GB9324002D0 - Processing system - Google Patents

Processing system

Info

Publication number
GB9324002D0
GB9324002D0 GB939324002A GB9324002A GB9324002D0 GB 9324002 D0 GB9324002 D0 GB 9324002D0 GB 939324002 A GB939324002 A GB 939324002A GB 9324002 A GB9324002 A GB 9324002A GB 9324002 D0 GB9324002 D0 GB 9324002D0
Authority
GB
United Kingdom
Prior art keywords
processing system
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB939324002A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electrotech Ltd
Original Assignee
Electrotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electrotech Ltd filed Critical Electrotech Ltd
Priority to GB939324002A priority Critical patent/GB9324002D0/en
Publication of GB9324002D0 publication Critical patent/GB9324002D0/en
Priority to GB9422824A priority patent/GB2284096A/en
Priority to JP28667494A priority patent/JPH083745A/en
Pending legal-status Critical Current

Links

GB939324002A 1993-11-22 1993-11-22 Processing system Pending GB9324002D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB939324002A GB9324002D0 (en) 1993-11-22 1993-11-22 Processing system
GB9422824A GB2284096A (en) 1993-11-22 1994-10-11 Sealing processing chambers
JP28667494A JPH083745A (en) 1993-11-22 1994-11-21 Apparatus for processing workpiece

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB939324002A GB9324002D0 (en) 1993-11-22 1993-11-22 Processing system

Publications (1)

Publication Number Publication Date
GB9324002D0 true GB9324002D0 (en) 1994-01-12

Family

ID=10745518

Family Applications (2)

Application Number Title Priority Date Filing Date
GB939324002A Pending GB9324002D0 (en) 1993-11-22 1993-11-22 Processing system
GB9422824A Withdrawn GB2284096A (en) 1993-11-22 1994-10-11 Sealing processing chambers

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB9422824A Withdrawn GB2284096A (en) 1993-11-22 1994-10-11 Sealing processing chambers

Country Status (2)

Country Link
JP (1) JPH083745A (en)
GB (2) GB9324002D0 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4015343B2 (en) * 2000-03-22 2007-11-28 芝浦メカトロニクス株式会社 Dry etching equipment

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2009359C3 (en) * 1970-02-27 1974-05-02 Siemens Ag, 1000 Berlin U. 8000 Muenchen Arrangement for diffusing dopants into a semiconductor material
US4293249A (en) * 1980-03-03 1981-10-06 Texas Instruments Incorporated Material handling system and method for manufacturing line
US4548699A (en) * 1984-05-17 1985-10-22 Varian Associates, Inc. Transfer plate rotation system
DE3588132T2 (en) * 1984-09-19 1997-04-03 Applied Materials Inc Device for scanning wafers
US5143103A (en) * 1991-01-04 1992-09-01 International Business Machines Corporation Apparatus for cleaning and drying workpieces
GB9122676D0 (en) * 1991-10-25 1991-12-11 Electrotech Ltd Processing system

Also Published As

Publication number Publication date
GB2284096A (en) 1995-05-24
JPH083745A (en) 1996-01-09
GB9422824D0 (en) 1995-01-04

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