SE350650B - - Google Patents

Info

Publication number
SE350650B
SE350650B SE890770A SE890770A SE350650B SE 350650 B SE350650 B SE 350650B SE 890770 A SE890770 A SE 890770A SE 890770 A SE890770 A SE 890770A SE 350650 B SE350650 B SE 350650B
Authority
SE
Sweden
Application number
SE890770A
Inventor
P Batzies
G Gammel
E Mueller
Original Assignee
Bbc Brown Boveri & Cie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bbc Brown Boveri & Cie filed Critical Bbc Brown Boveri & Cie
Publication of SE350650B publication Critical patent/SE350650B/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
    • C23C16/14—Deposition of only one other metal element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
SE890770A 1969-06-28 1970-06-26 SE350650B (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691932932 DE1932932A1 (de) 1969-06-28 1969-06-28 Halbleiterelement und Verfahren zu dessen Herstellung

Publications (1)

Publication Number Publication Date
SE350650B true SE350650B (xx) 1972-10-30

Family

ID=5738313

Family Applications (1)

Application Number Title Priority Date Filing Date
SE890770A SE350650B (xx) 1969-06-28 1970-06-26

Country Status (4)

Country Link
DE (1) DE1932932A1 (xx)
FR (1) FR2051360A5 (xx)
NL (1) NL7009425A (xx)
SE (1) SE350650B (xx)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3910046A1 (de) * 1989-03-28 1990-10-04 Binder Magnete Elektromagnetisch betaetigte kupplung
US5028565A (en) * 1989-08-25 1991-07-02 Applied Materials, Inc. Process for CVD deposition of tungsten layer on semiconductor wafer
DE10103736C2 (de) * 2001-01-26 2003-05-08 Lenze Drive Systems Gmbh Elektromagnetisch lüftbare Federkraftbremse mit einem gegen einen Widerlagerflansch pressbaren Bremsrotor

Also Published As

Publication number Publication date
FR2051360A5 (en) 1971-04-02
DE1932932A1 (de) 1971-01-07
NL7009425A (xx) 1970-12-30

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