FR77276E - Pompe à vide électrique et méthode de pompage - Google Patents

Pompe à vide électrique et méthode de pompage

Info

Publication number
FR77276E
FR77276E FR820130A FR820130A FR77276E FR 77276 E FR77276 E FR 77276E FR 820130 A FR820130 A FR 820130A FR 820130 A FR820130 A FR 820130A FR 77276 E FR77276 E FR 77276E
Authority
FR
France
Prior art keywords
vacuum pump
electric vacuum
pumping method
pumping
electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR820130A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US673816A external-priority patent/US2993638A/en
Priority claimed from US801186A external-priority patent/US3088657A/en
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Priority to FR820130A priority Critical patent/FR77276E/fr
Application granted granted Critical
Publication of FR77276E publication Critical patent/FR77276E/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
FR820130A 1957-07-24 1960-03-02 Pompe à vide électrique et méthode de pompage Expired FR77276E (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR820130A FR77276E (fr) 1957-07-24 1960-03-02 Pompe à vide électrique et méthode de pompage

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US673816A US2993638A (en) 1957-07-24 1957-07-24 Electrical vacuum pump apparatus and method
US801186A US3088657A (en) 1957-07-24 1959-03-23 Glow discharge vacuum pump apparatus
FR820130A FR77276E (fr) 1957-07-24 1960-03-02 Pompe à vide électrique et méthode de pompage

Publications (1)

Publication Number Publication Date
FR77276E true FR77276E (fr) 1962-02-09

Family

ID=31721013

Family Applications (1)

Application Number Title Priority Date Filing Date
FR820130A Expired FR77276E (fr) 1957-07-24 1960-03-02 Pompe à vide électrique et méthode de pompage

Country Status (1)

Country Link
FR (1) FR77276E (fr)

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