SE9704840D0 - Tryckgivare för detektering av små tryckdifferenser och låga tryck - Google Patents

Tryckgivare för detektering av små tryckdifferenser och låga tryck

Info

Publication number
SE9704840D0
SE9704840D0 SE9704840A SE9704840A SE9704840D0 SE 9704840 D0 SE9704840 D0 SE 9704840D0 SE 9704840 A SE9704840 A SE 9704840A SE 9704840 A SE9704840 A SE 9704840A SE 9704840 D0 SE9704840 D0 SE 9704840D0
Authority
SE
Sweden
Prior art keywords
diaphragm
base plate
thickness
plate
capacitor
Prior art date
Application number
SE9704840A
Other languages
English (en)
Inventor
Staffan Jonsson
Original Assignee
Cecap Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cecap Ab filed Critical Cecap Ab
Priority to SE9704840A priority Critical patent/SE9704840D0/sv
Publication of SE9704840D0 publication Critical patent/SE9704840D0/sv
Priority to PCT/SE1998/002441 priority patent/WO1999032866A2/en
Priority to EP98964670A priority patent/EP1060374B1/en
Priority to AU19942/99A priority patent/AU1994299A/en
Priority to AT98964670T priority patent/ATE513194T1/de
Priority to US10/642,106 priority patent/US20040099061A1/en
Priority to US11/011,615 priority patent/US7284439B2/en
Priority to US11/134,001 priority patent/US7389697B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
SE9704840A 1997-12-22 1997-12-22 Tryckgivare för detektering av små tryckdifferenser och låga tryck SE9704840D0 (sv)

Priority Applications (8)

Application Number Priority Date Filing Date Title
SE9704840A SE9704840D0 (sv) 1997-12-22 1997-12-22 Tryckgivare för detektering av små tryckdifferenser och låga tryck
PCT/SE1998/002441 WO1999032866A2 (en) 1997-12-22 1998-12-22 A pressure sensor and a method of manufacturing a pressure sensor
EP98964670A EP1060374B1 (en) 1997-12-22 1998-12-22 A pressure sensor for detecting small pressure differences and low pressures
AU19942/99A AU1994299A (en) 1997-12-22 1998-12-22 A pressure sensor for detecting small pressure differences and low pressures
AT98964670T ATE513194T1 (de) 1997-12-22 1998-12-22 Drucksensor zur erfassung von kleinen druckdifferenzen und niedrigen druckwerten
US10/642,106 US20040099061A1 (en) 1997-12-22 2003-08-15 Pressure sensor for detecting small pressure differences and low pressures
US11/011,615 US7284439B2 (en) 1997-12-22 2004-12-15 Method for producing a pressure sensor for detecting small pressure differences and low pressures
US11/134,001 US7389697B2 (en) 1997-12-22 2005-05-20 Pressure sensor for detecting small pressure differences and low pressures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9704840A SE9704840D0 (sv) 1997-12-22 1997-12-22 Tryckgivare för detektering av små tryckdifferenser och låga tryck

Publications (1)

Publication Number Publication Date
SE9704840D0 true SE9704840D0 (sv) 1997-12-22

Family

ID=20409543

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9704840A SE9704840D0 (sv) 1997-12-22 1997-12-22 Tryckgivare för detektering av små tryckdifferenser och låga tryck

Country Status (5)

Country Link
EP (1) EP1060374B1 (sv)
AT (1) ATE513194T1 (sv)
AU (1) AU1994299A (sv)
SE (1) SE9704840D0 (sv)
WO (1) WO1999032866A2 (sv)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
DE50016091D1 (de) 2000-02-22 2011-05-19 Endress & Hauser Gmbh & Co Kg Drucksensor
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
CN101479586B (zh) * 2006-04-25 2012-06-20 罗斯蒙德公司 使用近最终形状的烧结陶瓷的压力传感器
CN114720048B (zh) * 2022-06-09 2022-09-02 季华实验室 一种电容薄膜真空计及neg薄膜制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4425799A (en) * 1982-06-03 1984-01-17 Kavlico Corporation Liquid capacitance pressure transducer technique
US4587851A (en) * 1985-02-26 1986-05-13 Edward Mortberg High vacuum capacitance manometer having Px side open housing
JPS63149531A (ja) * 1986-12-12 1988-06-22 Fuji Electric Co Ltd 静電容量式圧力センサ
FI84401C (sv) * 1987-05-08 1991-11-25 Vaisala Oy Kapacitiv tryckgivarkonstruktion
DE4129414A1 (de) * 1990-11-13 1993-03-11 Endress Hauser Gmbh Co Verwendung eines speziellen tiegels beim melt-spinning einer aktivlot-legierung
US5499158A (en) * 1994-11-14 1996-03-12 Texas Instruments Incorporated Pressure transducer apparatus with monolithic body of ceramic material
US5485345A (en) * 1994-11-14 1996-01-16 Texas Instruments Incorporated Pressure transducer apparatus

Also Published As

Publication number Publication date
WO1999032866A2 (en) 1999-07-01
EP1060374A2 (en) 2000-12-20
ATE513194T1 (de) 2011-07-15
WO1999032866A3 (en) 1999-08-26
AU1994299A (en) 1999-07-12
EP1060374B1 (en) 2011-06-15

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