DK3004829T3 - Optical pressure sensor - Google Patents
Optical pressure sensor Download PDFInfo
- Publication number
- DK3004829T3 DK3004829T3 DK14728557.1T DK14728557T DK3004829T3 DK 3004829 T3 DK3004829 T3 DK 3004829T3 DK 14728557 T DK14728557 T DK 14728557T DK 3004829 T3 DK3004829 T3 DK 3004829T3
- Authority
- DK
- Denmark
- Prior art keywords
- waveguide
- core
- pressure sensor
- outer membrane
- optical
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims description 100
- 239000012528 membrane Substances 0.000 claims description 152
- 238000010168 coupling process Methods 0.000 claims description 37
- 238000005859 coupling reaction Methods 0.000 claims description 37
- 230000008878 coupling Effects 0.000 claims description 36
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 13
- 230000001902 propagating effect Effects 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 claims description 3
- 239000005297 pyrex Substances 0.000 claims description 3
- 239000011162 core material Substances 0.000 description 160
- 239000007787 solid Substances 0.000 description 53
- 230000008859 change Effects 0.000 description 28
- 238000013461 design Methods 0.000 description 28
- 230000035945 sensitivity Effects 0.000 description 23
- 239000000463 material Substances 0.000 description 16
- 239000013307 optical fiber Substances 0.000 description 15
- 239000012530 fluid Substances 0.000 description 14
- 239000000835 fiber Substances 0.000 description 13
- 239000007788 liquid Substances 0.000 description 13
- 238000001228 spectrum Methods 0.000 description 12
- 239000010410 layer Substances 0.000 description 11
- 230000008901 benefit Effects 0.000 description 10
- 230000006870 function Effects 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 6
- 238000005253 cladding Methods 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000004044 response Effects 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 238000013016 damping Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000003921 oil Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 238000009423 ventilation Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 3
- 239000003562 lightweight material Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229910001092 metal group alloy Inorganic materials 0.000 description 3
- 239000004038 photonic crystal Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 239000005350 fused silica glass Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 239000007779 soft material Substances 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 229920003043 Cellulose fiber Polymers 0.000 description 1
- 229910000861 Mg alloy Inorganic materials 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
- 208000025174 PANDAS Diseases 0.000 description 1
- 208000021155 Paediatric autoimmune neuropsychiatric disorders associated with streptococcal infection Diseases 0.000 description 1
- 240000004718 Panda Species 0.000 description 1
- 235000016496 Panda oleosa Nutrition 0.000 description 1
- GANNOFFDYMSBSZ-UHFFFAOYSA-N [AlH3].[Mg] Chemical compound [AlH3].[Mg] GANNOFFDYMSBSZ-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003129 oil well Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009182 swimming Effects 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
- G01L23/16—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by photoelectric means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
- H04R23/008—Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Measuring Fluid Pressure (AREA)
- Optical Integrated Circuits (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13170867 | 2013-06-06 | ||
| EP13196824 | 2013-12-12 | ||
| PCT/EP2014/061625 WO2014195372A1 (en) | 2013-06-06 | 2014-06-04 | All-optical pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK3004829T3 true DK3004829T3 (en) | 2018-04-30 |
Family
ID=50896299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK14728557.1T DK3004829T3 (en) | 2013-06-06 | 2014-06-04 | Optical pressure sensor |
Country Status (7)
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016160402A1 (en) * | 2015-03-31 | 2016-10-06 | California Institute Of Technology | Biocompatible packaging for long term implantable sensors and electronics |
| US10106398B2 (en) * | 2015-05-28 | 2018-10-23 | Infineon Technologies Ag | Micromechanical structure comprising carbon material and method for fabricating the same |
| CN105004414B (zh) * | 2015-07-20 | 2017-12-29 | 武汉理工光科股份有限公司 | 基于光纤光栅的声音传感器 |
| WO2018208401A1 (en) | 2017-05-12 | 2018-11-15 | California Institute Of Technology | Implantable extracompartmental pressure sensor |
| DE102017119406A1 (de) * | 2017-08-24 | 2019-02-28 | Samson Aktiengesellschaft | Kommunikationsverfahren für ein Stellgerät |
| CN109414200B (zh) * | 2017-12-25 | 2019-12-24 | 深圳市得道健康管理有限公司 | 表面应变检测装置及其表面应变传感器 |
| EP3557211A1 (en) | 2018-04-16 | 2019-10-23 | ams International AG | Photonic device, method for operating a photonic device and method for manufacturing a photonic device |
| CN108989919B (zh) * | 2018-07-13 | 2020-09-22 | 潍坊歌尔微电子有限公司 | 一种传感器 |
| EP3629598A1 (en) * | 2018-09-26 | 2020-04-01 | ams AG | Integrated optical transducer and method for fabricating an integrated optical transducer |
| WO2020214108A1 (en) * | 2019-04-18 | 2020-10-22 | Orta Dogu Teknik Universitesi | Fiber optic mems microphone |
| US11131595B2 (en) * | 2019-07-26 | 2021-09-28 | Raytheon Technologies Corporation | Pressure sensing device and method for using the same |
| CN112449295A (zh) * | 2019-08-30 | 2021-03-05 | 华为技术有限公司 | 麦克风芯片、麦克风及终端设备 |
| CN110531513B (zh) * | 2019-09-03 | 2022-02-15 | 山东大学 | 一种mems换能结构及其应用 |
| US11067749B2 (en) * | 2019-11-21 | 2021-07-20 | Globalfoundries U.S. Inc. | Waveguides with cladding layers of gradated refractive index |
| FR3105824B1 (fr) | 2019-12-27 | 2022-02-18 | Commissariat Energie Atomique | Dispositif optique de détection d'une onde acoustique |
| CN111157149A (zh) * | 2020-01-03 | 2020-05-15 | 天津大学 | 一种基于微悬臂梁共振激发的光压力值测量装置及方法 |
| US11701504B2 (en) | 2020-01-17 | 2023-07-18 | California Institute Of Technology | Implantable intracranial pressure sensor |
| CN111263283A (zh) * | 2020-02-17 | 2020-06-09 | 瑞声声学科技(深圳)有限公司 | 光学麦克风 |
| CN111464927A (zh) * | 2020-04-07 | 2020-07-28 | 中国电子科技集团公司第三研究所 | 一种光纤传声器及其敏感结构及制备方法 |
| CN114136529B (zh) * | 2021-11-30 | 2022-11-25 | 山东大学 | 一种基于集成光学的可快速定制的压力传感器及定制方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4523474A (en) | 1983-08-12 | 1985-06-18 | Borg-Warner Corporation | Capacitive pressure sensor |
| FR2638471B1 (fr) * | 1988-11-02 | 1993-02-19 | Ingenierie Genie Civil Sarl | Dispositif de mesure de pression pour le betonnage de trous fores |
| DE19754910C2 (de) * | 1997-12-10 | 1999-12-02 | Geoforschungszentrum Potsdam | Wellenlängendetektion an Faser-Bragg-Gitter-Sensoren |
| AU756444B2 (en) * | 1998-12-04 | 2003-01-16 | Weatherford Technology Holdings, Llc | Bragg grating pressure sensor |
| US6581436B2 (en) * | 2001-05-16 | 2003-06-24 | Esec Trading Sa | Pressure sensor with means for re-calibration |
| DE60312493T2 (de) * | 2002-03-21 | 2007-07-12 | Transense Technologies Plc, Bicester | Druckmonitor mit oberflächenwellenvorrichtung |
| CN2783292Y (zh) * | 2004-12-14 | 2006-05-24 | 武汉理工大学 | 高精度光纤布喇格光栅微型压力传感器 |
| CN100465601C (zh) * | 2007-04-19 | 2009-03-04 | 山东科技大学 | 光纤光栅压力测量装置 |
| US9528893B2 (en) * | 2009-06-29 | 2016-12-27 | University Of Massachusetts | Optical fiber pressure sensor with uniform diaphragm and method of fabricating same |
| US8490495B2 (en) * | 2010-05-05 | 2013-07-23 | Consensic, Inc. | Capacitive pressure sensor with vertical electrical feedthroughs and method to make the same |
| CN102116692A (zh) * | 2011-01-30 | 2011-07-06 | 宁波杉工结构监测与控制工程中心有限公司 | 一种光纤布拉格光栅压力传感器及其相应的测量方法 |
| IN2015DN00016A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2012-06-06 | 2015-05-22 | Univ Denmark Tech Dtu | |
| GB2503466B (en) * | 2012-06-27 | 2017-04-19 | Oxsensis Ltd | Optical sensor |
| ITMI20130138A1 (it) * | 2013-01-31 | 2014-08-01 | Laser Point S R L | Sensore ottico per misure di pressione senza contatto. |
-
2014
- 2014-06-04 NO NO14728557A patent/NO3004829T3/no unknown
- 2014-06-04 WO PCT/EP2014/061625 patent/WO2014195372A1/en active Application Filing
- 2014-06-04 US US14/896,357 patent/US9658123B2/en active Active
- 2014-06-04 DK DK14728557.1T patent/DK3004829T3/en active
- 2014-06-04 EP EP14728557.1A patent/EP3004829B1/en active Active
- 2014-06-04 ES ES14728557.1T patent/ES2665144T3/es active Active
- 2014-06-04 CN CN201480045404.0A patent/CN105452832B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN105452832A (zh) | 2016-03-30 |
| NO3004829T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2018-07-28 |
| EP3004829A1 (en) | 2016-04-13 |
| EP3004829B1 (en) | 2018-02-28 |
| US9658123B2 (en) | 2017-05-23 |
| US20160123829A1 (en) | 2016-05-05 |
| ES2665144T3 (es) | 2018-04-24 |
| WO2014195372A1 (en) | 2014-12-11 |
| CN105452832B (zh) | 2018-11-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DK3004829T3 (en) | Optical pressure sensor | |
| US9574956B2 (en) | MEMS optical sensor | |
| Jo et al. | Miniature fiber acoustic sensors using a photonic-crystal membrane | |
| JP6084672B2 (ja) | 光ファイバ適合音響センサ | |
| US4530078A (en) | Microbending fiber optic acoustic sensor | |
| US11629979B2 (en) | Diaphragm-based fiber acoustic sensor | |
| EP1794561B1 (en) | Opto-acoustic pressure sensor | |
| CN107911782B (zh) | 一种光纤传声器探头及光纤传声器系统 | |
| Jan et al. | Photonic-Crystal-Based fiber hydrophone with Sub-$100~\mu $ Pa/$\surd $ Hz Pressure Resolution | |
| JP3635492B2 (ja) | ファイバーオプティク地震センサ | |
| KR20080031477A (ko) | 마이크로폰 소자 | |
| US6320992B1 (en) | Integrated optic accelerometer and method | |
| Afshar et al. | Lens-less, spring-loaded diaphragm-based fiber acoustic sensor | |
| KR100443386B1 (ko) | 섬유 광학 지진 센서 | |
| CN118310619A (zh) | 一种机械耦合结构增强的光纤传感器 | |
| CN119354320A (zh) | 一种多悬臂梁结构的声压传感器 |