FR2166390B1 - - Google Patents
Info
- Publication number
- FR2166390B1 FR2166390B1 FR7247204A FR7247204A FR2166390B1 FR 2166390 B1 FR2166390 B1 FR 2166390B1 FR 7247204 A FR7247204 A FR 7247204A FR 7247204 A FR7247204 A FR 7247204A FR 2166390 B1 FR2166390 B1 FR 2166390B1
- Authority
- FR
- France
- Prior art keywords
- photo
- disc
- cell
- interference
- scanned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9506—Optical discs
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
1406470 Photo-electric apparatus INTERNATIONAL BUSINESS MACHINES CORP 20 Dec 1972 [4 Jan 1972] 58903/72 Heading G1A In an apparatus for monitoring irregularities on a periodically structured surface 8 in which a laser beam is scanned - from 2a to 2c - periodically across the surface to produce an interference pattern at a photo-cell assembly 9, the intensity of at least one order of interference is sensed. A laser beam is scanned across the surface 8, e.g. of a magnetic storage disc, by an oscillating mirror 5. For a disc of acceptable quality the machine markings on the disc will have a regular, periodic structure, Fig.2 (not shown) and the disc will hence act as a reflection grating. The assembly 9 is positioned such that the -1, 0, +1 orders of interference fall on photo-cells 12, 10, 11 respectively. A photo-cell 14 monitors scattered light, while photo-cell 13 receives the ¢ order of interference. For a regular surface structure the output from photo-cell 13 will be steady and relatively low, Fig.4, left (not shown). However, irregularities in the machine cut, Fig.3 (not shown) will produce a varying, relatively high output from photo-cell 13, Fig.4 right. The scattered light level output from photo-cell 14 will also be greater in the latter case. The entire disc surface is scanned either by rotating the disc or by rotating the optical system about the disc.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19722200222 DE2200222A1 (en) | 1972-01-04 | 1972-01-04 | DEVICE FOR DETERMINING THE SURFACE QUALITY |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2166390A1 FR2166390A1 (en) | 1973-08-17 |
| FR2166390B1 true FR2166390B1 (en) | 1974-01-04 |
Family
ID=5832302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7247204A Expired FR2166390B1 (en) | 1972-01-04 | 1972-12-26 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS4879663A (en) |
| CA (1) | CA1017139A (en) |
| DE (1) | DE2200222A1 (en) |
| FR (1) | FR2166390B1 (en) |
| GB (1) | GB1406470A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4069484A (en) * | 1976-05-28 | 1978-01-17 | Rca Corporation | Defect plotting system |
| US4030835A (en) * | 1976-05-28 | 1977-06-21 | Rca Corporation | Defect detection system |
| EP0123929B1 (en) * | 1983-04-22 | 1988-06-22 | Erwin Sick GmbH Optik-Elektronik | Device for the detection of faults |
| JPS60147945A (en) * | 1984-01-10 | 1985-08-05 | Victor Co Of Japan Ltd | Optical disc check device |
| US5168412A (en) * | 1989-06-28 | 1992-12-01 | Toan Doan | Surface interference detector |
| KR102286356B1 (en) | 2016-10-26 | 2021-08-04 | 보드 오브 리전츠, 더 유니버시티 오브 텍사스 시스템 | High-Throughput, High-Resolution Optical Techniques for Reflective and Transmissive Nanophoton Devices |
-
1972
- 1972-01-04 DE DE19722200222 patent/DE2200222A1/en active Pending
- 1972-12-19 JP JP12681372A patent/JPS4879663A/ja active Pending
- 1972-12-20 GB GB5890372A patent/GB1406470A/en not_active Expired
- 1972-12-26 FR FR7247204A patent/FR2166390B1/fr not_active Expired
-
1973
- 1973-01-02 CA CA160,403A patent/CA1017139A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2166390A1 (en) | 1973-08-17 |
| JPS4879663A (en) | 1973-10-25 |
| CA1017139A (en) | 1977-09-13 |
| DE2200222A1 (en) | 1973-07-12 |
| GB1406470A (en) | 1975-09-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |