FR2078463A5 - Photographic etching exposure matrix prodn - Google Patents

Photographic etching exposure matrix prodn

Info

Publication number
FR2078463A5
FR2078463A5 FR7104569A FR7104569A FR2078463A5 FR 2078463 A5 FR2078463 A5 FR 2078463A5 FR 7104569 A FR7104569 A FR 7104569A FR 7104569 A FR7104569 A FR 7104569A FR 2078463 A5 FR2078463 A5 FR 2078463A5
Authority
FR
France
Prior art keywords
etching
matrix
acid
prodn
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7104569A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of FR2078463A5 publication Critical patent/FR2078463A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Surface Treatment Of Glass (AREA)
FR7104569A 1970-02-18 1971-02-11 Photographic etching exposure matrix prodn Expired FR2078463A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702007484 DE2007484C3 (de) 1970-02-18 1970-02-18 Verfahren zur Herstellung einer Belichtungsmaske für die Fotoätztechnik

Publications (1)

Publication Number Publication Date
FR2078463A5 true FR2078463A5 (en) 1971-11-05

Family

ID=5762634

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7104569A Expired FR2078463A5 (en) 1970-02-18 1971-02-11 Photographic etching exposure matrix prodn

Country Status (3)

Country Link
DE (1) DE2007484C3 (fr)
FR (1) FR2078463A5 (fr)
NL (1) NL7102108A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02124228A (ja) * 1988-10-29 1990-05-11 Fanuc Ltd ワイヤ放電加工装置

Also Published As

Publication number Publication date
NL7102108A (fr) 1971-08-20
DE2007484B2 (de) 1973-03-15
DE2007484A1 (de) 1971-09-16
DE2007484C3 (de) 1973-09-27

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Legal Events

Date Code Title Description
ST Notification of lapse