ES2369723T3 - Procedimiento y dispositivo para fabricar materiales ópticos estructurados. - Google Patents

Procedimiento y dispositivo para fabricar materiales ópticos estructurados. Download PDF

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Publication number
ES2369723T3
ES2369723T3 ES08758183T ES08758183T ES2369723T3 ES 2369723 T3 ES2369723 T3 ES 2369723T3 ES 08758183 T ES08758183 T ES 08758183T ES 08758183 T ES08758183 T ES 08758183T ES 2369723 T3 ES2369723 T3 ES 2369723T3
Authority
ES
Spain
Prior art keywords
mirror
mask
mask cylinder
cylinder
support rollers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES08758183T
Other languages
English (en)
Spanish (es)
Inventor
Peter W. Oliveira
Peter Rogin
Michael Gros
Martin Amlung
Michael Veith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leibniz Institut fuer Neue Materialien Gemeinnuetzige GmbH
Original Assignee
Leibniz Institut fuer Neue Materialien Gemeinnuetzige GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leibniz Institut fuer Neue Materialien Gemeinnuetzige GmbH filed Critical Leibniz Institut fuer Neue Materialien Gemeinnuetzige GmbH
Application granted granted Critical
Publication of ES2369723T3 publication Critical patent/ES2369723T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2035Exposure; Apparatus therefor simultaneous coating and exposure; using a belt mask, e.g. endless

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
ES08758183T 2007-07-26 2008-06-09 Procedimiento y dispositivo para fabricar materiales ópticos estructurados. Active ES2369723T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007035387 2007-07-26
DE102007035387A DE102007035387A1 (de) 2007-07-26 2007-07-26 Verfahren und Vorrichtung zur Herstellung von strukturierten optischen Materialien

Publications (1)

Publication Number Publication Date
ES2369723T3 true ES2369723T3 (es) 2011-12-05

Family

ID=39768570

Family Applications (1)

Application Number Title Priority Date Filing Date
ES08758183T Active ES2369723T3 (es) 2007-07-26 2008-06-09 Procedimiento y dispositivo para fabricar materiales ópticos estructurados.

Country Status (6)

Country Link
US (1) US8382463B2 (de)
EP (1) EP2171542B1 (de)
AT (1) ATE521916T1 (de)
DE (1) DE102007035387A1 (de)
ES (1) ES2369723T3 (de)
WO (1) WO2009012738A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8288074B2 (en) * 2008-07-18 2012-10-16 Rainbow Technology Systems Limited Photoimaging method and apparatus
DE102010014305A1 (de) 2010-04-09 2011-10-13 Hologram Industries Research Gmbh Verfahren und Vorrichtung zum Herstellen Kontaktkopien von Reflexions-Volumenhologrammen
KR101737680B1 (ko) * 2011-12-20 2017-05-18 가부시키가이샤 니콘 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법
TWI641915B (zh) * 2012-01-12 2018-11-21 尼康股份有限公司 基板處理裝置、基板處理方法、及圓筒狀光罩
JP2013207060A (ja) * 2012-03-28 2013-10-07 Sony Corp 構造物形成装置、構造物の製造方法及び構造物
US9720330B2 (en) * 2012-04-17 2017-08-01 The Regents Of The University Of Michigan Methods for making micro- and nano-scale conductive grids for transparent electrodes and polarizers by roll to roll optical lithography

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3298297A (en) * 1964-06-10 1967-01-17 Ncr Co Continuous contact printer
GB8415782D0 (en) 1984-06-20 1984-07-25 Autotype Int Ltd Masking films
GB8800377D0 (en) 1988-01-08 1988-02-10 Autotype Int Ltd Masking films
GB8827000D0 (en) 1988-11-18 1988-12-21 Autotype Int Ltd Masking films
DE4132476A1 (de) * 1991-09-30 1993-04-01 Matthiesen Geb Sievers Gerda Verfahren, bedruckstoff und einrichtung zur verfielfaeltigung von holographischen feinstrukturen und anderen beugungsgittern auf printprodukte
US5576853A (en) * 1994-12-20 1996-11-19 Polaroid Corporation Apparatus and methods for making transmission holograms
JP3731759B2 (ja) 1995-02-09 2006-01-05 大日本印刷株式会社 連続的フィルムラミネート及び剥離システム
US5863374A (en) * 1995-03-24 1999-01-26 Silveira; Frank S. Method and apparatus for peeling a laminate
DE19613645A1 (de) 1996-04-04 1997-10-09 Inst Neue Mat Gemein Gmbh Optische Bauteile mit Gradientenstruktur und Verfahren zu deren Herstellung
JPH1096806A (ja) * 1996-09-20 1998-04-14 Dainippon Printing Co Ltd ディスプレイ用反射材
US5999281A (en) * 1997-02-28 1999-12-07 Polaroid Corporation Holographic projection screen combining an elliptical holographic diffuser and a cylindrical light-collimator
JP2000352607A (ja) * 1999-06-11 2000-12-19 Dainippon Printing Co Ltd 光拡散フィルム、その製造方法、面光源及び表示装置
US6773859B2 (en) 2001-03-06 2004-08-10 E. I. Du Pont De Nemours And Company Process for making a flexographic printing plate and a photosensitive element for use in the process
DE102005023871A1 (de) 2005-05-24 2006-11-30 Leibnitz-Institut für neue Materialien Gemeinnützige GmbH Regenerierbare, strukturierte Platte mit Oxidationskatalysatoren

Also Published As

Publication number Publication date
EP2171542A1 (de) 2010-04-07
DE102007035387A1 (de) 2009-01-29
US8382463B2 (en) 2013-02-26
US20100155974A1 (en) 2010-06-24
WO2009012738A1 (de) 2009-01-29
ATE521916T1 (de) 2011-09-15
EP2171542B1 (de) 2011-08-24

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