ES2665144T3 - Sensor de presión completamente óptico - Google Patents
Sensor de presión completamente óptico Download PDFInfo
- Publication number
- ES2665144T3 ES2665144T3 ES14728557.1T ES14728557T ES2665144T3 ES 2665144 T3 ES2665144 T3 ES 2665144T3 ES 14728557 T ES14728557 T ES 14728557T ES 2665144 T3 ES2665144 T3 ES 2665144T3
- Authority
- ES
- Spain
- Prior art keywords
- waveguide
- core
- pressure sensor
- outer membrane
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
- G01L23/16—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by photoelectric means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
- H04R23/008—Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Measuring Fluid Pressure (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13170867 | 2013-06-06 | ||
| EP13170867 | 2013-06-06 | ||
| EP13196824 | 2013-12-12 | ||
| EP13196824 | 2013-12-12 | ||
| PCT/EP2014/061625 WO2014195372A1 (en) | 2013-06-06 | 2014-06-04 | All-optical pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2665144T3 true ES2665144T3 (es) | 2018-04-24 |
Family
ID=50896299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES14728557.1T Active ES2665144T3 (es) | 2013-06-06 | 2014-06-04 | Sensor de presión completamente óptico |
Country Status (7)
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107529985B (zh) * | 2015-03-31 | 2020-03-31 | 加州理工学院 | 用于长期可植入传感器和电子装置的生物相容性封装 |
| US10106398B2 (en) * | 2015-05-28 | 2018-10-23 | Infineon Technologies Ag | Micromechanical structure comprising carbon material and method for fabricating the same |
| CN105004414B (zh) * | 2015-07-20 | 2017-12-29 | 武汉理工光科股份有限公司 | 基于光纤光栅的声音传感器 |
| CN110520031B (zh) | 2017-05-12 | 2023-02-21 | 加州理工学院 | 可植入腔室外压力传感器 |
| DE102017119406A1 (de) * | 2017-08-24 | 2019-02-28 | Samson Aktiengesellschaft | Kommunikationsverfahren für ein Stellgerät |
| WO2019126967A1 (zh) * | 2017-12-25 | 2019-07-04 | 深圳市得道健康管理有限公司 | 表面应变检测装置及其表面应变传感器 |
| EP3557211A1 (en) | 2018-04-16 | 2019-10-23 | ams International AG | Photonic device, method for operating a photonic device and method for manufacturing a photonic device |
| CN108989919B (zh) * | 2018-07-13 | 2020-09-22 | 潍坊歌尔微电子有限公司 | 一种传感器 |
| EP3629598A1 (en) | 2018-09-26 | 2020-04-01 | ams AG | Integrated optical transducer and method for fabricating an integrated optical transducer |
| US11889264B2 (en) * | 2019-04-18 | 2024-01-30 | Orta Dogu Teknik Universitesi | Fiber optic MEMS microphone |
| US11131595B2 (en) * | 2019-07-26 | 2021-09-28 | Raytheon Technologies Corporation | Pressure sensing device and method for using the same |
| CN112449295A (zh) | 2019-08-30 | 2021-03-05 | 华为技术有限公司 | 麦克风芯片、麦克风及终端设备 |
| CN110531513B (zh) * | 2019-09-03 | 2022-02-15 | 山东大学 | 一种mems换能结构及其应用 |
| US11067749B2 (en) * | 2019-11-21 | 2021-07-20 | Globalfoundries U.S. Inc. | Waveguides with cladding layers of gradated refractive index |
| FR3105824B1 (fr) * | 2019-12-27 | 2022-02-18 | Commissariat Energie Atomique | Dispositif optique de détection d'une onde acoustique |
| CN111157149A (zh) * | 2020-01-03 | 2020-05-15 | 天津大学 | 一种基于微悬臂梁共振激发的光压力值测量装置及方法 |
| US11701504B2 (en) | 2020-01-17 | 2023-07-18 | California Institute Of Technology | Implantable intracranial pressure sensor |
| CN111263283A (zh) * | 2020-02-17 | 2020-06-09 | 瑞声声学科技(深圳)有限公司 | 光学麦克风 |
| CN111464927A (zh) * | 2020-04-07 | 2020-07-28 | 中国电子科技集团公司第三研究所 | 一种光纤传声器及其敏感结构及制备方法 |
| CN114136529B (zh) * | 2021-11-30 | 2022-11-25 | 山东大学 | 一种基于集成光学的可快速定制的压力传感器及定制方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4523474A (en) | 1983-08-12 | 1985-06-18 | Borg-Warner Corporation | Capacitive pressure sensor |
| FR2638471B1 (fr) * | 1988-11-02 | 1993-02-19 | Ingenierie Genie Civil Sarl | Dispositif de mesure de pression pour le betonnage de trous fores |
| DE19754910C2 (de) * | 1997-12-10 | 1999-12-02 | Geoforschungszentrum Potsdam | Wellenlängendetektion an Faser-Bragg-Gitter-Sensoren |
| AU756444B2 (en) * | 1998-12-04 | 2003-01-16 | Weatherford Technology Holdings, Llc | Bragg grating pressure sensor |
| US6581436B2 (en) * | 2001-05-16 | 2003-06-24 | Esec Trading Sa | Pressure sensor with means for re-calibration |
| JP4320593B2 (ja) * | 2002-03-21 | 2009-08-26 | トランセンス テクノロジーズ ピーエルシー | Ｓａｗデバイスと併用される圧力モニター |
| CN2783292Y (zh) * | 2004-12-14 | 2006-05-24 | 武汉理工大学 | 高精度光纤布喇格光栅微型压力传感器 |
| CN100465601C (zh) * | 2007-04-19 | 2009-03-04 | 山东科技大学 | 光纤光栅压力测量装置 |
| US9528893B2 (en) * | 2009-06-29 | 2016-12-27 | University Of Massachusetts | Optical fiber pressure sensor with uniform diaphragm and method of fabricating same |
| US8490495B2 (en) * | 2010-05-05 | 2013-07-23 | Consensic, Inc. | Capacitive pressure sensor with vertical electrical feedthroughs and method to make the same |
| CN102116692A (zh) * | 2011-01-30 | 2011-07-06 | 宁波杉工结构监测与控制工程中心有限公司 | 一种光纤布拉格光栅压力传感器及其相应的测量方法 |
| CA2875925A1 (en) | 2012-06-06 | 2013-12-12 | Kasper RECK | Mems optical sensor |
| GB2544923B (en) * | 2012-06-27 | 2017-09-20 | Oxsensis Ltd | Optical sensor |
| ITMI20130138A1 (it) * | 2013-01-31 | 2014-08-01 | Laser Point S R L | Sensore ottico per misure di pressione senza contatto. |
-
2014
- 2014-06-04 US US14/896,357 patent/US9658123B2/en active Active
- 2014-06-04 CN CN201480045404.0A patent/CN105452832B/zh active Active
- 2014-06-04 EP EP14728557.1A patent/EP3004829B1/en active Active
- 2014-06-04 WO PCT/EP2014/061625 patent/WO2014195372A1/en active Application Filing
- 2014-06-04 DK DK14728557.1T patent/DK3004829T3/en active
- 2014-06-04 NO NO14728557A patent/NO3004829T3/no unknown
- 2014-06-04 ES ES14728557.1T patent/ES2665144T3/es active Active
Also Published As
| Publication number | Publication date |
|---|---|
| DK3004829T3 (en) | 2018-04-30 |
| CN105452832A (zh) | 2016-03-30 |
| CN105452832B (zh) | 2018-11-30 |
| NO3004829T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2018-07-28 |
| US20160123829A1 (en) | 2016-05-05 |
| EP3004829B1 (en) | 2018-02-28 |
| EP3004829A1 (en) | 2016-04-13 |
| US9658123B2 (en) | 2017-05-23 |
| WO2014195372A1 (en) | 2014-12-11 |
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