GB9324002D0 - Processing system - Google Patents
Processing systemInfo
- Publication number
- GB9324002D0 GB9324002D0 GB939324002A GB9324002A GB9324002D0 GB 9324002 D0 GB9324002 D0 GB 9324002D0 GB 939324002 A GB939324002 A GB 939324002A GB 9324002 A GB9324002 A GB 9324002A GB 9324002 D0 GB9324002 D0 GB 9324002D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- processing system
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB939324002A GB9324002D0 (en) | 1993-11-22 | 1993-11-22 | Processing system |
GB9422824A GB2284096A (en) | 1993-11-22 | 1994-10-11 | Sealing processing chambers |
JP28667494A JPH083745A (en) | 1993-11-22 | 1994-11-21 | Apparatus for processing workpiece |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB939324002A GB9324002D0 (en) | 1993-11-22 | 1993-11-22 | Processing system |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9324002D0 true GB9324002D0 (en) | 1994-01-12 |
Family
ID=10745518
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB939324002A Pending GB9324002D0 (en) | 1993-11-22 | 1993-11-22 | Processing system |
GB9422824A Withdrawn GB2284096A (en) | 1993-11-22 | 1994-10-11 | Sealing processing chambers |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9422824A Withdrawn GB2284096A (en) | 1993-11-22 | 1994-10-11 | Sealing processing chambers |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH083745A (en) |
GB (2) | GB9324002D0 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4015343B2 (en) * | 2000-03-22 | 2007-11-28 | 芝浦メカトロニクス株式会社 | Dry etching equipment |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2009359C3 (en) * | 1970-02-27 | 1974-05-02 | Siemens Ag, 1000 Berlin U. 8000 Muenchen | Arrangement for diffusing dopants into a semiconductor material |
US4293249A (en) * | 1980-03-03 | 1981-10-06 | Texas Instruments Incorporated | Material handling system and method for manufacturing line |
US4548699A (en) * | 1984-05-17 | 1985-10-22 | Varian Associates, Inc. | Transfer plate rotation system |
DE3588132T2 (en) * | 1984-09-19 | 1997-04-03 | Applied Materials Inc | Device for scanning wafers |
US5143103A (en) * | 1991-01-04 | 1992-09-01 | International Business Machines Corporation | Apparatus for cleaning and drying workpieces |
GB9122676D0 (en) * | 1991-10-25 | 1991-12-11 | Electrotech Ltd | Processing system |
-
1993
- 1993-11-22 GB GB939324002A patent/GB9324002D0/en active Pending
-
1994
- 1994-10-11 GB GB9422824A patent/GB2284096A/en not_active Withdrawn
- 1994-11-21 JP JP28667494A patent/JPH083745A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
GB2284096A (en) | 1995-05-24 |
JPH083745A (en) | 1996-01-09 |
GB9422824D0 (en) | 1995-01-04 |
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