DE2200222A1 - Vorrichtung zur bestimmung der oberflaechenguete - Google Patents
Vorrichtung zur bestimmung der oberflaechengueteInfo
- Publication number
- DE2200222A1 DE2200222A1 DE19722200222 DE2200222A DE2200222A1 DE 2200222 A1 DE2200222 A1 DE 2200222A1 DE 19722200222 DE19722200222 DE 19722200222 DE 2200222 A DE2200222 A DE 2200222A DE 2200222 A1 DE2200222 A1 DE 2200222A1
- Authority
- DE
- Germany
- Prior art keywords
- light
- scanning beam
- scanning
- arrangement
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000737 periodic effect Effects 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 6
- 230000007547 defect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 101100390736 Danio rerio fign gene Proteins 0.000 description 1
- 101100390738 Mus musculus Fign gene Proteins 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9506—Optical discs
Landscapes
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19722200222 DE2200222A1 (de) | 1972-01-04 | 1972-01-04 | Vorrichtung zur bestimmung der oberflaechenguete |
| JP12681372A JPS4879663A (enrdf_load_stackoverflow) | 1972-01-04 | 1972-12-19 | |
| GB5890372A GB1406470A (en) | 1972-01-04 | 1972-12-20 | Testing the quality of surfaces |
| FR7247204A FR2166390B1 (enrdf_load_stackoverflow) | 1972-01-04 | 1972-12-26 | |
| CA160,403A CA1017139A (en) | 1972-01-04 | 1973-01-02 | Measurement of surface defects of periodically structured surfaces |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19722200222 DE2200222A1 (de) | 1972-01-04 | 1972-01-04 | Vorrichtung zur bestimmung der oberflaechenguete |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2200222A1 true DE2200222A1 (de) | 1973-07-12 |
Family
ID=5832302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19722200222 Pending DE2200222A1 (de) | 1972-01-04 | 1972-01-04 | Vorrichtung zur bestimmung der oberflaechenguete |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS4879663A (enrdf_load_stackoverflow) |
| CA (1) | CA1017139A (enrdf_load_stackoverflow) |
| DE (1) | DE2200222A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2166390B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1406470A (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4069484A (en) * | 1976-05-28 | 1978-01-17 | Rca Corporation | Defect plotting system |
| US4030835A (en) * | 1976-05-28 | 1977-06-21 | Rca Corporation | Defect detection system |
| DE3472300D1 (en) * | 1983-04-22 | 1988-07-28 | Sick Optik Elektronik Erwin | Device for the detection of faults |
| JPS60147945A (ja) * | 1984-01-10 | 1985-08-05 | Victor Co Of Japan Ltd | 光デイスク検査装置 |
| US5168412A (en) * | 1989-06-28 | 1992-12-01 | Toan Doan | Surface interference detector |
| US10816482B2 (en) | 2016-10-26 | 2020-10-27 | Board Of Regents, The University Of Texas System | High throughput, high resolution optical metrology for reflective and transmissive nanophotonic devices |
-
1972
- 1972-01-04 DE DE19722200222 patent/DE2200222A1/de active Pending
- 1972-12-19 JP JP12681372A patent/JPS4879663A/ja active Pending
- 1972-12-20 GB GB5890372A patent/GB1406470A/en not_active Expired
- 1972-12-26 FR FR7247204A patent/FR2166390B1/fr not_active Expired
-
1973
- 1973-01-02 CA CA160,403A patent/CA1017139A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2166390A1 (enrdf_load_stackoverflow) | 1973-08-17 |
| CA1017139A (en) | 1977-09-13 |
| JPS4879663A (enrdf_load_stackoverflow) | 1973-10-25 |
| FR2166390B1 (enrdf_load_stackoverflow) | 1974-01-04 |
| GB1406470A (en) | 1975-09-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE4031637C2 (de) | Anordnung zum Messen einer Verschiebung zwischen zwei Objekten | |
| EP0011708B1 (de) | Verfahren und Vorrichtung zur Messung der Ebenheit, der Rauhigkeit oder des Krümmungsradius einer Messfläche | |
| DE2724121C3 (de) | Verfahren und Vorrichtung zum Erfassen von Defekten in einer zur Informationsspeicherung dienenden Spiralrille | |
| DE68928192T2 (de) | Vorrichtung und Verfahren zur Positionsdetektion | |
| DE2853427C2 (enrdf_load_stackoverflow) | ||
| DE2802416A1 (de) | Optische vorrichtung | |
| DE3625564A1 (de) | Verfahren zur ermittlung des durchmessers der raeder von schienenfahrzeugen und einrichtung hierzu | |
| DE3642377A1 (de) | Verfahren und vorrichtung zur abmessung der dicke einer folien- oder blattartigen materialbahn | |
| DE602005002274T2 (de) | Berührungsloses Messsystem für sphärische und asphärische Oberflächen und Methode zur Benutzung | |
| DE2248194A1 (de) | Messgeraet | |
| DE3428593A1 (de) | Optisches oberflaechenmessgeraet | |
| DE19731854A1 (de) | Skala zur Erfassung der Position eines sich bewegenden Objekts sowie eine diese Skala verwendende Vorrichtung | |
| DE2854057A1 (de) | Ebenheits-messeinrichtung | |
| DE102009019140A1 (de) | Verfahren und Kalibriermaske zum Kalibrieren einer Positionsmessvorrichtung | |
| DE2636211B1 (de) | Interferometrisches verfahren zur abstands- oder ebenheitsmessung | |
| DE2758149C2 (de) | Interferometrisches Verfahren mit λ /4-Auflösung zur Abstands-, Dicken- und/oder Ebenheitsmessung | |
| DE69027454T2 (de) | Positionsdetektor | |
| DE3645132C2 (enrdf_load_stackoverflow) | ||
| DE1905392A1 (de) | Vorrichtung zum Erzeugen von elektrischen Signalen mittels eines Skalengitters,das relativ zu einem Indexgitter bewegbar ist | |
| DE2200222A1 (de) | Vorrichtung zur bestimmung der oberflaechenguete | |
| DE2945175A1 (de) | Messvorrichtung | |
| DE2636498C2 (de) | Verfahren zur interferometrischen Oberflächenmessiing | |
| DD241643A1 (de) | Messverfahren und vorrichtung zur beruehrungslosen durchmesserbestimmung duenner draehte | |
| DE2539577A1 (de) | Verfahren und vorrichtung zum feststellen von winkelversetzungen | |
| DE102014215633A1 (de) | Positionsmesseinrichtung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHJ | Non-payment of the annual fee |