ES2146237T3 - Cuerpos microestructurados y procedimiento para su fabricacion. - Google Patents

Cuerpos microestructurados y procedimiento para su fabricacion.

Info

Publication number
ES2146237T3
ES2146237T3 ES94102351T ES94102351T ES2146237T3 ES 2146237 T3 ES2146237 T3 ES 2146237T3 ES 94102351 T ES94102351 T ES 94102351T ES 94102351 T ES94102351 T ES 94102351T ES 2146237 T3 ES2146237 T3 ES 2146237T3
Authority
ES
Spain
Prior art keywords
application
microstructure
mold
procedure
requirements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES94102351T
Other languages
English (en)
Inventor
Christoph Dr Lessmollmann
Joachim Dr Eicher
Holger Dr Reinecke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boehringer Ingelheim Microparts GmbH
Original Assignee
Microparts Gesellschaft fuer Mikrostrukturtechnik mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6482617&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ES2146237(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Microparts Gesellschaft fuer Mikrostrukturtechnik mbH filed Critical Microparts Gesellschaft fuer Mikrostrukturtechnik mbH
Application granted granted Critical
Publication of ES2146237T3 publication Critical patent/ES2146237T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4871Bases, plates or heatsinks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12Both compacting and sintering
    • B22F3/1208Containers or coating used therefor
    • B22F3/1258Container manufacturing
    • B22F3/1283Container formed as an undeformable model eliminated after consolidation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/42Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005Separation of the coating from the substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4803Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4803Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • H01L21/4807Ceramic parts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29KINDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2883/00Use of polymers having silicon, with or without sulfur, nitrogen, oxygen, or carbon only, in the main chain, as mould material

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Micromachines (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Adornments (AREA)
  • Press-Shaping Or Shaping Using Conveyers (AREA)
  • Molds, Cores, And Manufacturing Methods Thereof (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Abstract

2.1 LOS CUERPOS DE MICROESTRUCTURA SON CONFORMADOS POR MEDIO DE UNA APLICACION DE MOLDE ELABORABLE POR EJEMPLO SEGUN EL PROCEDIMIENTO LIGA. EL PROCEDIMIENTO ES COSTOSO EN MUCHOS CASOS, LOS MOLDES DE ESTRUCTURA QUE SE OBTIENEN SON LIMITADOS. MEDIANTE LA ELECCION DEL MATERIAL ES UN COMPROMISO A TENER EN CUENTA ENTRE LAS EXIGENCIAS EN EL PROCESO DE FABRICACION Y LAS EXIGENCIAS MEDIANTE LA APLICACION DEL CUERPO DE MICROESTRUCTURA. 2.2 LA APLICACION DE MOLDE DE MICROESTRUCTURA SE ELABORA A PARTIR DE UN CUERPO SOLIDO (METAL, CERAMICA, VIDRIO, PIEDRA O MATERIAL MONOCRISTALINO) A TRAVES DE MECANIZACION DE PRECISION DE MAQUINA DE AJUSTE FIJO, EFECTUANDOSE ESTRUCTURACION ADITIVA O SUBTRACTIVA. LA APLICACION DE MOLDE SE RELLENA CON UN MATERIAL CON CAPACIDAD DE FLUIR Y SE RECUBRE EL MATERIAL SOLIDIFICADO PREVIAMENTE QUE ES SEPARADO A PARTIR DE LA APLICACION DE MOLDE, CON LO CUAL SE OBTIENE EL CUERPO DE MICROESTRUCTURA. PARA LA ELABORACION DE LA APLICACION DE MOLDE SE ELIGE UN MATERIAL, QUE EN BASE A SUS PROPIEDADES PARA ESTE PROCEDIMIENTO DE ESTRUCTURACION DEBE SER LO MAS ADECUADO POSIBLE. PARA EL CUERPO DE MICROESTRUCTURA SE ELIGEN MATERIALES QUE CUMPLEN DE FORMA OPTIMA CON ESTAS EXIGENCIAS AJUSTADAS. 2.3 ELABORACION DE CUERPOS DE MICROESTRUCTURA CON PROPIEDADES DE MATERIALES OPTIMAS Y EN UNA MULTIPLICIDAD DE FORMA AMPLIADA.
ES94102351T 1993-03-12 1994-02-17 Cuerpos microestructurados y procedimiento para su fabricacion. Expired - Lifetime ES2146237T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4307869A DE4307869C2 (de) 1993-03-12 1993-03-12 Mikrostrukturkörper und Verfahren zu deren Herstellung

Publications (1)

Publication Number Publication Date
ES2146237T3 true ES2146237T3 (es) 2000-08-01

Family

ID=6482617

Family Applications (1)

Application Number Title Priority Date Filing Date
ES94102351T Expired - Lifetime ES2146237T3 (es) 1993-03-12 1994-02-17 Cuerpos microestructurados y procedimiento para su fabricacion.

Country Status (6)

Country Link
US (2) US5501784A (es)
EP (1) EP0620092B1 (es)
JP (1) JPH06320550A (es)
KR (1) KR100313048B1 (es)
DE (2) DE4307869C2 (es)
ES (1) ES2146237T3 (es)

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US9671429B2 (en) 2003-05-07 2017-06-06 University Of Southern California Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties
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Also Published As

Publication number Publication date
DE4307869C2 (de) 1996-04-04
JPH06320550A (ja) 1994-11-22
DE4307869A1 (de) 1994-09-15
US6660151B1 (en) 2003-12-09
DE59409280D1 (de) 2000-05-18
EP0620092A1 (de) 1994-10-19
US5501784A (en) 1996-03-26
EP0620092B1 (de) 2000-04-12
KR100313048B1 (ko) 2002-02-19

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