EP2671044A1 - Verfahren und vorrichtung zur bestimmung optischer eigenschaften durch gleichzeitiges messen von intensitäten an dünnen schichten mit licht von mehreren wellenlängen - Google Patents

Verfahren und vorrichtung zur bestimmung optischer eigenschaften durch gleichzeitiges messen von intensitäten an dünnen schichten mit licht von mehreren wellenlängen

Info

Publication number
EP2671044A1
EP2671044A1 EP11706152.3A EP11706152A EP2671044A1 EP 2671044 A1 EP2671044 A1 EP 2671044A1 EP 11706152 A EP11706152 A EP 11706152A EP 2671044 A1 EP2671044 A1 EP 2671044A1
Authority
EP
European Patent Office
Prior art keywords
light
thin layer
optical properties
intensities
determining optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP11706152.3A
Other languages
English (en)
French (fr)
Inventor
Günther PROLL
Florian PRÖLL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Biocopy Holding AG
Original Assignee
Biametrics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Biametrics GmbH filed Critical Biametrics GmbH
Publication of EP2671044A1 publication Critical patent/EP2671044A1/de
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02024—Measuring in transmission, i.e. light traverses the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
EP11706152.3A 2011-01-31 2011-01-31 Verfahren und vorrichtung zur bestimmung optischer eigenschaften durch gleichzeitiges messen von intensitäten an dünnen schichten mit licht von mehreren wellenlängen Ceased EP2671044A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2011/000419 WO2012103897A1 (de) 2011-01-31 2011-01-31 Verfahren und vorrichtung zur bestimmung optischer eigenschaften durch gleichzeitiges messen von intensitäten an dünnen schichten mit licht von mehreren wellenlängen

Publications (1)

Publication Number Publication Date
EP2671044A1 true EP2671044A1 (de) 2013-12-11

Family

ID=44625266

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11706152.3A Ceased EP2671044A1 (de) 2011-01-31 2011-01-31 Verfahren und vorrichtung zur bestimmung optischer eigenschaften durch gleichzeitiges messen von intensitäten an dünnen schichten mit licht von mehreren wellenlängen

Country Status (4)

Country Link
US (1) US9733063B2 (de)
EP (1) EP2671044A1 (de)
JP (1) JP2014508921A (de)
WO (1) WO2012103897A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113534129A (zh) * 2021-06-29 2021-10-22 中国人民解放军93209部队 评估地基宽带雷达的高速目标探测性能的方法和系统

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10914037B2 (en) 2012-10-09 2021-02-09 Michael Gorden Yankee dryer profiler and control
EP2783747B1 (de) 2013-03-27 2018-05-02 Nano Temper Technologies GmbH Verfahren und Vorrichtung zur berührungslosen Durchmischung von Flüssigkeiten
KR102287272B1 (ko) * 2014-12-04 2021-08-06 삼성전자주식회사 검사장치 및 그 제어 방법
EP3139147B1 (de) * 2015-09-02 2020-11-25 Trioptics GmbH Vorrichtung und verfahren zur messung einer wellenlängenabhängigen optischen kenngrösse eines optischen systems
EP3299799A1 (de) * 2016-09-27 2018-03-28 Berthold Technologies GmbH & Co. KG Verfahren und messsystem zur messung molekularer interaktionen an einer dünnen schicht
JP6766995B2 (ja) * 2016-11-09 2020-10-14 株式会社ミツトヨ 位相シフト干渉計
KR102515833B1 (ko) * 2018-08-01 2023-03-29 삼성전자주식회사 대상체의 성분 분석 장치 및 방법과, 이미지 센서
CN114487046A (zh) * 2022-01-29 2022-05-13 中国科学技术大学 测定二维材料表面电荷密度分布的成像方法
CN115046921B (zh) * 2022-08-11 2022-12-02 四川至臻光电有限公司 一种表征塑料光学元件膜层附着力的测试方法及测试装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7615752B2 (en) * 2005-02-25 2009-11-10 Nanometrics Incorporated Apparatus and method for enhanced critical dimension scatterometry

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01132936A (ja) * 1987-11-18 1989-05-25 Kawasaki Steel Corp 被膜の分析方法及び装置
JPH01132935A (ja) * 1987-11-18 1989-05-25 Kawasaki Steel Corp 被膜の分析方法及び装置
US5220403A (en) * 1991-03-11 1993-06-15 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
JP3001357B2 (ja) * 1992-11-17 2000-01-24 アヴェンティス・リサーチ・ウント・テクノロジーズ・ゲーエムベーハー・ウント・コー・カーゲー 化学物質検知用光学センサ
EP0598341B1 (de) 1992-11-17 1998-09-23 Hoechst Aktiengesellschaft Optischer Sensor zur Detektion von chemischen Spezien
DE4410603C1 (de) * 1994-03-26 1995-06-14 Jenoptik Technologie Gmbh Verfahren zur Erkennung von Fehlern bei der Inspektion von strukturierten Oberflächen
JPH09189525A (ja) * 1996-01-09 1997-07-22 Olympus Optical Co Ltd 偏光解析装置
JPH09269296A (ja) * 1996-03-29 1997-10-14 Ishizuka Glass Co Ltd シートのコーティング欠陥検査装置
DE19615366B4 (de) 1996-04-19 2006-02-09 Carl Zeiss Jena Gmbh Verfahren und Einrichtung zum Nachweis physikalischer, chemischer, biologischer oder biochemischer Reaktionen und Wechselwirkungen
JPH1047926A (ja) * 1996-08-07 1998-02-20 Dainippon Screen Mfg Co Ltd 膜厚測定装置および膜厚測定方法
US6248988B1 (en) * 1998-05-05 2001-06-19 Kla-Tencor Corporation Conventional and confocal multi-spot scanning optical microscope
US6236459B1 (en) * 1998-11-05 2001-05-22 University Of Miami Thin film measuring device and method
US6049506A (en) * 1999-01-29 2000-04-11 Lucent Technology Inc. Optical fiber Sagnac interferometer which identifies harmonically related nulls in the detected spectrum
WO2000054071A1 (fr) * 1999-03-09 2000-09-14 Central Research Institute Of Electric Power Industry Procede et dispositif de mesure de radioactivite, de concentration radioactive et de concentration superficielle de radioactivite
US7324214B2 (en) * 2003-03-06 2008-01-29 Zygo Corporation Interferometer and method for measuring characteristics of optically unresolved surface features
DE102005026839A1 (de) 2005-06-10 2006-12-21 Universität Tübingen Verfahren und Vorrichtung zur quantitativen Bestimmung von Analyten in flüssigen Proben
US7391520B2 (en) * 2005-07-01 2008-06-24 Carl Zeiss Meditec, Inc. Fourier domain optical coherence tomography employing a swept multi-wavelength laser and a multi-channel receiver
JP2008139065A (ja) * 2006-11-30 2008-06-19 Nikon Corp 膜評価装置及び膜評価方法
US7522282B2 (en) 2006-11-30 2009-04-21 Purdue Research Foundation Molecular interferometric imaging process and apparatus
JP2009075044A (ja) * 2007-09-25 2009-04-09 Toppan Printing Co Ltd 有機ｅｌパネル基板の導電性ポリマー層の膜厚不良検査装置及びそれを用いた膜厚不良検査方法
US8989890B2 (en) * 2008-11-07 2015-03-24 Applied Materials, Inc. GST film thickness monitoring
DE102009019476A1 (de) 2009-05-04 2010-11-11 Biametrics Marken Und Rechte Gmbh Wiedererkennbarer Träger für optische Meßverfahren
DE102009019711A1 (de) 2009-05-05 2010-11-18 Biametrics Marken Und Rechte Gmbh Verfahren und Vorrichtung zur Bestimmung von Reflexionskoeffizienten an Filteranordnung mit dünnen Schichten
EP2619724A2 (de) * 2010-09-23 2013-07-31 Stryker Corporation Videoüberwachungssystem

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7615752B2 (en) * 2005-02-25 2009-11-10 Nanometrics Incorporated Apparatus and method for enhanced critical dimension scatterometry

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"Grauwert", WIKIPEDIA, 21 January 2011 (2011-01-21), XP055255020, Retrieved from the Internet <URL:https://de.wikipedia.org/w/index.php?title=Spezial:Buch&bookcmd=download&collection_id=5d975a3ca0363b8cf4c956afee6ff0960b55a906&writer=rdf2latex&return_to=Grauwert> [retrieved on 20160303] *
See also references of WO2012103897A1 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113534129A (zh) * 2021-06-29 2021-10-22 中国人民解放军93209部队 评估地基宽带雷达的高速目标探测性能的方法和系统

Also Published As

Publication number Publication date
WO2012103897A1 (de) 2012-08-09
US20130314712A1 (en) 2013-11-28
US9733063B2 (en) 2017-08-15
JP2014508921A (ja) 2014-04-10

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