FR2051360A5 - Semiconductor - Google Patents

Semiconductor

Info

Publication number
FR2051360A5
FR2051360A5 FR7023724A FR7023724A FR2051360A5 FR 2051360 A5 FR2051360 A5 FR 2051360A5 FR 7023724 A FR7023724 A FR 7023724A FR 7023724 A FR7023724 A FR 7023724A FR 2051360 A5 FR2051360 A5 FR 2051360A5
Authority
FR
France
Prior art keywords
semiconductor body
metal compound
hexafluoride
semiconductor
virtually
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7023724A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BBC Brown Boveri AG Switzerland
BBC Brown Boveri France SA
Original Assignee
Brown Boveri und Cie AG Switzerland
BBC Brown Boveri France SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brown Boveri und Cie AG Switzerland, BBC Brown Boveri France SA filed Critical Brown Boveri und Cie AG Switzerland
Application granted granted Critical
Publication of FR2051360A5 publication Critical patent/FR2051360A5/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
    • C23C16/14—Deposition of only one other metal element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR7023724A 1969-06-28 1970-06-26 Semiconductor Expired FR2051360A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691932932 DE1932932A1 (de) 1969-06-28 1969-06-28 Halbleiterelement und Verfahren zu dessen Herstellung

Publications (1)

Publication Number Publication Date
FR2051360A5 true FR2051360A5 (en) 1971-04-02

Family

ID=5738313

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7023724A Expired FR2051360A5 (en) 1969-06-28 1970-06-26 Semiconductor

Country Status (4)

Country Link
DE (1) DE1932932A1 (fr)
FR (1) FR2051360A5 (fr)
NL (1) NL7009425A (fr)
SE (1) SE350650B (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3910046A1 (de) * 1989-03-28 1990-10-04 Binder Magnete Elektromagnetisch betaetigte kupplung
US5028565A (en) * 1989-08-25 1991-07-02 Applied Materials, Inc. Process for CVD deposition of tungsten layer on semiconductor wafer
DE10103736C2 (de) * 2001-01-26 2003-05-08 Lenze Drive Systems Gmbh Elektromagnetisch lüftbare Federkraftbremse mit einem gegen einen Widerlagerflansch pressbaren Bremsrotor

Also Published As

Publication number Publication date
DE1932932A1 (de) 1971-01-07
NL7009425A (fr) 1970-12-30
SE350650B (fr) 1972-10-30

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Legal Events

Date Code Title Description
ST Notification of lapse