NL7102108A - - Google Patents

Info

Publication number
NL7102108A
NL7102108A NL7102108A NL7102108A NL7102108A NL 7102108 A NL7102108 A NL 7102108A NL 7102108 A NL7102108 A NL 7102108A NL 7102108 A NL7102108 A NL 7102108A NL 7102108 A NL7102108 A NL 7102108A
Authority
NL
Netherlands
Application number
NL7102108A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7102108A publication Critical patent/NL7102108A/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Surface Treatment Of Glass (AREA)
  • ing And Chemical Polishing (AREA)
NL7102108A 1970-02-18 1971-02-17 NL7102108A (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702007484 DE2007484C3 (de) 1970-02-18 1970-02-18 Verfahren zur Herstellung einer Belichtungsmaske für die Fotoätztechnik

Publications (1)

Publication Number Publication Date
NL7102108A true NL7102108A (xx) 1971-08-20

Family

ID=5762634

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7102108A NL7102108A (xx) 1970-02-18 1971-02-17

Country Status (3)

Country Link
DE (1) DE2007484C3 (xx)
FR (1) FR2078463A5 (xx)
NL (1) NL7102108A (xx)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02124228A (ja) * 1988-10-29 1990-05-11 Fanuc Ltd ワイヤ放電加工装置

Also Published As

Publication number Publication date
DE2007484C3 (de) 1973-09-27
FR2078463A5 (en) 1971-11-05
DE2007484A1 (de) 1971-09-16
DE2007484B2 (de) 1973-03-15

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