GB9422824D0 - Processing system - Google Patents

Processing system

Info

Publication number
GB9422824D0
GB9422824D0 GB9422824A GB9422824A GB9422824D0 GB 9422824 D0 GB9422824 D0 GB 9422824D0 GB 9422824 A GB9422824 A GB 9422824A GB 9422824 A GB9422824 A GB 9422824A GB 9422824 D0 GB9422824 D0 GB 9422824D0
Authority
GB
United Kingdom
Prior art keywords
processing system
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB9422824A
Other versions
GB2284096A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electrotech Ltd
Original Assignee
Electrotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electrotech Ltd filed Critical Electrotech Ltd
Publication of GB9422824D0 publication Critical patent/GB9422824D0/en
Publication of GB2284096A publication Critical patent/GB2284096A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
GB9422824A 1993-11-22 1994-10-11 Sealing processing chambers Withdrawn GB2284096A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB939324002A GB9324002D0 (en) 1993-11-22 1993-11-22 Processing system

Publications (2)

Publication Number Publication Date
GB9422824D0 true GB9422824D0 (en) 1995-01-04
GB2284096A GB2284096A (en) 1995-05-24

Family

ID=10745518

Family Applications (2)

Application Number Title Priority Date Filing Date
GB939324002A Pending GB9324002D0 (en) 1993-11-22 1993-11-22 Processing system
GB9422824A Withdrawn GB2284096A (en) 1993-11-22 1994-10-11 Sealing processing chambers

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB939324002A Pending GB9324002D0 (en) 1993-11-22 1993-11-22 Processing system

Country Status (2)

Country Link
JP (1) JPH083745A (en)
GB (2) GB9324002D0 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4015343B2 (en) * 2000-03-22 2007-11-28 芝浦メカトロニクス株式会社 Dry etching equipment

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2009359C3 (en) * 1970-02-27 1974-05-02 Siemens Ag, 1000 Berlin U. 8000 Muenchen Arrangement for diffusing dopants into a semiconductor material
US4293249A (en) * 1980-03-03 1981-10-06 Texas Instruments Incorporated Material handling system and method for manufacturing line
US4548699A (en) * 1984-05-17 1985-10-22 Varian Associates, Inc. Transfer plate rotation system
DE3588237T2 (en) * 1984-09-19 2002-11-14 Applied Materials, Inc. Device for scanning wafers by an ion beam
US5143103A (en) * 1991-01-04 1992-09-01 International Business Machines Corporation Apparatus for cleaning and drying workpieces
GB9122676D0 (en) * 1991-10-25 1991-12-11 Electrotech Ltd Processing system

Also Published As

Publication number Publication date
GB2284096A (en) 1995-05-24
GB9324002D0 (en) 1994-01-12
JPH083745A (en) 1996-01-09

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)