ES2969954T3 - Método y sistema para medir un espesor de recubrimiento - Google Patents

Método y sistema para medir un espesor de recubrimiento Download PDF

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Publication number
ES2969954T3
ES2969954T3 ES18704288T ES18704288T ES2969954T3 ES 2969954 T3 ES2969954 T3 ES 2969954T3 ES 18704288 T ES18704288 T ES 18704288T ES 18704288 T ES18704288 T ES 18704288T ES 2969954 T3 ES2969954 T3 ES 2969954T3
Authority
ES
Spain
Prior art keywords
layers
thz
thicknesses
optical parameters
sample response
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES18704288T
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English (en)
Inventor
Ian Stephen Gregory
Robert May
Daniel James Farrell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TeraView Ltd
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TeraView Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TeraView Ltd filed Critical TeraView Ltd
Application granted granted Critical
Publication of ES2969954T3 publication Critical patent/ES2969954T3/es
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/26—Oils; Viscous liquids; Paints; Inks
    • G01N33/32—Paints; Inks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

Un método para determinar el espesor de una pluralidad de capas de recubrimiento, comprendiendo el método: realizar un análisis de calibración en datos de calibración para determinar valores iniciales y límites de búsqueda de parámetros ópticos de dicha pluralidad de capas de recubrimiento, irradiar dicha pluralidad de capas con un pulso de radiación de THz, comprendiendo dicho pulso una pluralidad de frecuencias en el rango de 0,01 THz a 10 THz; detectar la radiación reflejada para producir una respuesta de muestra, derivando dicha respuesta de muestra de la radiación reflejada; producir una forma de onda sintetizada utilizando los parámetros ópticos y espesores iniciales predeterminados de dichas capas; y variar dichos espesores y variar dichos parámetros ópticos dentro de dichos límites de búsqueda para minimizar el error medido entre la respuesta de la muestra y la forma de onda sintetizada; y generar los espesores de las capas. (Traducción automática con Google Translate, sin valor legal)
ES18704288T 2017-01-27 2018-01-26 Método y sistema para medir un espesor de recubrimiento Active ES2969954T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1701405.1A GB2559164B (en) 2017-01-27 2017-01-27 Method and system for measuring coating thicknesses
PCT/GB2018/050242 WO2018138523A1 (en) 2017-01-27 2018-01-26 Method and system for measuring coating thickness

Publications (1)

Publication Number Publication Date
ES2969954T3 true ES2969954T3 (es) 2024-05-23

Family

ID=58462889

Family Applications (1)

Application Number Title Priority Date Filing Date
ES18704288T Active ES2969954T3 (es) 2017-01-27 2018-01-26 Método y sistema para medir un espesor de recubrimiento

Country Status (5)

Country Link
US (3) US11085755B2 (es)
EP (2) EP4325205A2 (es)
ES (1) ES2969954T3 (es)
GB (1) GB2559164B (es)
WO (1) WO2018138523A1 (es)

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US11085874B2 (en) * 2015-06-19 2021-08-10 Vrije Universiteit Brussel Characterization of multilayer structures
JP6692914B2 (ja) * 2016-10-07 2020-05-13 パイオニア株式会社 検査装置、検査方法、コンピュータプログラム及び記録媒体
JP6754446B2 (ja) * 2016-12-06 2020-09-09 パイオニア株式会社 検査装置、検査方法、コンピュータプログラム及び記録媒体
GB2559164B (en) * 2017-01-27 2021-11-10 Teraview Ltd Method and system for measuring coating thicknesses
EP3966650B1 (de) 2019-05-09 2024-03-06 Dürr Systems AG Verfahren zur kontrolle und nachbehandlung von werkstücken, kontrollanlage und behandlungsanlage
CN113874895A (zh) * 2019-05-09 2021-12-31 杜尔系统股份公司 分析方法及用于该分析方法的装置
EP3742191A1 (en) * 2019-05-24 2020-11-25 Helmut Fischer GmbH Terahertz measuring device and method of operating a terahertz measuring device
US11709139B2 (en) * 2020-07-24 2023-07-25 New Jersey Institute Of Technology Systems and methods of detecting pipe defects
US11104849B1 (en) * 2020-08-19 2021-08-31 Richard Fauconier Method for restricting laser beams entering an aperture to a chosen dyad and measuring the beams' separation
US11549847B2 (en) * 2020-08-19 2023-01-10 Richard Fauconier Method for restricting laser beams entering an aperture to a chosen dyad and measuring their separation
DE102020127387A1 (de) * 2020-10-16 2022-04-21 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren und Vorrichtung zum Verarbeiten von mit einem eine Ausbreitung von Terahertz-Strahlung charakterisierenden Modell assoziierten Daten
DE102020133703B3 (de) 2020-12-16 2022-01-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Verfahren zur berührungslosen Bestimmung der Schichtdicke eines nassen Lacks
GB202114195D0 (en) 2021-10-04 2021-11-17 Teraview Ltd Curvature correction
CN115371603B (zh) * 2022-02-17 2024-04-16 交通运输部天津水运工程科学研究所 一种声学浮泥厚度测量仪的计量校准方法
GB2617330A (en) * 2022-03-31 2023-10-11 Teraview Ltd Method, system and sensor for analysing a sample, and process for manufacturing an electrode
WO2023193933A1 (en) * 2022-04-08 2023-10-12 Das-Nano Tech, S.L. Contactless determining a physical feature of a target item
CN114894105B (zh) * 2022-05-16 2023-07-28 西南科技大学 一种在大气环境下测量非金属材料厚度的方法及系统

Family Cites Families (19)

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US5099504A (en) * 1987-03-31 1992-03-24 Adaptive Technologies, Inc. Thickness/density mesuring apparatus
GB2372929B (en) * 2000-03-03 2003-03-12 Tera View Ltd Apparatus and method for investigating a sample
US6501825B2 (en) * 2001-01-19 2002-12-31 Keymaster Technologies, Inc. Methods for identification and verification
GB2405466B (en) 2003-08-27 2006-01-25 Teraview Ltd Method and apparatus for investigating a non-planner sample
WO2013061417A1 (ja) * 2011-10-26 2013-05-02 三菱電機株式会社 膜厚測定方法
CN104641253B (zh) * 2012-03-23 2017-10-24 派克米瑞斯有限责任公司 检测异常的系统和方法
CN104395983B (zh) * 2012-04-20 2017-10-10 布鲁克Axs手持设备公司 用于保护辐射窗口的设备
EP3069120A4 (en) * 2013-11-15 2017-07-26 Picometrix, LLC System for determining at least one property of a sheet dielectric sample using terahertz radiation
EP2899498B1 (en) 2014-01-28 2020-03-11 ABB Schweiz AG Sensor system and method for characterizing a coated body
EP2899499A1 (en) 2014-01-28 2015-07-29 ABB Technology AG Sensor system for characterizing a coating such as a paint film by THz radiation
EP2899497B1 (en) 2014-01-28 2019-03-13 ABB Schweiz AG Sensor system and method for characterizing a wet paint layer
JP2015161650A (ja) * 2014-02-28 2015-09-07 大塚電子株式会社 測定装置および測定方法
EP3265747B1 (en) * 2015-03-03 2019-06-19 ABB Schweiz AG Sensor system and method for characterizing a stack of wet paint layers
DE102015107616A1 (de) * 2015-05-13 2016-11-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Bestimmen der Schichtdicken einer mehrschichtigen Probe
WO2017173533A1 (en) * 2016-04-04 2017-10-12 Tetechs Inc. Methods and systems for thickness measurement of multi-layer structures
US11060859B2 (en) * 2016-04-04 2021-07-13 Tetechs Inc. Methods and systems for thickness measurement of multi-layer structures
GB2559164B (en) * 2017-01-27 2021-11-10 Teraview Ltd Method and system for measuring coating thicknesses
US10444161B2 (en) * 2017-04-05 2019-10-15 Kla-Tencor Corporation Systems and methods for metrology with layer-specific illumination spectra
EP3695210B1 (en) * 2017-10-13 2023-01-04 ABB Schweiz AG Method and apparatus for detecting a pulsed thz beam with time of flight correction

Also Published As

Publication number Publication date
GB201701405D0 (en) 2017-03-15
US11885610B2 (en) 2024-01-30
US20210310796A1 (en) 2021-10-07
WO2018138523A1 (en) 2018-08-02
US20240167810A1 (en) 2024-05-23
EP3574283A1 (en) 2019-12-04
EP4325205A2 (en) 2024-02-21
GB2559164B (en) 2021-11-10
US11085755B2 (en) 2021-08-10
GB2559164A (en) 2018-08-01
US20190383599A1 (en) 2019-12-19
EP3574283B1 (en) 2023-12-27

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