FI872050A0 - Kapacitiv tryckgivarkonstruktion. - Google Patents

Kapacitiv tryckgivarkonstruktion.

Info

Publication number
FI872050A0
FI872050A0 FI872050A FI872050A FI872050A0 FI 872050 A0 FI872050 A0 FI 872050A0 FI 872050 A FI872050 A FI 872050A FI 872050 A FI872050 A FI 872050A FI 872050 A0 FI872050 A0 FI 872050A0
Authority
FI
Finland
Prior art keywords
tryckgivarkonstruktion
capacitive
capacitive tryckgivarkonstruktion
Prior art date
Application number
FI872050A
Other languages
English (en)
Other versions
FI84401B (fi
FI84401C (fi
FI872050A (fi
Inventor
Heikki Kuisma
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of FI872050A0 publication Critical patent/FI872050A0/fi
Priority to FI872050A priority Critical patent/FI84401C/fi
Priority to GB8809220A priority patent/GB2204413B/en
Priority to DE3814110A priority patent/DE3814110A1/de
Priority to US07/190,112 priority patent/US4862317A/en
Priority to JP63110330A priority patent/JPS63308529A/ja
Priority to FR8806140A priority patent/FR2614988B1/fr
Publication of FI872050A publication Critical patent/FI872050A/fi
Priority to FI912389A priority patent/FI912389A0/fi
Publication of FI84401B publication Critical patent/FI84401B/fi
Application granted granted Critical
Publication of FI84401C publication Critical patent/FI84401C/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
FI872050A 1987-05-08 1987-05-08 Kapacitiv tryckgivarkonstruktion. FI84401C (fi)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FI872050A FI84401C (fi) 1987-05-08 1987-05-08 Kapacitiv tryckgivarkonstruktion.
GB8809220A GB2204413B (en) 1987-05-08 1988-04-19 Capacitive pressure tranducer
DE3814110A DE3814110A1 (de) 1987-05-08 1988-04-26 Kapazitiver druckgeber
US07/190,112 US4862317A (en) 1987-05-08 1988-05-04 Capacitive pressure transducer
JP63110330A JPS63308529A (ja) 1987-05-08 1988-05-06 容量性圧力変換器
FR8806140A FR2614988B1 (fr) 1987-05-08 1988-05-06 Capteur capacitif de pression
FI912389A FI912389A0 (fi) 1987-05-08 1991-05-16 Kondensatorkonstruktion foer anvaendning vid tryckgivare.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI872050A FI84401C (fi) 1987-05-08 1987-05-08 Kapacitiv tryckgivarkonstruktion.
FI872050 1987-05-08

Publications (4)

Publication Number Publication Date
FI872050A0 true FI872050A0 (fi) 1987-05-08
FI872050A FI872050A (fi) 1988-11-09
FI84401B FI84401B (fi) 1991-08-15
FI84401C FI84401C (fi) 1991-11-25

Family

ID=8524450

Family Applications (1)

Application Number Title Priority Date Filing Date
FI872050A FI84401C (fi) 1987-05-08 1987-05-08 Kapacitiv tryckgivarkonstruktion.

Country Status (6)

Country Link
US (1) US4862317A (fi)
JP (1) JPS63308529A (fi)
DE (1) DE3814110A1 (fi)
FI (1) FI84401C (fi)
FR (1) FR2614988B1 (fi)
GB (1) GB2204413B (fi)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8718637D0 (en) * 1987-08-06 1987-09-09 Spectrol Reliance Ltd Sealing electrical feedthrough
JP2813721B2 (ja) * 1990-02-16 1998-10-22 豊田工機株式会社 容量型圧力センサ
JPH03239939A (ja) * 1990-02-16 1991-10-25 Toyoda Mach Works Ltd 容量型圧力センサ
DE4028402A1 (de) * 1990-09-07 1992-03-12 Bosch Gmbh Robert Drucksensor
DE4111119A1 (de) * 1991-04-03 1992-10-08 Univ Chemnitz Tech Stapelbare mikromechanische kapazitive druckmesszelle
US5224383A (en) * 1991-06-14 1993-07-06 Industrial Sensors, Inc. Melt pressure measurement and the like
US5178015A (en) * 1991-07-22 1993-01-12 Monolithic Sensors Inc. Silicon-on-silicon differential input sensors
DE4211816C2 (de) * 1992-04-08 1995-08-31 Danfoss As Drucksensor
US5479827A (en) * 1994-10-07 1996-01-02 Yamatake-Honeywell Co., Ltd. Capacitive pressure sensor isolating electrodes from external environment
SE9704840D0 (sv) * 1997-12-22 1997-12-22 Cecap Ab Tryckgivare för detektering av små tryckdifferenser och låga tryck
US6883378B2 (en) * 2003-03-28 2005-04-26 Honeywell International, Inc. Low TCE fill fluid for barrier diaphragm pressure sensors
US7373831B2 (en) * 2004-06-25 2008-05-20 Rosemount Inc. High temperature pressure transmitter assembly
EP2201346B1 (en) * 2007-09-28 2013-08-21 Meggitt (San Juan Capistrano), Inc. Silicon sensing structure to detect through-plane motion a plane of material with thermal expansion substantially different from that of silicon
US7497123B1 (en) 2007-12-18 2009-03-03 Rosemount Inc. Direct mount for pressure transmitter with thermal management
EP2113760A1 (en) * 2008-04-30 2009-11-04 Delphi Technologies, Inc. Capacitive pressure sensor
JP5589459B2 (ja) 2010-03-15 2014-09-17 セイコーエプソン株式会社 光フィルター及び光フィルターモジュール並びに分析機器及び光機器
JP5834418B2 (ja) * 2011-02-04 2015-12-24 セイコーエプソン株式会社 光フィルター、光フィルターモジュール、分析機器及び光機器
DE102011081887A1 (de) * 2011-08-31 2013-02-28 Robert Bosch Gmbh Polymerschichtsystem-Drucksensorvorrichtung und Polymerschichtsystem-Drucksensorverfahren

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2808545A (en) * 1955-01-24 1957-10-01 Walter J Hirtreiter Pressure pick-up-differential-type acceleration-free
GB1138401A (en) * 1965-05-06 1969-01-01 Mallory & Co Inc P R Bonding
JPS5921495B2 (ja) * 1977-12-15 1984-05-21 株式会社豊田中央研究所 細管型圧力計
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
EP0009313A1 (en) * 1978-09-25 1980-04-02 Motorola, Inc. Improved pressure transducer and assembly
US4301492A (en) * 1980-01-28 1981-11-17 Paquin Maurice J Pressure-sensing transducer
US4422335A (en) * 1981-03-25 1983-12-27 The Bendix Corporation Pressure transducer
JPS5887880A (ja) * 1981-11-20 1983-05-25 Hitachi Ltd 半導体ダイアフラム形センサ
JPS58198739A (ja) * 1982-05-14 1983-11-18 Matsushita Electric Ind Co Ltd 静電容量型圧力センサ
US4425799A (en) * 1982-06-03 1984-01-17 Kavlico Corporation Liquid capacitance pressure transducer technique
EP0114239A3 (de) * 1982-11-25 1985-05-15 Schoppe & Faeser GmbH Messkapsel für einen kapazitiven Differenzdruck-Messumformer
FI74350C (fi) * 1984-02-21 1988-01-11 Vaisala Oy Kapacitiv absoluttryckgivare.
FI71015C (fi) * 1984-02-21 1986-10-27 Vaisala Oy Temperaturoberoende kapacitiv tryckgivare
US4572204A (en) * 1984-03-21 1986-02-25 Hewlett-Packard Company Pressure dome with compliant chamber
US4542435A (en) * 1984-03-29 1985-09-17 General Signal Corporation Pressure transducer and mounting
FI842307A (fi) * 1984-06-07 1985-12-08 Vaisala Oy Foerfarande foer aostadkommande av genomfoering i en mikromekanisk konstruktion.
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4599906A (en) * 1984-10-31 1986-07-15 General Signal Corporation Remote probe differential pressure transducer
JPS61110023A (ja) * 1984-11-02 1986-05-28 Citizen Watch Co Ltd 圧力電気変換器の構造
JPS61155831A (ja) * 1984-12-28 1986-07-15 Yokogawa Electric Corp 半導体容量形圧力センサ
EP0189492B1 (de) * 1985-01-28 1988-06-22 Kristal Instrumente AG Messwandlereinsatz, Verfahren zu seiner Herstellung und Verwendung für einen Aufnehmer zur Messung mechanischer Grössen
JPS63149531A (ja) * 1986-12-12 1988-06-22 Fuji Electric Co Ltd 静電容量式圧力センサ

Also Published As

Publication number Publication date
GB2204413A (en) 1988-11-09
FI84401B (fi) 1991-08-15
GB2204413B (en) 1991-08-21
DE3814110A1 (de) 1988-11-24
GB8809220D0 (en) 1988-05-25
US4862317A (en) 1989-08-29
JPS63308529A (ja) 1988-12-15
FI84401C (fi) 1991-11-25
FR2614988A1 (fr) 1988-11-10
FI872050A (fi) 1988-11-09
FR2614988B1 (fr) 1990-10-19

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Legal Events

Date Code Title Description
FG Patent granted

Owner name: VAISALA OY

MA Patent expired