FR1207893A - Pompe à vide électrique et méthode de pompage - Google Patents

Pompe à vide électrique et méthode de pompage

Info

Publication number
FR1207893A
FR1207893A FR1207893DA FR1207893A FR 1207893 A FR1207893 A FR 1207893A FR 1207893D A FR1207893D A FR 1207893DA FR 1207893 A FR1207893 A FR 1207893A
Authority
FR
France
Prior art keywords
vacuum pump
electric vacuum
pumping method
pumping
electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US673816A external-priority patent/US2993638A/en
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Application granted granted Critical
Publication of FR1207893A publication Critical patent/FR1207893A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR1207893D 1957-07-24 1958-07-23 Pompe à vide électrique et méthode de pompage Expired FR1207893A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US673816A US2993638A (en) 1957-07-24 1957-07-24 Electrical vacuum pump apparatus and method
US801186A US3088657A (en) 1957-07-24 1959-03-23 Glow discharge vacuum pump apparatus

Publications (1)

Publication Number Publication Date
FR1207893A true FR1207893A (fr) 1960-02-19

Family

ID=27101017

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1207893D Expired FR1207893A (fr) 1957-07-24 1958-07-23 Pompe à vide électrique et méthode de pompage

Country Status (6)

Country Link
US (1) US3088657A (de)
CH (2) CH398868A (de)
DE (2) DE1098667B (de)
FR (1) FR1207893A (de)
GB (3) GB883189A (de)
NL (3) NL6504257A (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3107045A (en) * 1961-02-02 1963-10-15 Varian Associates Getter ion pump apparatus
US3107844A (en) * 1959-11-12 1963-10-22 Ultek Corp Single cell vacuum apparatus
US3149774A (en) * 1961-01-27 1964-09-22 Varian Associates Getter ion pump method and apparatus
DE1194093B (de) * 1960-03-24 1965-06-03 Varian Associates Mit Kathodenzerstaeubung arbeitende Ionen-Vakuumpumpe
DE1246932B (de) * 1960-12-01 1967-08-10 Thomson Houston Comp Francaise Ionengetterpumpe

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3147910A (en) * 1961-08-30 1964-09-08 Varian Associates Vacuum pump apparatus
US3224664A (en) * 1962-08-08 1965-12-21 Philips Corp Ion pump
US3368100A (en) * 1963-11-25 1968-02-06 Gen Electric Vacuum pump having a radially segmented, annular anode
US4687417A (en) * 1985-12-19 1987-08-18 Hughes Aircraft Company High voltage feedthrough for ion pump
DE102009040356A1 (de) * 2009-09-05 2011-03-17 Schmidt, Linda Elktrodenanordnung für eine Ionengetterpumpe
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US10550829B2 (en) * 2016-09-08 2020-02-04 Edwards Vacuum Llc Ion trajectory manipulation architecture in an ion pump
US20180306175A1 (en) * 2017-04-25 2018-10-25 Edwards Vacuum Llc Magnetic focusing in an ion pump using internal ferrous materials
CN108194314B (zh) * 2017-12-31 2024-02-20 中国电子科技集团公司第十二研究所 气体捕集型真空泵及其制作方法和使用方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2413653A (en) * 1943-11-15 1946-12-31 Gen Motors Corp Refrigerant compressor valve arrangement
US2755014A (en) * 1953-04-24 1956-07-17 Gen Electric Ionic vacuum pump device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3107844A (en) * 1959-11-12 1963-10-22 Ultek Corp Single cell vacuum apparatus
DE1194093B (de) * 1960-03-24 1965-06-03 Varian Associates Mit Kathodenzerstaeubung arbeitende Ionen-Vakuumpumpe
DE1246932B (de) * 1960-12-01 1967-08-10 Thomson Houston Comp Francaise Ionengetterpumpe
US3149774A (en) * 1961-01-27 1964-09-22 Varian Associates Getter ion pump method and apparatus
US3107045A (en) * 1961-02-02 1963-10-15 Varian Associates Getter ion pump apparatus

Also Published As

Publication number Publication date
GB883189A (en) 1961-11-22
NL131436C (de)
US3088657A (en) 1963-05-07
CH398868A (de) 1966-03-15
DE1181364B (de) 1964-11-12
DE1098667B (de) 1961-02-02
GB942546A (en) 1963-11-27
NL229703A (de)
NL6504257A (de) 1965-06-25
GB883190A (en) 1961-11-22
CH379045A (de) 1964-06-30

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