ES2192347T3 - Rele para sistemas micro electro-mecanicos. - Google Patents
Rele para sistemas micro electro-mecanicos.Info
- Publication number
- ES2192347T3 ES2192347T3 ES98964707T ES98964707T ES2192347T3 ES 2192347 T3 ES2192347 T3 ES 2192347T3 ES 98964707 T ES98964707 T ES 98964707T ES 98964707 T ES98964707 T ES 98964707T ES 2192347 T3 ES2192347 T3 ES 2192347T3
- Authority
- ES
- Spain
- Prior art keywords
- diaphragm
- electrode
- diaphragms
- central electrode
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004353 relayed correlation spectroscopy Methods 0.000 title 1
- 238000007789 sealing Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/64—Protective enclosures, baffle plates, or screens for contacts
- H01H1/66—Contacts sealed in an evacuated or gas-filled envelope, e.g. magnetic dry-reed contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
- H01H9/30—Means for extinguishing or preventing arc between current-carrying parts
- H01H9/42—Impedances connected with contacts
Landscapes
- Micromachines (AREA)
- Telephone Function (AREA)
- Control Of Electric Motors In General (AREA)
- Pressure Sensors (AREA)
- Iron Core Of Rotating Electric Machines (AREA)
Abstract
Un dispositivo de relé, que comprende una base de oblea semiconductora y un diafragma que tiene un electrodo en él, cuyo dispositivo se caracteriza porque dicha base (11) tiene una depresión superficial (13) con un primer diseño superficial (39, 41) eléctricamente conductor formado en ella; un diafragma inferior (19) posicionado encima de dicha depresión superficial y que puede moverse para hacer contacto con ella, teniendo dicho diafragma inferior un segundo diseño superficial (33, 35) eléctricamente conductor en él; un diafragma superior (15) posicionado encima de dicho diafragma inferior, teniendo dicho diafragma superior un electrodo en él; un electrodo central (17) montado entre dichos diafragmas superior e inferior, estando posicionado dicho electrodo central para atraer selectivamente dicho electrodo del diafragma superior al ser aplicada una tensión entre ellos y para mover dicho diafragma superior a una posición inferior, estando posicionado, además, dicho electrodo central para atraer selectivamente dicho electrodo del diafragma inferior al ser aplicada una tensión entre ellos y para mover dicho diafragma inferior a una posición superior; y medios de conexión mecánica montados en relación de conexión entre dicho diafragma superior y dicho diafragma inferior para mover a uno de dichos diafragmas mecánicamente cuando el otro de dichos diafragmas es movido por dicha aplicación de tensión a dicho electrodo central y dicho otro diafragma; estando dichos diafragmas superior e inferior montados en relación de obturación en dicha base para definir una región cerrada entre ellos que encierra dicho electrodo central y dichos electrodos de diafragma; estrechándose dicho diseño superficial de base y dicho diseño de diafragma inferior en sus perímetros respectivos para proporcionar un contorno de contacto que permite un contacto inicial solamente en la periferia de la depresión y aumentando el contacto a medida que dicho diafragma inferior se mueve hacia dicha superficie para proporcionar un contacto completo entre dichos diseños durante un período de tiempo predeterminado.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/999,420 US5959338A (en) | 1997-12-29 | 1997-12-29 | Micro electro-mechanical systems relay |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2192347T3 true ES2192347T3 (es) | 2003-10-01 |
Family
ID=25546307
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES98964707T Expired - Lifetime ES2192347T3 (es) | 1997-12-29 | 1998-12-07 | Rele para sistemas micro electro-mecanicos. |
Country Status (8)
Country | Link |
---|---|
US (1) | US5959338A (es) |
EP (1) | EP1042774B1 (es) |
JP (1) | JP4010769B2 (es) |
AT (1) | ATE233945T1 (es) |
DE (1) | DE69811951T2 (es) |
DK (1) | DK1042774T3 (es) |
ES (1) | ES2192347T3 (es) |
WO (1) | WO1999034383A1 (es) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2876530B1 (ja) * | 1998-02-24 | 1999-03-31 | 東京工業大学長 | 固着した可動部の修復手段を具える超小型素子およびその製造方法 |
US6373356B1 (en) | 1999-05-21 | 2002-04-16 | Interscience, Inc. | Microelectromechanical liquid metal current carrying system, apparatus and method |
US6586841B1 (en) | 2000-02-23 | 2003-07-01 | Onix Microsystems, Inc. | Mechanical landing pad formed on the underside of a MEMS device |
US6351580B1 (en) | 2000-03-27 | 2002-02-26 | Jds Uniphase Corporation | Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements |
WO2001080258A2 (en) * | 2000-04-18 | 2001-10-25 | Standard Mems, Inc. | A micro relay |
US7256669B2 (en) * | 2000-04-28 | 2007-08-14 | Northeastern University | Method of preparing electrical contacts used in switches |
US6561479B1 (en) * | 2000-08-23 | 2003-05-13 | Micron Technology, Inc. | Small scale actuators and methods for their formation and use |
US6587021B1 (en) | 2000-11-09 | 2003-07-01 | Raytheon Company | Micro-relay contact structure for RF applications |
US6888979B2 (en) | 2000-11-29 | 2005-05-03 | Analog Devices, Inc. | MEMS mirrors with precision clamping mechanism |
US7183633B2 (en) * | 2001-03-01 | 2007-02-27 | Analog Devices Inc. | Optical cross-connect system |
US6552404B1 (en) * | 2001-04-17 | 2003-04-22 | Analog Devices, Inc. | Integratable transducer structure |
US7102480B2 (en) * | 2001-04-17 | 2006-09-05 | Telefonaktiebolaget Lm Ericsson (Publ) | Printed circuit board integrated switch |
US6664885B2 (en) | 2001-08-31 | 2003-12-16 | Adc Telecommunications, Inc. | Thermally activated latch |
US6710355B2 (en) | 2002-02-07 | 2004-03-23 | Honeywell International Inc. | Optically powered resonant integrated microstructure pressure sensor |
JP3818176B2 (ja) * | 2002-03-06 | 2006-09-06 | 株式会社村田製作所 | Rfmems素子 |
US6972882B2 (en) * | 2002-04-30 | 2005-12-06 | Hewlett-Packard Development Company, L.P. | Micro-mirror device with light angle amplification |
US7023603B2 (en) * | 2002-04-30 | 2006-04-04 | Hewlett-Packard Development Company, L.P. | Micro-mirror device including dielectrophoretic microemulsion |
US6954297B2 (en) * | 2002-04-30 | 2005-10-11 | Hewlett-Packard Development Company, L.P. | Micro-mirror device including dielectrophoretic liquid |
US20030202264A1 (en) * | 2002-04-30 | 2003-10-30 | Weber Timothy L. | Micro-mirror device |
US6938310B2 (en) * | 2002-08-26 | 2005-09-06 | Eastman Kodak Company | Method of making a multi-layer micro-electromechanical electrostatic actuator for producing drop-on-demand liquid emission devices |
US6903487B2 (en) * | 2003-02-14 | 2005-06-07 | Hewlett-Packard Development Company, L.P. | Micro-mirror device with increased mirror tilt |
US6844953B2 (en) * | 2003-03-12 | 2005-01-18 | Hewlett-Packard Development Company, L.P. | Micro-mirror device including dielectrophoretic liquid |
EP1626421A4 (en) * | 2003-05-20 | 2009-02-11 | Fujitsu Ltd | ELECTRICAL CONTACT DEVICE |
US7202764B2 (en) * | 2003-07-08 | 2007-04-10 | International Business Machines Corporation | Noble metal contacts for micro-electromechanical switches |
US7229669B2 (en) * | 2003-11-13 | 2007-06-12 | Honeywell International Inc. | Thin-film deposition methods and apparatuses |
US20050223783A1 (en) * | 2004-04-06 | 2005-10-13 | Kavlico Corporation | Microfluidic system |
JP2010506532A (ja) * | 2006-10-11 | 2010-02-25 | メムス テクノロジー ビーエイチディー | 極低圧力センサーおよびその製造方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5937716Y2 (ja) * | 1979-01-31 | 1984-10-19 | 日産自動車株式会社 | 半導体差圧センサ |
US4222277A (en) * | 1979-08-13 | 1980-09-16 | Kulite Semiconductor Products, Inc. | Media compatible pressure transducer |
US4826131A (en) * | 1988-08-22 | 1989-05-02 | Ford Motor Company | Electrically controllable valve etched from silicon substrates |
US5082242A (en) * | 1989-12-27 | 1992-01-21 | Ulrich Bonne | Electronic microvalve apparatus and fabrication |
US5244537A (en) * | 1989-12-27 | 1993-09-14 | Honeywell, Inc. | Fabrication of an electronic microvalve apparatus |
US5180623A (en) * | 1989-12-27 | 1993-01-19 | Honeywell Inc. | Electronic microvalve apparatus and fabrication |
DE4035852A1 (de) * | 1990-11-10 | 1992-05-14 | Bosch Gmbh Robert | Mikroventil in mehrschichtenaufbau |
US5176358A (en) * | 1991-08-08 | 1993-01-05 | Honeywell Inc. | Microstructure gas valve control |
US5441597A (en) * | 1992-12-01 | 1995-08-15 | Honeywell Inc. | Microstructure gas valve control forming method |
US5479042A (en) * | 1993-02-01 | 1995-12-26 | Brooktree Corporation | Micromachined relay and method of forming the relay |
US5619061A (en) * | 1993-07-27 | 1997-04-08 | Texas Instruments Incorporated | Micromechanical microwave switching |
JP2628019B2 (ja) * | 1994-04-19 | 1997-07-09 | 株式会社日立製作所 | 静電駆動型マイクロアクチュエータとバルブの製作方法、及び静電駆動型ポンプ |
NO952190L (no) * | 1995-06-02 | 1996-12-03 | Lk As | Styrbar mikroomskifter |
EP0880817B1 (en) * | 1996-02-10 | 2005-04-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Bistable microactuator with coupled membranes |
-
1997
- 1997-12-29 US US08/999,420 patent/US5959338A/en not_active Expired - Lifetime
-
1998
- 1998-12-07 AT AT98964707T patent/ATE233945T1/de not_active IP Right Cessation
- 1998-12-07 JP JP2000526935A patent/JP4010769B2/ja not_active Expired - Fee Related
- 1998-12-07 EP EP98964707A patent/EP1042774B1/en not_active Expired - Lifetime
- 1998-12-07 ES ES98964707T patent/ES2192347T3/es not_active Expired - Lifetime
- 1998-12-07 WO PCT/US1998/025931 patent/WO1999034383A1/en active IP Right Grant
- 1998-12-07 DE DE69811951T patent/DE69811951T2/de not_active Expired - Lifetime
- 1998-12-07 DK DK98964707T patent/DK1042774T3/da active
Also Published As
Publication number | Publication date |
---|---|
DK1042774T3 (da) | 2003-05-19 |
WO1999034383A1 (en) | 1999-07-08 |
EP1042774A1 (en) | 2000-10-11 |
US5959338A (en) | 1999-09-28 |
DE69811951D1 (de) | 2003-04-10 |
JP4010769B2 (ja) | 2007-11-21 |
EP1042774B1 (en) | 2003-03-05 |
JP2002500410A (ja) | 2002-01-08 |
DE69811951T2 (de) | 2003-12-18 |
ATE233945T1 (de) | 2003-03-15 |
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