ES2146237T3 - Cuerpos microestructurados y procedimiento para su fabricacion. - Google Patents
Cuerpos microestructurados y procedimiento para su fabricacion.Info
- Publication number
- ES2146237T3 ES2146237T3 ES94102351T ES94102351T ES2146237T3 ES 2146237 T3 ES2146237 T3 ES 2146237T3 ES 94102351 T ES94102351 T ES 94102351T ES 94102351 T ES94102351 T ES 94102351T ES 2146237 T3 ES2146237 T3 ES 2146237T3
- Authority
- ES
- Spain
- Prior art keywords
- application
- microstructure
- mold
- procedure
- requirements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000000463 material Substances 0.000 abstract 7
- 239000000919 ceramic Substances 0.000 abstract 1
- 238000003754 machining Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4871—Bases, plates or heatsinks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/1208—Containers or coating used therefor
- B22F3/1258—Container manufacturing
- B22F3/1283—Container formed as an undeformable model eliminated after consolidation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0005—Separation of the coating from the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
- H01L21/4807—Ceramic parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2883/00—Use of polymers having silicon, with or without sulfur, nitrogen, oxygen, or carbon only, in the main chain, as mould material
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ceramic Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Micromachines (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Adornments (AREA)
- Press-Shaping Or Shaping Using Conveyers (AREA)
- Molds, Cores, And Manufacturing Methods Thereof (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Abstract
2.1 LOS CUERPOS DE MICROESTRUCTURA SON CONFORMADOS POR MEDIO DE UNA APLICACION DE MOLDE ELABORABLE POR EJEMPLO SEGUN EL PROCEDIMIENTO LIGA. EL PROCEDIMIENTO ES COSTOSO EN MUCHOS CASOS, LOS MOLDES DE ESTRUCTURA QUE SE OBTIENEN SON LIMITADOS. MEDIANTE LA ELECCION DEL MATERIAL ES UN COMPROMISO A TENER EN CUENTA ENTRE LAS EXIGENCIAS EN EL PROCESO DE FABRICACION Y LAS EXIGENCIAS MEDIANTE LA APLICACION DEL CUERPO DE MICROESTRUCTURA. 2.2 LA APLICACION DE MOLDE DE MICROESTRUCTURA SE ELABORA A PARTIR DE UN CUERPO SOLIDO (METAL, CERAMICA, VIDRIO, PIEDRA O MATERIAL MONOCRISTALINO) A TRAVES DE MECANIZACION DE PRECISION DE MAQUINA DE AJUSTE FIJO, EFECTUANDOSE ESTRUCTURACION ADITIVA O SUBTRACTIVA. LA APLICACION DE MOLDE SE RELLENA CON UN MATERIAL CON CAPACIDAD DE FLUIR Y SE RECUBRE EL MATERIAL SOLIDIFICADO PREVIAMENTE QUE ES SEPARADO A PARTIR DE LA APLICACION DE MOLDE, CON LO CUAL SE OBTIENE EL CUERPO DE MICROESTRUCTURA. PARA LA ELABORACION DE LA APLICACION DE MOLDE SE ELIGE UN MATERIAL, QUE EN BASE A SUS PROPIEDADES PARA ESTE PROCEDIMIENTO DE ESTRUCTURACION DEBE SER LO MAS ADECUADO POSIBLE. PARA EL CUERPO DE MICROESTRUCTURA SE ELIGEN MATERIALES QUE CUMPLEN DE FORMA OPTIMA CON ESTAS EXIGENCIAS AJUSTADAS. 2.3 ELABORACION DE CUERPOS DE MICROESTRUCTURA CON PROPIEDADES DE MATERIALES OPTIMAS Y EN UNA MULTIPLICIDAD DE FORMA AMPLIADA.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4307869A DE4307869C2 (de) | 1993-03-12 | 1993-03-12 | Mikrostrukturkörper und Verfahren zu deren Herstellung |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2146237T3 true ES2146237T3 (es) | 2000-08-01 |
Family
ID=6482617
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES94102351T Expired - Lifetime ES2146237T3 (es) | 1993-03-12 | 1994-02-17 | Cuerpos microestructurados y procedimiento para su fabricacion. |
Country Status (6)
Country | Link |
---|---|
US (2) | US5501784A (es) |
EP (1) | EP0620092B1 (es) |
JP (1) | JPH06320550A (es) |
KR (1) | KR100313048B1 (es) |
DE (2) | DE4307869C2 (es) |
ES (1) | ES2146237T3 (es) |
Families Citing this family (64)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5804314A (en) * | 1994-03-22 | 1998-09-08 | Hewlett-Packard Company | Silicon microstructures and process for their fabrication |
JP3016348B2 (ja) * | 1995-03-23 | 2000-03-06 | 株式会社ニッショー | 複室容器 |
US5944974A (en) * | 1995-07-01 | 1999-08-31 | Fahrenberg; Jens | Process for manufacturing mold inserts |
DE19608824A1 (de) * | 1996-03-07 | 1997-09-18 | Inst Mikrotechnik Mainz Gmbh | Verfahren zur Herstellung von Mikrowärmetauschern |
JP3269827B2 (ja) * | 1997-04-04 | 2002-04-02 | ユニバーシティ・オブ・サザン・カリフォルニア | 電気化学製造のための物品、方法、および装置 |
US6214192B1 (en) * | 1998-12-10 | 2001-04-10 | Eastman Kodak Company | Fabricating ink jet nozzle plate |
DE19858531C1 (de) * | 1998-12-18 | 2000-03-23 | Inst Mikrotechnik Mainz Gmbh | Verfahren zur Herstellung eines hochpräzisen keramischen oder/und metallischen Bauteils sowie danach hergestelltes Bauteil |
US6835184B1 (en) | 1999-09-24 | 2004-12-28 | Becton, Dickinson And Company | Method and device for abrading skin |
US6331266B1 (en) * | 1999-09-29 | 2001-12-18 | Becton Dickinson And Company | Process of making a molded device |
US6251248B1 (en) * | 1999-10-15 | 2001-06-26 | Ching-Bin Lin | Microfabrication process for making microstructures having high aspect ratio |
US6221227B1 (en) * | 1999-11-02 | 2001-04-24 | Ching-Bin Lin | Microfabrication process for making microstructures as geometrically miniaturized from three-dimensional orientations |
US6595947B1 (en) | 2000-05-22 | 2003-07-22 | Becton, Dickinson And Company | Topical delivery of vaccines |
US6491481B1 (en) * | 2000-10-31 | 2002-12-10 | Eastman Kodak Company | Method of making a precision microlens mold and a microlens mold |
US6476971B1 (en) * | 2000-10-31 | 2002-11-05 | Eastman Kodak Company | Method of manufacturing a microlens array mold and a microlens array |
JP4125889B2 (ja) * | 2000-12-04 | 2008-07-30 | 日本板硝子株式会社 | 光学素子、成形型及びそれらの製造方法 |
DE10064093C1 (de) * | 2000-12-21 | 2002-05-29 | Alfred Friedrich Mayr | Oberflächenstrukturierung für Gegenstände |
AUPR245501A0 (en) * | 2001-01-10 | 2001-02-01 | Silverbrook Research Pty Ltd | An apparatus (WSM08) |
AUPR244901A0 (en) * | 2001-01-10 | 2001-02-01 | Silverbrook Research Pty Ltd | A method (WSM02) |
FR2816525A1 (fr) * | 2001-02-26 | 2002-05-17 | Commissariat Energie Atomique | Dispositif dispensateur de fluide et procede de realisation d'un tel dispositif |
US7416961B2 (en) | 2001-03-14 | 2008-08-26 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method for structuring a flat substrate consisting of a glass-type material |
DE10118529C1 (de) * | 2001-03-14 | 2002-10-17 | Fraunhofer Ges Forschung | Verfahren zur Strukturierung eines aus glasartigem Material bestehenden Flächensubstrats |
DE10241390B3 (de) * | 2001-04-14 | 2004-04-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Strukturierung eines aus glasartigem Material bestehenden Flächensubstrats, glasartiges Flächensubstrat und Verwendung des glasartigen Flächensubstrats |
WO2002100476A2 (en) * | 2001-06-08 | 2002-12-19 | Becton, Dickinson And Company | Device for manipulating a needle or abrader array |
ES2319625T3 (es) * | 2001-10-29 | 2009-05-11 | Becton, Dickinson And Company | Dispositivo para la administracion de una sustancia. |
US20040120964A1 (en) * | 2001-10-29 | 2004-06-24 | Mikszta John A. | Needleless vaccination using chimeric yellow fever vaccine-vectored vaccines against heterologous flaviviruses |
US9614266B2 (en) | 2001-12-03 | 2017-04-04 | Microfabrica Inc. | Miniature RF and microwave components and methods for fabricating such components |
US20050023145A1 (en) * | 2003-05-07 | 2005-02-03 | Microfabrica Inc. | Methods and apparatus for forming multi-layer structures using adhered masks |
WO2003049514A2 (en) | 2001-12-03 | 2003-06-12 | Memgen Corporation | Miniature rf and microwave components and methods for fabricating such components |
CN1329285C (zh) * | 2002-04-15 | 2007-08-01 | 肖特股份公司 | 用于制造一种具有构造表面的产品的方法 |
US6644537B1 (en) * | 2002-05-01 | 2003-11-11 | Taiwan Green Point Enterprise Co., Ltd. | Manufacturing method for bonded electroforming metallic mold |
EP1576207A2 (en) * | 2002-05-07 | 2005-09-21 | Microfabrica Inc. | Methods of and apparatus for molding structures |
US6899838B2 (en) * | 2002-07-12 | 2005-05-31 | Becton, Dickinson And Company | Method of forming a mold and molding a micro-device |
KR100476317B1 (ko) * | 2002-10-24 | 2005-03-16 | 한국전자통신연구원 | 광결합 소자 및 그 제작 방법, 광결합 소자 제작을 위한마스터 및 그 제작 방법 |
US10416192B2 (en) | 2003-02-04 | 2019-09-17 | Microfabrica Inc. | Cantilever microprobes for contacting electronic components |
US8613846B2 (en) * | 2003-02-04 | 2013-12-24 | Microfabrica Inc. | Multi-layer, multi-material fabrication methods for producing micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties |
DE10314373A1 (de) * | 2003-03-28 | 2004-10-07 | Rwth Aachen | Urfomverfahren für ein Bauteil mit Mikrostruktur-Funktionselement |
US9671429B2 (en) | 2003-05-07 | 2017-06-06 | University Of Southern California | Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties |
US10297421B1 (en) | 2003-05-07 | 2019-05-21 | Microfabrica Inc. | Plasma etching of dielectric sacrificial material from reentrant multi-layer metal structures |
US7040016B2 (en) * | 2003-10-22 | 2006-05-09 | Hewlett-Packard Development Company, L.P. | Method of fabricating a mandrel for electroformation of an orifice plate |
DE10353060A1 (de) * | 2003-11-13 | 2005-06-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur freiformenden Herstellung von dreidimensionalen Hohlräumen oder Hinterschneidungen aufweisenden Mikrobauteilen |
DE10359102A1 (de) * | 2003-12-17 | 2005-07-21 | Carl Zeiss Smt Ag | Optische Komponente umfassend ein Material mit einer vorbestimmten Homogenität der thermischen Längsausdehnung |
US9040090B2 (en) | 2003-12-19 | 2015-05-26 | The University Of North Carolina At Chapel Hill | Isolated and fixed micro and nano structures and methods thereof |
EP3242318A1 (en) | 2003-12-19 | 2017-11-08 | The University of North Carolina at Chapel Hill | Monodisperse micro-structure or nano-structure product |
US10641792B2 (en) | 2003-12-31 | 2020-05-05 | University Of Southern California | Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties |
WO2005079986A1 (en) | 2004-02-18 | 2005-09-01 | Applera Corporation | Multi-step bioassays on modular microfluidic application platforms |
JP2005347675A (ja) * | 2004-06-07 | 2005-12-15 | Fujitsu Ltd | 微小な構造を有する素子の製造方法 |
TWI287479B (en) * | 2004-12-24 | 2007-10-01 | Foxconn Tech Co Ltd | Method for producing vapor chamber |
JP2006205332A (ja) * | 2005-01-31 | 2006-08-10 | Towa Corp | 微細構造体、その製造方法、その製造に使用されるマスター型、及び発光機構 |
KR101222946B1 (ko) * | 2005-06-24 | 2013-01-17 | 엘지디스플레이 주식회사 | 백 프레인이 부착된 소프트 몰드의 제조방법 |
WO2008013952A2 (en) | 2006-07-27 | 2008-01-31 | The University Of North Carolina At Chapel Hill | Nanoparticle fabrication methods, systems, and materials for fabricating artificial red blood cells |
DE102006043774A1 (de) * | 2006-09-14 | 2008-03-27 | Fachhochschule Jena | Verfahren zur Herstellung eines Formeinsatzes für Werkzeuge zur Produktion von Formteilen aus Kunststoff |
US20090004840A1 (en) * | 2007-06-27 | 2009-01-01 | Farinelli Matthew J | Method of Creating Molds of Variable Solder Volumes for Flip Attach |
CN101691052B (zh) * | 2009-09-01 | 2012-07-18 | 深圳和而泰智能控制股份有限公司 | 灌胶脱模装置及灌胶脱模的制作方法 |
KR101132679B1 (ko) * | 2010-03-16 | 2012-04-03 | 한국지질자원연구원 | 첨가제를 이용한 미세구조 패턴이 형상 제어된 탄산칼슘 박막의 제조방법 |
TWI404615B (zh) * | 2010-04-01 | 2013-08-11 | A method of manufacturing an in-mold formed film having a metal surface | |
FR2960339B1 (fr) * | 2010-05-18 | 2012-05-18 | Commissariat Energie Atomique | Procede de realisation d'elements a puce munis de rainures d'insertion de fils |
EP2588287A4 (en) * | 2010-07-01 | 2018-01-17 | Inmold Biosystems A/S | Method and apparatus for producing a nanostructured or smooth polymer article |
JP5631160B2 (ja) * | 2010-11-09 | 2014-11-26 | 株式会社東京精密 | ワークのダイシング装置及びワークのダイシング方法 |
US20140023430A1 (en) * | 2012-07-19 | 2014-01-23 | Apple Inc. | Attachment Techniques |
US20150069667A1 (en) * | 2013-09-12 | 2015-03-12 | Yi Li | Nano-parts fabrication method |
WO2017094021A1 (en) * | 2015-12-04 | 2017-06-08 | Indian Institute Of Technology Bombay | Controlled spontaneous three dimensional fabrication of micro/meso structures |
US11262383B1 (en) | 2018-09-26 | 2022-03-01 | Microfabrica Inc. | Probes having improved mechanical and/or electrical properties for making contact between electronic circuit elements and methods for making |
US12078657B2 (en) | 2019-12-31 | 2024-09-03 | Microfabrica Inc. | Compliant pin probes with extension springs, methods for making, and methods for using |
CN111809217B (zh) * | 2020-07-10 | 2023-03-31 | 长春理工大学 | 电化学沉积与金刚石切削增减材制造装置及方法 |
Family Cites Families (16)
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---|---|---|---|---|
DE4142001A1 (de) * | 1991-12-19 | 1993-06-24 | Microparts Gmbh | Verfahren zum herstellen gestufter formeinsaetze, gestufte formeinsaetze und damit abgeformte mikrostrukturkoerper |
US3993515A (en) * | 1975-03-31 | 1976-11-23 | Rca Corporation | Method of forming raised electrical contacts on a semiconductor device |
DE3335171A1 (de) * | 1983-09-28 | 1985-04-04 | Siemens AG, 1000 Berlin und 8000 München | Doppelentformungsverfahren zur herstellung von trennduesenstrukturen |
DE3518829A1 (de) * | 1985-05-24 | 1986-11-27 | Heliotronic Forschungs- und Entwicklungsgesellschaft für Solarzellen-Grundstoffe mbH, 8263 Burghausen | Verfahren zur herstellung von formkoerpern aus siliciumgranulat fuer die erzeugung von siliciumschmelzen |
DE3537483C1 (de) * | 1985-10-22 | 1986-12-04 | Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe | Verfahren zum Herstellen einer Vielzahl plattenfoermiger Mikrostrukturkoerper aus Metall |
JPS63307909A (ja) * | 1987-05-29 | 1988-12-15 | Omron Tateisi Electronics Co | 樹脂円板の製造方法 |
US4793953A (en) * | 1987-10-16 | 1988-12-27 | Galic/Maus Ventures | Mold for optical thermoplastic high-pressure molding |
DE3842610C1 (es) * | 1988-12-17 | 1990-06-21 | Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe, De | |
JPH0445205A (ja) * | 1990-06-12 | 1992-02-14 | Kobe Steel Ltd | 粉末成形体の製造方法 |
US5358909A (en) * | 1991-02-27 | 1994-10-25 | Nippon Steel Corporation | Method of manufacturing field-emitter |
DE4107851A1 (de) * | 1991-03-12 | 1992-09-17 | Basf Ag | Verfahren zur herstellung von mikroformkoerpern mit hohem aspektverhaeltnis |
DE4126877C1 (en) * | 1991-08-14 | 1992-11-26 | Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe, De | Plastic microstructure prodn. for high temp. resistance - by forming poly:methyl methacrylate] mould unit, filling with plastic resin and dissolving in solvent, for high accuracy moulds |
US5702810A (en) * | 1992-03-10 | 1997-12-30 | Mitsubishi Chemical Corporation | Cushioning composite molded article and a process for production thereof |
US5244143A (en) * | 1992-04-16 | 1993-09-14 | International Business Machines Corporation | Apparatus and method for injection molding solder and applications thereof |
CA2076578A1 (en) * | 1992-08-21 | 1994-02-22 | Miroslav Milinkovic | Mandrel for use in nickel vapour deposition processes and nickel molds made therefrom |
US5348616A (en) * | 1993-05-03 | 1994-09-20 | Motorola, Inc. | Method for patterning a mold |
-
1993
- 1993-03-12 DE DE4307869A patent/DE4307869C2/de not_active Expired - Fee Related
-
1994
- 1994-02-17 EP EP94102351A patent/EP0620092B1/de not_active Revoked
- 1994-02-17 DE DE59409280T patent/DE59409280D1/de not_active Revoked
- 1994-02-17 ES ES94102351T patent/ES2146237T3/es not_active Expired - Lifetime
- 1994-03-10 US US08/208,296 patent/US5501784A/en not_active Expired - Fee Related
- 1994-03-11 JP JP6040834A patent/JPH06320550A/ja active Pending
- 1994-03-11 KR KR1019940004764A patent/KR100313048B1/ko not_active IP Right Cessation
-
1995
- 1995-12-21 US US08/576,367 patent/US6660151B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE4307869C2 (de) | 1996-04-04 |
JPH06320550A (ja) | 1994-11-22 |
DE4307869A1 (de) | 1994-09-15 |
US6660151B1 (en) | 2003-12-09 |
DE59409280D1 (de) | 2000-05-18 |
EP0620092A1 (de) | 1994-10-19 |
US5501784A (en) | 1996-03-26 |
EP0620092B1 (de) | 2000-04-12 |
KR100313048B1 (ko) | 2002-02-19 |
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