FR2130662A1 - High purity thin layers - prodn by zone melting/recrystallisation - Google Patents
High purity thin layers - prodn by zone melting/recrystallisationInfo
- Publication number
- FR2130662A1 FR2130662A1 FR7210403A FR7210403A FR2130662A1 FR 2130662 A1 FR2130662 A1 FR 2130662A1 FR 7210403 A FR7210403 A FR 7210403A FR 7210403 A FR7210403 A FR 7210403A FR 2130662 A1 FR2130662 A1 FR 2130662A1
- Authority
- FR
- France
- Prior art keywords
- zone
- prodn
- recrystallisation
- high purity
- thin layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001953 recrystallisation Methods 0.000 title 1
- 238000004857 zone melting Methods 0.000 title 1
- 239000010410 layer Substances 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- 239000002344 surface layer Substances 0.000 abstract 2
- 230000004927 fusion Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 238000010408 sweeping Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/22—Heating of the molten zone by irradiation or electric discharge
- C30B13/24—Heating of the molten zone by irradiation or electric discharge using electromagnetic waves
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Recrystallisation Techniques (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712114593 DE2114593A1 (de) | 1971-03-25 | 1971-03-25 | Zonenrekristallisationsverfahren dünner Schichten |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2130662A1 true FR2130662A1 (en) | 1972-11-03 |
| FR2130662B1 FR2130662B1 (enExample) | 1975-12-26 |
Family
ID=5802779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7210403A Granted FR2130662A1 (en) | 1971-03-25 | 1972-03-24 | High purity thin layers - prodn by zone melting/recrystallisation |
Country Status (6)
| Country | Link |
|---|---|
| BE (1) | BE781228A (enExample) |
| DE (1) | DE2114593A1 (enExample) |
| FR (1) | FR2130662A1 (enExample) |
| IT (1) | IT950450B (enExample) |
| LU (1) | LU65027A1 (enExample) |
| NL (1) | NL7202781A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56145198A (en) * | 1980-04-04 | 1981-11-11 | Hitachi Ltd | Forming method of single crystal silicon membrane and device therefor |
| DE3017923A1 (de) * | 1980-05-09 | 1981-11-12 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen von platten- oder bandfoermigen siliziumkristallkoerpern mit einer der kolumnarstruktur gleichwertigen saeulenstruktur durch sintern |
| DE3126050A1 (de) * | 1981-07-02 | 1983-01-13 | Hanno Prof. Dr. 2000 Hamburg Schaumburg | Verfahren zur erzeugung monokristalliner oder grobpolykristalliner schichten |
| FR2547319B1 (fr) * | 1983-06-09 | 1987-10-09 | Gleizes Raymond | Procede et appareil de fabrication de couches monocristallines et macrocristallines, notamment pour cellules photovoltaiques |
-
1971
- 1971-03-25 DE DE19712114593 patent/DE2114593A1/de active Pending
-
1972
- 1972-03-02 NL NL7202781A patent/NL7202781A/xx unknown
- 1972-03-22 IT IT2219972A patent/IT950450B/it active
- 1972-03-23 LU LU65027D patent/LU65027A1/xx unknown
- 1972-03-24 FR FR7210403A patent/FR2130662A1/fr active Granted
- 1972-03-24 BE BE781228A patent/BE781228A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR2130662B1 (enExample) | 1975-12-26 |
| NL7202781A (enExample) | 1972-09-27 |
| BE781228A (fr) | 1972-07-17 |
| DE2114593A1 (de) | 1972-11-09 |
| IT950450B (it) | 1973-06-20 |
| LU65027A1 (enExample) | 1972-07-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |