FR2078934A5 - - Google Patents

Info

Publication number
FR2078934A5
FR2078934A5 FR7106044A FR7106044A FR2078934A5 FR 2078934 A5 FR2078934 A5 FR 2078934A5 FR 7106044 A FR7106044 A FR 7106044A FR 7106044 A FR7106044 A FR 7106044A FR 2078934 A5 FR2078934 A5 FR 2078934A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7106044A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of FR2078934A5 publication Critical patent/FR2078934A5/fr
Priority to DE19722218385 priority Critical patent/DE2218385A1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165—Diffusion sources
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S118/00—Coating apparatus
    • Y10S118/90—Semiconductor vapor doping

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
FR7106044A 1970-02-27 1971-02-23 Expired FR2078934A5 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19722218385 DE2218385A1 (de) 1971-02-23 1972-04-15 Schaltungsanordnung zur Erzeugung eines Sägezahnstromes durch eine Ablenkspule

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2009359A DE2009359C3 (de) 1970-02-27 1970-02-27 Anordnung zum Eindiffundieren von Dotierstoffen in ein Halbleitermaterial

Publications (1)

Publication Number Publication Date
FR2078934A5 true FR2078934A5 (fr) 1971-11-05

Family

ID=5763603

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7106044A Expired FR2078934A5 (fr) 1970-02-27 1971-02-23

Country Status (11)

Country Link
US (1) US3698354A (fr)
JP (1) JPS4827493B1 (fr)
AT (1) AT307510B (fr)
CA (1) CA942640A (fr)
CH (1) CH540717A (fr)
CS (1) CS148100B2 (fr)
DE (1) DE2009359C3 (fr)
FR (1) FR2078934A5 (fr)
GB (1) GB1258226A (fr)
NL (1) NL7012804A (fr)
SE (1) SE354015B (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5076837U (fr) * 1973-11-15 1975-07-04
JPS5942970B2 (ja) * 1979-03-29 1984-10-18 テルサ−ムコ株式会社 半導体熱処理用反応管
JPS5944771B2 (ja) * 1979-03-29 1984-11-01 テルサ−ムコ株式会社 半導体熱処理炉
JPS5923464B2 (ja) * 1979-04-18 1984-06-02 テルサ−ムコ株式会社 半導体熱処理装置
US4804633A (en) * 1988-02-18 1989-02-14 Northern Telecom Limited Silicon-on-insulator substrates annealed in polysilicon tube
GB9324002D0 (en) * 1993-11-22 1994-01-12 Electrotech Ltd Processing system

Also Published As

Publication number Publication date
SE354015B (fr) 1973-02-26
CH540717A (de) 1973-08-31
NL7012804A (fr) 1971-08-31
DE2009359A1 (de) 1971-09-09
DE2009359C3 (de) 1974-05-02
JPS4827493B1 (fr) 1973-08-23
CA942640A (en) 1974-02-26
GB1258226A (fr) 1971-12-22
CS148100B2 (fr) 1973-02-22
AT307510B (de) 1973-05-25
DE2009359B2 (de) 1973-09-20
US3698354A (en) 1972-10-17

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Legal Events

Date Code Title Description
ST Notification of lapse