FR2080989B1 - - Google Patents
Info
- Publication number
- FR2080989B1 FR2080989B1 FR7104743A FR7104743A FR2080989B1 FR 2080989 B1 FR2080989 B1 FR 2080989B1 FR 7104743 A FR7104743 A FR 7104743A FR 7104743 A FR7104743 A FR 7104743A FR 2080989 B1 FR2080989 B1 FR 2080989B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
- H10D62/137—Collector regions of BJTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/60—Wet etching
- H10P50/64—Wet etching of semiconductor materials
- H10P50/642—Chemical etching
- H10P50/644—Anisotropic liquid etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/69—Etching of wafers, substrates or parts of devices using masks for semiconductor materials
- H10P50/691—Etching of wafers, substrates or parts of devices using masks for semiconductor materials for Group V materials or Group III-V materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/01—Manufacture or treatment
- H10W10/021—Manufacture or treatment of air gaps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/20—Air gaps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/20—Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US1104470A | 1970-02-13 | 1970-02-13 | |
| US1107070A | 1970-02-13 | 1970-02-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2080989A1 FR2080989A1 (https=) | 1971-11-26 |
| FR2080989B1 true FR2080989B1 (https=) | 1976-03-19 |
Family
ID=26681909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7104743A Expired FR2080989B1 (https=) | 1970-02-13 | 1971-02-12 |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE2106540A1 (https=) |
| FR (1) | FR2080989B1 (https=) |
| GB (1) | GB1300033A (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3818289A (en) * | 1972-04-10 | 1974-06-18 | Raytheon Co | Semiconductor integrated circuit structures |
| US4677456A (en) * | 1979-05-25 | 1987-06-30 | Raytheon Company | Semiconductor structure and manufacturing method |
| FR2469804A1 (fr) * | 1979-11-07 | 1981-05-22 | Labo Electronique Physique | Procede de realisation d'un dispositif semi-conducteur comprenant un assemblage de diodes en serie et dispositif en resultant |
| JPS59165455A (ja) * | 1983-03-10 | 1984-09-18 | Toshiba Corp | 半導体装置 |
| DE3716469A1 (de) * | 1987-04-07 | 1988-10-27 | Licentia Gmbh | Strukturierter halbleiterkoerper |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1493465A (fr) * | 1966-05-03 | 1967-09-01 | Radiotechnique Coprim Rtc | Perfectionnements aux procédés de fabrication de dispositifs semi-conducteurs |
| NL144778B (nl) * | 1966-12-20 | 1975-01-15 | Western Electric Co | Werkwijze voor het vervaardigen van een halfgeleiderinrichting door anisotroop etsen alsmede aldus vervaardigde inrichting. |
| FR1527898A (fr) * | 1967-03-16 | 1968-06-07 | Radiotechnique Coprim Rtc | Agencement de dispositifs semi-conducteurs portés par un support commun et son procédé de fabrication |
| US3483464A (en) * | 1967-08-10 | 1969-12-09 | Bell Telephone Labor Inc | Voltage regulator systems employing a multifunctional circuit comprising a field effect transistor constant current source |
| GB1248051A (en) * | 1968-03-01 | 1971-09-29 | Post Office | Method of making insulated gate field effect transistors |
| GB1244759A (en) * | 1968-12-11 | 1971-09-02 | Associated Semiconductor Mft | Improvements in and relating to methods of manufacturing semiconductor devices |
-
1971
- 1971-02-11 DE DE19712106540 patent/DE2106540A1/de active Pending
- 1971-02-12 FR FR7104743A patent/FR2080989B1/fr not_active Expired
- 1971-04-19 GB GB21262/71A patent/GB1300033A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2080989A1 (https=) | 1971-11-26 |
| GB1300033A (en) | 1972-12-20 |
| DE2106540A1 (de) | 1971-08-19 |