 1406470 A GB1406470 A GB 1406470A
Authority
GB
United Kingdom
Prior art keywords
photo
disc
cell
interference
scanned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5890372A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1406470A publication Critical patent/GB1406470A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9506—Optical discs

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

1406470 Photo-electric apparatus INTERNATIONAL BUSINESS MACHINES CORP 20 Dec 1972 [4 Jan 1972] 58903/72 Heading G1A In an apparatus for monitoring irregularities on a periodically structured surface 8 in which a laser beam is scanned - from 2a to 2c - periodically across the surface to produce an interference pattern at a photo-cell assembly 9, the intensity of at least one order of interference is sensed. A laser beam is scanned across the surface 8, e.g. of a magnetic storage disc, by an oscillating mirror 5. For a disc of acceptable quality the machine markings on the disc will have a regular, periodic structure, Fig.2 (not shown) and the disc will hence act as a reflection grating. The assembly 9 is positioned such that the -1, 0, +1 orders of interference fall on photo-cells 12, 10, 11 respectively. A photo-cell 14 monitors scattered light, while photo-cell 13 receives the ¢ order of interference. For a regular surface structure the output from photo-cell 13 will be steady and relatively low, Fig.4, left (not shown). However, irregularities in the machine cut, Fig.3 (not shown) will produce a varying, relatively high output from photo-cell 13, Fig.4 right. The scattered light level output from photo-cell 14 will also be greater in the latter case. The entire disc surface is scanned either by rotating the disc or by rotating the optical system about the disc.
GB5890372A 1972-01-04 1972-12-20 Testing the quality of surfaces Expired GB1406470A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722200222 DE2200222A1 (en) 1972-01-04 1972-01-04 DEVICE FOR DETERMINING THE SURFACE QUALITY

Publications (1)

Publication Number Publication Date
GB1406470A true GB1406470A (en) 1975-09-17

Family

ID=5832302

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5890372A Expired GB1406470A (en) 1972-01-04 1972-12-20 Testing the quality of surfaces

Country Status (5)

Country Link
JP (1) JPS4879663A (en)
CA (1) CA1017139A (en)
DE (1) DE2200222A1 (en)
FR (1) FR2166390B1 (en)
GB (1) GB1406470A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0405740A2 (en) * 1989-06-28 1991-01-02 Digital Equipment Corporation Surface interference detector
EP3532429A4 (en) * 2016-10-26 2019-11-13 Board of Regents, The University of Texas System High throughput, high resolution optical metrology for reflective and transmissive nanophotonic devices

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4030835A (en) * 1976-05-28 1977-06-21 Rca Corporation Defect detection system
US4069484A (en) * 1976-05-28 1978-01-17 Rca Corporation Defect plotting system
EP0123929B1 (en) * 1983-04-22 1988-06-22 Erwin Sick GmbH Optik-Elektronik Device for the detection of faults
JPS60147945A (en) * 1984-01-10 1985-08-05 Victor Co Of Japan Ltd Optical disc check device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0405740A2 (en) * 1989-06-28 1991-01-02 Digital Equipment Corporation Surface interference detector
EP0405740A3 (en) * 1989-06-28 1992-04-08 Digital Equipment Corporation Surface interference detector
US5168412A (en) * 1989-06-28 1992-12-01 Toan Doan Surface interference detector
EP3532429A4 (en) * 2016-10-26 2019-11-13 Board of Regents, The University of Texas System High throughput, high resolution optical metrology for reflective and transmissive nanophotonic devices
US10816482B2 (en) 2016-10-26 2020-10-27 Board Of Regents, The University Of Texas System High throughput, high resolution optical metrology for reflective and transmissive nanophotonic devices

Also Published As

Publication number Publication date
JPS4879663A (en) 1973-10-25
DE2200222A1 (en) 1973-07-12
FR2166390A1 (en) 1973-08-17
FR2166390B1 (en) 1974-01-04
CA1017139A (en) 1977-09-13

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee