ES8203549A1 - Procedimiento para la fabricacion de articulos mediante li- tografia - Google Patents
Procedimiento para la fabricacion de articulos mediante li- tografiaInfo
- Publication number
- ES8203549A1 ES8203549A1 ES502672A ES502672A ES8203549A1 ES 8203549 A1 ES8203549 A1 ES 8203549A1 ES 502672 A ES502672 A ES 502672A ES 502672 A ES502672 A ES 502672A ES 8203549 A1 ES8203549 A1 ES 8203549A1
- Authority
- ES
- Spain
- Prior art keywords
- silver
- lithographic process
- resulting article
- acuity
- photomigration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0042—Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
- G03F7/0044—Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists involving an interaction between the metallic and non-metallic component, e.g. photodope systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Glass Compositions (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PROCEDIMIENTO PARA LA FABRICACION DE ARTICULOS MEDIANTE LITOGRAFIA. CONSTA DE UNA OPERACION DE LITOGRAFIA DURANTE LA CUAL EL ARTICULOS COMPRENDE, AL MENOS TEMPORALMENTE, UNA CAPA VITREA Y UN MATERIAL DE METAL FUENTE DE CONTACTO CON LA CAPA VITREA, EN EL CUAL SE IRRADIAN REGIONES DEL ARTICULO PRODUCIENDOSE REGIONES DEMARCADAS POR ZONAS INTERFACIALES DE LUZ/OSCURIDAD PARA PRODUCIR MIGRACION DEL METAL A LA CAPA VITREA, PRINCIPALMENTE DENTREO DE LAS REGIONES IRRADIADAS, DEFINIENDOSE UN MODELO DE MATERIAL VITREO CON UNA FACILIDAD DIFERENTE DE CAPACIDAD DE REMOCION.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15602980A | 1980-06-03 | 1980-06-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
ES8203549A1 true ES8203549A1 (es) | 1982-04-01 |
ES502672A0 ES502672A0 (es) | 1982-04-01 |
Family
ID=22557781
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES502672A Granted ES502672A0 (es) | 1980-06-03 | 1981-06-01 | Procedimiento para la fabricacion de articulos mediante li- tografia |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP0042109B1 (es) |
JP (1) | JPS5723225A (es) |
KR (1) | KR840001590B1 (es) |
CA (1) | CA1166879A (es) |
DE (1) | DE3172493D1 (es) |
ES (1) | ES502672A0 (es) |
GB (1) | GB2078386B (es) |
IE (1) | IE51206B1 (es) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58155722A (ja) * | 1982-03-11 | 1983-09-16 | Nippon Telegr & Teleph Corp <Ntt> | 無機薄膜の製造方法 |
JP6708594B2 (ja) | 2017-09-15 | 2020-06-10 | 日立建機株式会社 | 転圧機械 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4856423A (es) * | 1971-11-16 | 1973-08-08 | ||
JPS5133726A (ja) * | 1974-09-17 | 1976-03-23 | Hitachi Ltd | Renzokuchuzoki |
JPS5565365A (en) * | 1978-11-07 | 1980-05-16 | Nippon Telegr & Teleph Corp <Ntt> | Pattern forming method |
US4276368A (en) * | 1979-05-04 | 1981-06-30 | Bell Telephone Laboratories, Incorporated | Photoinduced migration of silver into chalcogenide layer |
-
1981
- 1981-05-14 CA CA000377556A patent/CA1166879A/en not_active Expired
- 1981-06-01 ES ES502672A patent/ES502672A0/es active Granted
- 1981-06-02 GB GB8116861A patent/GB2078386B/en not_active Expired
- 1981-06-02 IE IE1210/81A patent/IE51206B1/en not_active IP Right Cessation
- 1981-06-03 KR KR1019810001989A patent/KR840001590B1/ko active
- 1981-06-03 DE DE8181104277T patent/DE3172493D1/de not_active Expired
- 1981-06-03 JP JP8451781A patent/JPS5723225A/ja active Pending
- 1981-06-03 EP EP81104277A patent/EP0042109B1/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
KR840001590B1 (ko) | 1984-10-11 |
GB2078386A (en) | 1982-01-06 |
IE51206B1 (en) | 1986-10-29 |
EP0042109A3 (en) | 1982-06-30 |
KR830006021A (ko) | 1983-09-17 |
JPS5723225A (en) | 1982-02-06 |
CA1166879A (en) | 1984-05-08 |
EP0042109B1 (en) | 1985-10-02 |
GB2078386B (en) | 1984-04-18 |
ES502672A0 (es) | 1982-04-01 |
DE3172493D1 (en) | 1985-11-07 |
EP0042109A2 (en) | 1981-12-23 |
IE811210L (en) | 1981-12-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FD1A | Patent lapsed |
Effective date: 20010203 |