NO3004829T3 - - Google Patents

Info

Publication number
NO3004829T3
NO3004829T3 NO14728557A NO14728557A NO3004829T3 NO 3004829 T3 NO3004829 T3 NO 3004829T3 NO 14728557 A NO14728557 A NO 14728557A NO 14728557 A NO14728557 A NO 14728557A NO 3004829 T3 NO3004829 T3 NO 3004829T3
Authority
NO
Norway
Application number
NO14728557A
Other languages
Norwegian (no)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NO3004829T3 publication Critical patent/NO3004829T3/no

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/16Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by photoelectric means
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/008Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003Mems transducers or their use

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Measuring Fluid Pressure (AREA)
  • Optical Integrated Circuits (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
NO14728557A 2013-06-06 2014-06-04 NO3004829T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP13170867 2013-06-06
EP13196824 2013-12-12
EP14728557.1A EP3004829B1 (en) 2013-06-06 2014-06-04 All-optical pressure sensor
PCT/EP2014/061625 WO2014195372A1 (en) 2013-06-06 2014-06-04 All-optical pressure sensor

Publications (1)

Publication Number Publication Date
NO3004829T3 true NO3004829T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2018-07-28

Family

ID=50896299

Family Applications (1)

Application Number Title Priority Date Filing Date
NO14728557A NO3004829T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2013-06-06 2014-06-04

Country Status (7)

Country Link
US (1) US9658123B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP3004829B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN (1) CN105452832B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DK (1) DK3004829T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
ES (1) ES2665144T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NO (1) NO3004829T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
WO (1) WO2014195372A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016160402A1 (en) * 2015-03-31 2016-10-06 California Institute Of Technology Biocompatible packaging for long term implantable sensors and electronics
US10106398B2 (en) * 2015-05-28 2018-10-23 Infineon Technologies Ag Micromechanical structure comprising carbon material and method for fabricating the same
CN105004414B (zh) * 2015-07-20 2017-12-29 武汉理工光科股份有限公司 基于光纤光栅的声音传感器
WO2018208401A1 (en) 2017-05-12 2018-11-15 California Institute Of Technology Implantable extracompartmental pressure sensor
DE102017119406A1 (de) * 2017-08-24 2019-02-28 Samson Aktiengesellschaft Kommunikationsverfahren für ein Stellgerät
CN109414200B (zh) * 2017-12-25 2019-12-24 深圳市得道健康管理有限公司 表面应变检测装置及其表面应变传感器
EP3557211A1 (en) 2018-04-16 2019-10-23 ams International AG Photonic device, method for operating a photonic device and method for manufacturing a photonic device
CN108989919B (zh) * 2018-07-13 2020-09-22 潍坊歌尔微电子有限公司 一种传感器
EP3629598A1 (en) * 2018-09-26 2020-04-01 ams AG Integrated optical transducer and method for fabricating an integrated optical transducer
WO2020214108A1 (en) * 2019-04-18 2020-10-22 Orta Dogu Teknik Universitesi Fiber optic mems microphone
US11131595B2 (en) * 2019-07-26 2021-09-28 Raytheon Technologies Corporation Pressure sensing device and method for using the same
CN112449295A (zh) * 2019-08-30 2021-03-05 华为技术有限公司 麦克风芯片、麦克风及终端设备
CN110531513B (zh) * 2019-09-03 2022-02-15 山东大学 一种mems换能结构及其应用
US11067749B2 (en) * 2019-11-21 2021-07-20 Globalfoundries U.S. Inc. Waveguides with cladding layers of gradated refractive index
FR3105824B1 (fr) 2019-12-27 2022-02-18 Commissariat Energie Atomique Dispositif optique de détection d'une onde acoustique
CN111157149A (zh) * 2020-01-03 2020-05-15 天津大学 一种基于微悬臂梁共振激发的光压力值测量装置及方法
US11701504B2 (en) 2020-01-17 2023-07-18 California Institute Of Technology Implantable intracranial pressure sensor
CN111263283A (zh) * 2020-02-17 2020-06-09 瑞声声学科技(深圳)有限公司 光学麦克风
CN111464927A (zh) * 2020-04-07 2020-07-28 中国电子科技集团公司第三研究所 一种光纤传声器及其敏感结构及制备方法
CN114136529B (zh) * 2021-11-30 2022-11-25 山东大学 一种基于集成光学的可快速定制的压力传感器及定制方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4523474A (en) 1983-08-12 1985-06-18 Borg-Warner Corporation Capacitive pressure sensor
FR2638471B1 (fr) * 1988-11-02 1993-02-19 Ingenierie Genie Civil Sarl Dispositif de mesure de pression pour le betonnage de trous fores
DE19754910C2 (de) * 1997-12-10 1999-12-02 Geoforschungszentrum Potsdam Wellenlängendetektion an Faser-Bragg-Gitter-Sensoren
AU756444B2 (en) * 1998-12-04 2003-01-16 Weatherford Technology Holdings, Llc Bragg grating pressure sensor
US6581436B2 (en) * 2001-05-16 2003-06-24 Esec Trading Sa Pressure sensor with means for re-calibration
DE60312493T2 (de) * 2002-03-21 2007-07-12 Transense Technologies Plc, Bicester Druckmonitor mit oberflächenwellenvorrichtung
CN2783292Y (zh) * 2004-12-14 2006-05-24 武汉理工大学 高精度光纤布喇格光栅微型压力传感器
CN100465601C (zh) * 2007-04-19 2009-03-04 山东科技大学 光纤光栅压力测量装置
US9528893B2 (en) * 2009-06-29 2016-12-27 University Of Massachusetts Optical fiber pressure sensor with uniform diaphragm and method of fabricating same
US8490495B2 (en) * 2010-05-05 2013-07-23 Consensic, Inc. Capacitive pressure sensor with vertical electrical feedthroughs and method to make the same
CN102116692A (zh) * 2011-01-30 2011-07-06 宁波杉工结构监测与控制工程中心有限公司 一种光纤布拉格光栅压力传感器及其相应的测量方法
IN2015DN00016A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2012-06-06 2015-05-22 Univ Denmark Tech Dtu
GB2503466B (en) * 2012-06-27 2017-04-19 Oxsensis Ltd Optical sensor
ITMI20130138A1 (it) * 2013-01-31 2014-08-01 Laser Point S R L Sensore ottico per misure di pressione senza contatto.

Also Published As

Publication number Publication date
CN105452832A (zh) 2016-03-30
EP3004829A1 (en) 2016-04-13
DK3004829T3 (en) 2018-04-30
EP3004829B1 (en) 2018-02-28
US9658123B2 (en) 2017-05-23
US20160123829A1 (en) 2016-05-05
ES2665144T3 (es) 2018-04-24
WO2014195372A1 (en) 2014-12-11
CN105452832B (zh) 2018-11-30

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