FR2052433A5 - - Google Patents

Info

Publication number
FR2052433A5
FR2052433A5 FR7019119A FR7019119A FR2052433A5 FR 2052433 A5 FR2052433 A5 FR 2052433A5 FR 7019119 A FR7019119 A FR 7019119A FR 7019119 A FR7019119 A FR 7019119A FR 2052433 A5 FR2052433 A5 FR 2052433A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7019119A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pennwalt Corp
Original Assignee
Pennwalt Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pennwalt Corp filed Critical Pennwalt Corp
Application granted granted Critical
Publication of FR2052433A5 publication Critical patent/FR2052433A5/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7019119A 1969-06-25 1970-05-26 Expired FR2052433A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83633469A 1969-06-25 1969-06-25

Publications (1)

Publication Number Publication Date
FR2052433A5 true FR2052433A5 (de) 1971-04-09

Family

ID=25271741

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7019119A Expired FR2052433A5 (de) 1969-06-25 1970-05-26

Country Status (4)

Country Link
US (1) US3563202A (de)
DE (1) DE2030688A1 (de)
FR (1) FR2052433A5 (de)
NL (1) NL7007310A (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2916080A1 (de) * 1979-04-20 1980-10-23 Kischinevskij G Uni Im V I Verfahren zum vakuumaufdampfen von halbleiterschichten und einrichtung zur ausfuehrung dieses verfahrens
DE4027034C1 (de) * 1990-08-27 1991-09-12 Leybold Ag, 6450 Hanau, De
DE102004047938A1 (de) * 2004-10-01 2006-04-13 Leybold Optics Gmbh Vorrichtung für die Beschichtung eines bandförmigen Substrates

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3908585A (en) * 1974-04-25 1975-09-30 Goodyear Tire & Rubber Apparatus using super-heated vapor for drying solvent-treated tire cord fabric
US4023523A (en) * 1975-04-23 1977-05-17 Xerox Corporation Coater hardware and method for obtaining uniform photoconductive layers on a xerographic photoreceptor
CA1219547A (en) * 1983-04-04 1987-03-24 Prem Nath Apparatus for and method of continuously depositing a highly conductive, highly transmissive film
DE3530106A1 (de) * 1985-08-23 1987-02-26 Kempten Elektroschmelz Gmbh Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen
US4776299A (en) * 1986-05-15 1988-10-11 The United States Of America As Represented By The United States Department Of Energy Source replenishment device for vacuum deposition
FR2611746B1 (fr) * 1987-03-06 1989-06-30 Centre Nat Etd Spatiales Dispositif d'evaporation sous vide d'un metal en continu
JP2612602B2 (ja) * 1987-12-17 1997-05-21 東洋インキ製造 株式会社 連続蒸着フィルムの製造方法および装置
DE4016225C2 (de) * 1990-05-19 1997-08-14 Leybold Ag Reihenverdampfer für Vakuumbedampfungsanlagen
US5716206A (en) * 1995-01-05 1998-02-10 Sumitomo Wiring Systems, Ltd. Apparatus for heating a wire connection or connector
JP4906018B2 (ja) * 2001-03-12 2012-03-28 株式会社半導体エネルギー研究所 成膜方法、発光装置の作製方法及び成膜装置
KR101071605B1 (ko) * 2006-05-19 2011-10-10 가부시키가이샤 알박 유기 증착 재료용 증착 장치, 유기 박막의 제조 방법
US8241938B2 (en) 2010-07-02 2012-08-14 Primestar Solar, Inc. Methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
US8236601B2 (en) 2010-07-02 2012-08-07 Primestar Solar, Inc. Apparatus and methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
US20120090544A1 (en) * 2010-10-18 2012-04-19 Kim Mu-Gyeom Thin film deposition apparatus for continuous deposition, and mask unit and crucible unit included in thin film deposition apparatus
KR101785562B1 (ko) * 2010-10-18 2017-10-18 삼성디스플레이 주식회사 연속 증착이 가능한 박막 증착 장치 및 그 박막 증착 장치에 사용되는 마스크유닛과 도가니유닛
TWI425105B (zh) * 2011-09-20 2014-02-01 Ind Tech Res Inst 蒸鍍裝置以及蒸鍍機台
US8673777B2 (en) * 2011-09-30 2014-03-18 First Solar, Inc. In-line deposition system and process for deposition of a thin film layer
JP6595421B2 (ja) * 2016-08-24 2019-10-23 東芝メモリ株式会社 気化システム

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2916080A1 (de) * 1979-04-20 1980-10-23 Kischinevskij G Uni Im V I Verfahren zum vakuumaufdampfen von halbleiterschichten und einrichtung zur ausfuehrung dieses verfahrens
FR2456144A1 (fr) * 1979-04-20 1980-12-05 Kishinevsky G Unive Procede et dispositif pour la deposition de couches de semi-conducteurs par evaporation sous vide
DE4027034C1 (de) * 1990-08-27 1991-09-12 Leybold Ag, 6450 Hanau, De
DE102004047938A1 (de) * 2004-10-01 2006-04-13 Leybold Optics Gmbh Vorrichtung für die Beschichtung eines bandförmigen Substrates
DE102004047938B4 (de) * 2004-10-01 2008-10-23 Leybold Optics Gmbh Vorrichtung für die Verdampferbeschichtung eines bandförmigen Substrates

Also Published As

Publication number Publication date
DE2030688A1 (de) 1971-01-14
NL7007310A (de) 1970-12-29
US3563202A (en) 1971-02-16

Similar Documents

Publication Publication Date Title
AU2270770A (de)
FR2052433A5 (de)
AU429630B2 (de)
AU2355770A (de)
AU442375B2 (de)
AU427401B2 (de)
AU442322B2 (de)
AU438128B2 (de)
AU410358B2 (de)
AU414607B2 (de)
AU417208B2 (de)
AU442357B2 (de)
AU425297B2 (de)
AU442380B2 (de)
AU428074B2 (de)
AU428129B2 (de)
AU428131B2 (de)
AT308690B (de)
AU442285B2 (de)
CS148806B1 (de)
AU5079269A (de)
AR203167Q (de)
CH568324A5 (de)
CH1274870A4 (de)
AU3858369A (de)

Legal Events

Date Code Title Description
ST Notification of lapse