ES2155724T3 - Evaporador ceramico eliptico. - Google Patents
Evaporador ceramico eliptico.Info
- Publication number
- ES2155724T3 ES2155724T3 ES99108646T ES99108646T ES2155724T3 ES 2155724 T3 ES2155724 T3 ES 2155724T3 ES 99108646 T ES99108646 T ES 99108646T ES 99108646 T ES99108646 T ES 99108646T ES 2155724 T3 ES2155724 T3 ES 2155724T3
- Authority
- ES
- Spain
- Prior art keywords
- eliptic
- ceramic
- ceramic evaporator
- evaporator boat
- evaporator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Vapour Deposition (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Ceramic Capacitors (AREA)
- Inorganic Insulating Materials (AREA)
- Furnace Charging Or Discharging (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
LA INVENCION TRATA DE UN EVAPORADOR DE CERAMICA PARA EVAPORAR METAL, CARACTERIZADO PORQUE POSEE EN LA ZONA DE LA EVAPORACION DEL METAL UN PERFIL DE LA SUPERFICIE, QUE ES MAYOR QUE EL CORRESPONDIENTE PERFIL DE UN EVAPORADOR TRIANGULAR DE LA MISMA ANCHURA Y ALTURA, Y EN ESTA ZONA TIENE UN PERIMETRO MAS PEQUEÑO Y MENOR QUE UN EVAPORADOR CUADRANGULAR CON LA MISMA ANCHURA Y ALTURA.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19823908A DE19823908A1 (de) | 1998-05-28 | 1998-05-28 | Elliptischer keramischer Verdampfer |
CA002274411A CA2274411C (en) | 1998-05-28 | 1999-06-11 | Elliptical ceramic evaporators |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2155724T3 true ES2155724T3 (es) | 2001-05-16 |
Family
ID=32963019
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES99108646T Expired - Lifetime ES2155724T3 (es) | 1998-05-28 | 1999-05-12 | Evaporador ceramico eliptico. |
Country Status (8)
Country | Link |
---|---|
US (1) | US6085025A (es) |
EP (1) | EP0962546B1 (es) |
JP (1) | JP3355149B2 (es) |
CN (1) | CN1194115C (es) |
AT (1) | ATE199576T1 (es) |
CA (1) | CA2274411C (es) |
DE (2) | DE19823908A1 (es) |
ES (1) | ES2155724T3 (es) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19956811A1 (de) | 1999-11-25 | 2001-06-13 | Kempten Elektroschmelz Gmbh | Keramischer Flash-TV-Verdampfer |
DE10015850A1 (de) * | 2000-03-30 | 2001-10-18 | Kempten Elektroschmelz Gmbh | Material für alterungsbeständige keramische Verdampfer |
DE10015847C2 (de) * | 2000-03-30 | 2002-03-14 | Wacker Chemie Gmbh | Vorrichtung zum Bedampfen von Schwarzweiß- oder Farbbildröhren mit Aluminium |
PT1585846E (pt) * | 2003-01-08 | 2010-11-23 | Kennametal Sintec Keramik Gmbh | Recipiente vaporizador aquecido por resistência |
DE102005027382B4 (de) * | 2005-06-14 | 2010-01-28 | Leybold Optics Gmbh | Verdampferschiffchen für eine Vorrichtung zum Beschichten von Substraten |
DE102005030862B4 (de) * | 2005-07-01 | 2009-12-24 | Sintec Keramik Gmbh | Erstbenetzungshilfsmaterial für einen Verdampferkörper, seine Verwendung zum Herrichten der Verdampferfläche eines Verdampferkörpers und ein elektrisch beheizbarer keramischer Verdampferkörper |
US7494616B2 (en) | 2005-11-04 | 2009-02-24 | Momentive Performance Materials Inc. | Container for evaporation of metal and method to manufacture thereof |
US10035078B2 (en) * | 2010-05-04 | 2018-07-31 | Commonwealth Scientific And Industrial Research Organisation | Separation method |
CN105327523B (zh) * | 2014-07-14 | 2018-03-09 | 上海和辉光电有限公司 | 一种oled有机发光材料的升华制成方法与制成装置 |
US20160208373A1 (en) | 2015-01-20 | 2016-07-21 | Kennametal Inc. | Imc evaporator boat assembly |
US10184168B2 (en) * | 2015-01-20 | 2019-01-22 | Kennametal Inc. | IMC evaporator boat-thermal insulation cartridge assembly |
EP3470545A1 (en) | 2017-10-10 | 2019-04-17 | 3M Innovative Properties Company | Evaporation boat for evaporation of metals |
DE102019110950A1 (de) | 2019-04-29 | 2020-10-29 | Kennametal Inc. | Hartmetallzusammensetzungen und deren Anwendungen |
EP3767004B1 (en) | 2019-07-17 | 2023-09-27 | 3M Innovative Properties Company | Evaporation boat for evaporation of metals |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2773923A (en) * | 1953-01-26 | 1956-12-11 | Raytheon Mfg Co | Zone-refining apparatus |
US2996412A (en) * | 1958-10-10 | 1961-08-15 | Continental Can Co | Art of depositing metals |
DE1207179B (de) * | 1961-02-09 | 1965-12-16 | Licentia Gmbh | Oxydkeramischer Tiegel zum Vakuum-Aufdampfen von Metallen |
US3514575A (en) * | 1967-08-10 | 1970-05-26 | Sylvania Electric Prod | Metal-evaporating source |
US3636305A (en) * | 1971-03-10 | 1972-01-18 | Gte Sylvania Inc | Apparatus for metal vaporization comprising a heater and a refractory vessel |
ES417413A1 (es) * | 1972-08-18 | 1976-03-01 | Kempten Elektroschmelz Gmbh | Perfeccionamientos introducidos en evaporadores a base de material refractario sinterizado. |
DE2317762B2 (de) * | 1973-04-09 | 1978-08-17 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Tiegel zur Aufnahme des Verdampfungsgutes in Elektronenstrahl-Aufdampfanlagen |
JPS5274580A (en) * | 1975-12-19 | 1977-06-22 | Hitachi Ltd | Boat for vacuum evaporation |
US4089643A (en) * | 1976-03-19 | 1978-05-16 | Gte Sylvania Incorporated | Self-resistance-heated evaporation boat |
JPS63192860A (ja) * | 1987-02-06 | 1988-08-10 | Hitachi Ltd | 蒸着用ボ−ト |
US5395180A (en) * | 1993-12-14 | 1995-03-07 | Advanced Ceramics Corporation | Boron nitride vaporization vessel |
US5537507A (en) * | 1994-09-28 | 1996-07-16 | Advanced Ceramics Corporation | Coated flash evaporator heater |
-
1998
- 1998-05-28 DE DE19823908A patent/DE19823908A1/de not_active Withdrawn
-
1999
- 1999-05-12 AT AT99108646T patent/ATE199576T1/de not_active IP Right Cessation
- 1999-05-12 EP EP99108646A patent/EP0962546B1/de not_active Expired - Lifetime
- 1999-05-12 DE DE59900051T patent/DE59900051D1/de not_active Expired - Fee Related
- 1999-05-12 ES ES99108646T patent/ES2155724T3/es not_active Expired - Lifetime
- 1999-05-20 US US09/315,320 patent/US6085025A/en not_active Expired - Fee Related
- 1999-05-24 JP JP14357499A patent/JP3355149B2/ja not_active Expired - Fee Related
- 1999-05-28 CN CNB991078047A patent/CN1194115C/zh not_active Expired - Fee Related
- 1999-06-11 CA CA002274411A patent/CA2274411C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3355149B2 (ja) | 2002-12-09 |
DE19823908A1 (de) | 1999-12-02 |
EP0962546B1 (de) | 2001-03-07 |
CA2274411C (en) | 2003-03-25 |
ATE199576T1 (de) | 2001-03-15 |
CA2274411A1 (en) | 2000-12-11 |
CN1194115C (zh) | 2005-03-23 |
US6085025A (en) | 2000-07-04 |
DE59900051D1 (de) | 2001-04-12 |
CN1237647A (zh) | 1999-12-08 |
JPH11350048A (ja) | 1999-12-21 |
EP0962546A1 (de) | 1999-12-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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