FR2032448A1 - - Google Patents
Info
- Publication number
- FR2032448A1 FR2032448A1 FR7003621A FR7003621A FR2032448A1 FR 2032448 A1 FR2032448 A1 FR 2032448A1 FR 7003621 A FR7003621 A FR 7003621A FR 7003621 A FR7003621 A FR 7003621A FR 2032448 A1 FR2032448 A1 FR 2032448A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/007—Autodoping
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/017—Clean surfaces
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/037—Diffusion-deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/049—Equivalence and options
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/085—Isolated-integrated
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/158—Sputtering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/914—Doping
- Y10S438/916—Autodoping control or utilization
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US80281069A | 1969-02-27 | 1969-02-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2032448A1 true FR2032448A1 (fr) | 1970-11-27 |
FR2032448B1 FR2032448B1 (fr) | 1973-07-13 |
Family
ID=25184768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR707003621A Expired FR2032448B1 (fr) | 1969-02-27 | 1970-02-03 |
Country Status (5)
Country | Link |
---|---|
US (1) | US3660180A (fr) |
JP (1) | JPS49386B1 (fr) |
DE (1) | DE2005271C3 (fr) |
FR (1) | FR2032448B1 (fr) |
GB (1) | GB1234179A (fr) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4496609A (en) * | 1969-10-15 | 1985-01-29 | Applied Materials, Inc. | Chemical vapor deposition coating process employing radiant heat and a susceptor |
US3847686A (en) * | 1970-05-27 | 1974-11-12 | Gen Electric | Method of forming silicon epitaxial layers |
JPS52915B1 (fr) * | 1971-06-01 | 1977-01-11 | ||
US3765940A (en) * | 1971-11-08 | 1973-10-16 | Texas Instruments Inc | Vacuum evaporated thin film resistors |
US3982974A (en) * | 1971-11-22 | 1976-09-28 | International Business Machines Corporation | Compensation of autodoping in the manufacture of integrated circuits |
GB1361303A (en) * | 1972-02-11 | 1974-07-24 | Ferranti Ltd | Manufacture of semiconductor devices |
US3915764A (en) * | 1973-05-18 | 1975-10-28 | Westinghouse Electric Corp | Sputtering method for growth of thin uniform layers of epitaxial semiconductive materials doped with impurities |
US4095331A (en) * | 1976-11-04 | 1978-06-20 | The United States Of America As Represented By The Secretary Of The Air Force | Fabrication of an epitaxial layer diode in aluminum nitride on sapphire |
JPS5623739A (en) * | 1979-08-04 | 1981-03-06 | Tohoku Metal Ind Ltd | Manufactue of semiconductor element having buried layer |
FR2493604A1 (fr) * | 1980-10-31 | 1982-05-07 | Thomson Csf | Transistors a effet de champ a grille ultra courte |
GB2179930A (en) * | 1985-09-06 | 1987-03-18 | Philips Electronic Associated | A method of depositing an epitaxial silicon layer |
US4687682A (en) * | 1986-05-02 | 1987-08-18 | American Telephone And Telegraph Company, At&T Technologies, Inc. | Back sealing of silicon wafers |
JPH01161826A (ja) * | 1987-12-18 | 1989-06-26 | Toshiba Corp | 気相エピタキシャル成長法 |
US4859626A (en) * | 1988-06-03 | 1989-08-22 | Texas Instruments Incorporated | Method of forming thin epitaxial layers using multistep growth for autodoping control |
FR2766845B1 (fr) * | 1997-07-31 | 1999-10-15 | Sgs Thomson Microelectronics | Procede d'epitaxie sur un substrat de silicium comprenant des zones fortement dopees a l'arsenic |
WO2002079551A1 (fr) * | 2001-03-30 | 2002-10-10 | Koninklijke Philips Electronics N.V. | Suppression d'autodopage de type n dans les epitaxies de si et sige a basse temperature |
US6844084B2 (en) * | 2002-04-03 | 2005-01-18 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel substrate and heteroepitaxial growth of III-V materials thereon |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3189494A (en) * | 1963-08-22 | 1965-06-15 | Texas Instruments Inc | Epitaxial crystal growth onto a stabilizing layer which prevents diffusion from the substrate |
FR1541490A (fr) * | 1966-10-21 | 1968-10-04 | Philips Nv | Dispositif semi-conducteur et procédé pour sa fabrication |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB830391A (en) * | 1955-10-28 | 1960-03-16 | Edwards High Vacuum Ltd | Improvements in or relating to cathodic sputtering of metal and dielectric films |
US3021271A (en) * | 1959-04-27 | 1962-02-13 | Gen Mills Inc | Growth of solid layers on substrates which are kept under ion bombardment before and during deposition |
NL265823A (fr) * | 1960-06-13 | |||
US3206322A (en) * | 1960-10-31 | 1965-09-14 | Morgan John Robert | Vacuum deposition means and methods for manufacture of electronic components |
US3170825A (en) * | 1961-10-02 | 1965-02-23 | Merck & Co Inc | Delaying the introduction of impurities when vapor depositing an epitaxial layer on a highly doped substrate |
GB986403A (en) * | 1961-11-20 | 1965-03-17 | Texas Instruments Inc | Method of forming p-n junctions |
DE1544264C3 (de) * | 1965-07-01 | 1974-10-24 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen von Halbleiterschichten durch Abscheiden aus der Gasphase |
US3522164A (en) * | 1965-10-21 | 1970-07-28 | Texas Instruments Inc | Semiconductor surface preparation and device fabrication |
US3404450A (en) * | 1966-01-26 | 1968-10-08 | Westinghouse Electric Corp | Method of fabricating an integrated circuit structure including unipolar transistor and bipolar transistor portions |
US3494809A (en) * | 1967-06-05 | 1970-02-10 | Honeywell Inc | Semiconductor processing |
-
1969
- 1969-02-27 US US802810*A patent/US3660180A/en not_active Expired - Lifetime
-
1970
- 1970-01-28 JP JP45007089A patent/JPS49386B1/ja active Pending
- 1970-02-03 FR FR707003621A patent/FR2032448B1/fr not_active Expired
- 1970-02-05 DE DE2005271A patent/DE2005271C3/de not_active Expired
- 1970-02-16 GB GB1234179D patent/GB1234179A/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3189494A (en) * | 1963-08-22 | 1965-06-15 | Texas Instruments Inc | Epitaxial crystal growth onto a stabilizing layer which prevents diffusion from the substrate |
FR1541490A (fr) * | 1966-10-21 | 1968-10-04 | Philips Nv | Dispositif semi-conducteur et procédé pour sa fabrication |
Non-Patent Citations (1)
Title |
---|
REVUE AMERICAINE "IEEE TRANSACTIONS ON ELECTRON DEVICES" VOL. ED-13, N . 7, JUILLET'66 "SILICON VARIABLE CAPACITANCE DIODES WITH HIGH VOLTAGE SENSITIVITY BY LOW TEMPERATURE EPITAXIAL GROWTH" SHO NAJANUMA PAGES : 578 - 589 * |
Also Published As
Publication number | Publication date |
---|---|
GB1234179A (fr) | 1971-06-03 |
DE2005271B2 (de) | 1979-09-20 |
JPS49386B1 (fr) | 1974-01-07 |
DE2005271C3 (de) | 1980-06-12 |
DE2005271A1 (de) | 1970-09-10 |
US3660180A (en) | 1972-05-02 |
FR2032448B1 (fr) | 1973-07-13 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |