FI111993B - Kapasitiivinen absoluuttisen paineen mittausilmaisin ja menetelmä useiden tällaisten ilmaisimien valmistamiseksi - Google Patents

Kapasitiivinen absoluuttisen paineen mittausilmaisin ja menetelmä useiden tällaisten ilmaisimien valmistamiseksi Download PDF

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Publication number
FI111993B
FI111993B FI940589A FI940589A FI111993B FI 111993 B FI111993 B FI 111993B FI 940589 A FI940589 A FI 940589A FI 940589 A FI940589 A FI 940589A FI 111993 B FI111993 B FI 111993B
Authority
FI
Finland
Prior art keywords
substrate
etching
layer
forming
electrode
Prior art date
Application number
FI940589A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI940589A0 (fi
FI940589A (fi
Inventor
Philippe Renaud
Original Assignee
Colibrys S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Colibrys S A filed Critical Colibrys S A
Publication of FI940589A0 publication Critical patent/FI940589A0/fi
Publication of FI940589A publication Critical patent/FI940589A/fi
Application granted granted Critical
Publication of FI111993B publication Critical patent/FI111993B/fi

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
FI940589A 1993-02-12 1994-02-09 Kapasitiivinen absoluuttisen paineen mittausilmaisin ja menetelmä useiden tällaisten ilmaisimien valmistamiseksi FI111993B (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9301700 1993-02-12
FR9301700A FR2701564B1 (fr) 1993-02-12 1993-02-12 Capteur de mesure de pression absolue de type capacitif et procédé de fabrication d'une pluralité de tels capteurs.

Publications (3)

Publication Number Publication Date
FI940589A0 FI940589A0 (fi) 1994-02-09
FI940589A FI940589A (fi) 1994-08-13
FI111993B true FI111993B (fi) 2003-10-15

Family

ID=9444083

Family Applications (1)

Application Number Title Priority Date Filing Date
FI940589A FI111993B (fi) 1993-02-12 1994-02-09 Kapasitiivinen absoluuttisen paineen mittausilmaisin ja menetelmä useiden tällaisten ilmaisimien valmistamiseksi

Country Status (8)

Country Link
US (1) US5488869A (de)
EP (1) EP0610806B1 (de)
JP (1) JPH06249733A (de)
DE (1) DE69418740T2 (de)
DK (1) DK0610806T3 (de)
FI (1) FI111993B (de)
FR (1) FR2701564B1 (de)
NO (1) NO311110B1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5581226A (en) * 1994-11-02 1996-12-03 Motorola, Inc. High pressure sensor structure and method
WO1997021986A1 (de) * 1995-12-08 1997-06-19 Micronas Semiconductor S.A. Mikrosensoren mit siliziummembranen und verfahren zur herstellung derselben
DE19653427A1 (de) * 1996-12-20 1998-07-02 Siemens Ag Kraftsensor
US5916179A (en) * 1997-04-18 1999-06-29 Sharrock; Nigel System and method for reducing iatrogenic damage to nerves
DE19847563A1 (de) * 1998-04-17 1999-10-28 Micronas Intermetall Gmbh Kapazitiver Sensor
US6452427B1 (en) 1998-07-07 2002-09-17 Wen H. Ko Dual output capacitance interface circuit
US6518084B1 (en) * 1998-12-15 2003-02-11 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Method of producing a micromechanical structure for a micro-electromechanical element
EP1144977B1 (de) 1998-12-15 2003-10-15 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Verfahren zum erzeugen eines mikro-elektromechanischen elements
US6431003B1 (en) 2000-03-22 2002-08-13 Rosemount Aerospace Inc. Capacitive differential pressure sensor with coupled diaphragms
DE10036433A1 (de) * 2000-07-26 2002-02-07 Endress Hauser Gmbh Co Kapazitiver Drucksensor
EP1305585B1 (de) 2000-07-26 2009-05-13 Endress + Hauser GmbH + Co. KG Kapazitiver drucksensor
US8109149B2 (en) * 2004-11-17 2012-02-07 Lawrence Livermore National Security, Llc Contact stress sensor
JP4965827B2 (ja) * 2005-07-13 2012-07-04 アルプス電気株式会社 静電容量型圧力センサ素子及びその製造方法
US8397578B2 (en) 2010-06-03 2013-03-19 Medtronic, Inc. Capacitive pressure sensor assembly
US9737657B2 (en) 2010-06-03 2017-08-22 Medtronic, Inc. Implantable medical pump with pressure sensor
US9837935B2 (en) * 2013-10-29 2017-12-05 Honeywell International Inc. All-silicon electrode capacitive transducer on a glass substrate

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4405970A (en) * 1981-10-13 1983-09-20 United Technologies Corporation Silicon-glass-silicon capacitive pressure transducer
US4530029A (en) * 1984-03-12 1985-07-16 United Technologies Corporation Capacitive pressure sensor with low parasitic capacitance
US4586109A (en) * 1985-04-01 1986-04-29 Bourns Instruments, Inc. Batch-process silicon capacitive pressure sensor
US4872945A (en) * 1986-06-25 1989-10-10 Motorola Inc. Post seal etching of transducer diaphragm
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
US5207103A (en) * 1987-06-01 1993-05-04 Wise Kensall D Ultraminiature single-crystal sensor with movable member
US4815472A (en) * 1987-06-01 1989-03-28 The Regents Of The University Of Michigan Multipoint pressure-sensing catheter system
US5113868A (en) * 1987-06-01 1992-05-19 The Regents Of The University Of Michigan Ultraminiature pressure sensor with addressable read-out circuit
GB8718637D0 (en) * 1987-08-06 1987-09-09 Spectrol Reliance Ltd Sealing electrical feedthrough
GB8718639D0 (en) * 1987-08-06 1987-09-09 Spectrol Reliance Ltd Capacitive pressure sensors
JPH03170826A (ja) * 1989-11-29 1991-07-24 Toshiba Corp 容量型圧力センサ
DE9105851U1 (de) * 1991-01-14 1991-07-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Drucksensor
DE9102748U1 (de) * 1991-01-14 1991-07-04 Plöchinger, Heinz, Dipl.-Ing., 82319 Starnberg Drucksensor für niedere Drücke

Also Published As

Publication number Publication date
NO311110B1 (no) 2001-10-08
DK0610806T3 (da) 1999-12-06
FR2701564A1 (fr) 1994-08-19
FI940589A0 (fi) 1994-02-09
EP0610806A1 (de) 1994-08-17
FR2701564B1 (fr) 1995-05-19
DE69418740D1 (de) 1999-07-08
DE69418740T2 (de) 1999-12-23
JPH06249733A (ja) 1994-09-09
FI940589A (fi) 1994-08-13
EP0610806B1 (de) 1999-06-02
US5488869A (en) 1996-02-06
NO940472L (no) 1994-08-15
NO940472D0 (no) 1994-02-11

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