ES2115785T3 - Sistema de fijacion de abrasivos para aplicaciones de abrasion rotatorias. - Google Patents

Sistema de fijacion de abrasivos para aplicaciones de abrasion rotatorias.

Info

Publication number
ES2115785T3
ES2115785T3 ES94100579T ES94100579T ES2115785T3 ES 2115785 T3 ES2115785 T3 ES 2115785T3 ES 94100579 T ES94100579 T ES 94100579T ES 94100579 T ES94100579 T ES 94100579T ES 2115785 T3 ES2115785 T3 ES 2115785T3
Authority
ES
Spain
Prior art keywords
fixing system
rotary abrasion
abrasive fixing
micro
abrasion applications
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES94100579T
Other languages
English (en)
Inventor
Robert J Jantschek
Mark L Sterner
Forrest J Rouser
Theodore J Testen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Application granted granted Critical
Publication of ES2115785T3 publication Critical patent/ES2115785T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/085—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass for watch glasses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/36—Single-purpose machines or devices
    • B24B5/42—Single-purpose machines or devices for grinding crankshafts or crankpins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D9/00—Wheels or drums supporting in exchangeable arrangement a layer of flexible abrasive material, e.g. sandpaper
    • B24D9/08—Circular back-plates for carrying flexible material
    • B24D9/085—Devices for mounting sheets on a backing plate

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

LA PRESENTE INVENCION SE REFIERE A UN METODO Y APARATO PARA ABRADIR (DESGASTAR FROTANDO) UNA PIEZA A MAQUINA. EL APARATO COMPRENDE UNA CINTA (22) ABRASIVA, QUE TIENE UNA SUPERFICIE MICROESTRUCTURADA SOBRE LA CARA POSTERIOR DE LA MISMA, Y UNA ZAPATA (14) DE SOPORTE, QUE TIENE UNA SUPERFICIE MICROESTRUCTURADA SOBRE UNA CARA (18) A PRESION EXPUESTA. LAS DOS SUPERFICIES MICROESTRUCTURADAS SE ENGRANAN Y RESISTEN EL DESPLAZAMIENTO DE LA CINTA ABRASIVA CON RESPECTO A LA CARA DE PRESION, A MEDIDA QUE LA PIEZA A MAQUINA SE DESGASTA FROTANDO ROTATIVAMENTE.
ES94100579T 1993-01-28 1994-01-17 Sistema de fijacion de abrasivos para aplicaciones de abrasion rotatorias. Expired - Lifetime ES2115785T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1068093A 1993-01-28 1993-01-28

Publications (1)

Publication Number Publication Date
ES2115785T3 true ES2115785T3 (es) 1998-07-01

Family

ID=21746896

Family Applications (1)

Application Number Title Priority Date Filing Date
ES94100579T Expired - Lifetime ES2115785T3 (es) 1993-01-28 1994-01-17 Sistema de fijacion de abrasivos para aplicaciones de abrasion rotatorias.

Country Status (10)

Country Link
US (2) US5490808A (es)
EP (1) EP0608743B1 (es)
JP (1) JPH06278002A (es)
KR (1) KR100290187B1 (es)
AT (1) ATE166275T1 (es)
AU (1) AU671328B2 (es)
BR (1) BR9400326A (es)
CA (1) CA2113318A1 (es)
DE (1) DE69410300T2 (es)
ES (1) ES2115785T3 (es)

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US5634245A (en) * 1995-07-14 1997-06-03 Minnesota Mining And Manufacturing Company Structured surface fastener
US5958794A (en) * 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
US5695391A (en) * 1995-12-28 1997-12-09 Supfina Grieshaber Gmbh & Co. Super finishing machine
US5725421A (en) * 1996-02-27 1998-03-10 Minnesota Mining And Manufacturing Company Apparatus for rotative abrading applications
US6194317B1 (en) 1998-04-30 2001-02-27 3M Innovative Properties Company Method of planarizing the upper surface of a semiconductor wafer
US8092707B2 (en) 1997-04-30 2012-01-10 3M Innovative Properties Company Compositions and methods for modifying a surface suited for semiconductor fabrication
IT1294167B1 (it) * 1997-08-08 1999-03-22 Scm Group Autec Division Spa Macchina levigatrice di pannelli con cambio automatico e rigenerazione del nastro abrasivo utensile.
HU219837B (hu) * 1997-10-29 2001-08-28 József Mandzsú Gyorskapcsolóelemmel rendelkező, megmunkáló felülettel ellátott csiszolólap és gyorskapcsoló elemrészekből álló gyorskapcsolórendszer
US6244935B1 (en) 1999-02-04 2001-06-12 Applied Materials, Inc. Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet
US6241583B1 (en) 1999-02-04 2001-06-05 Applied Materials, Inc. Chemical mechanical polishing with a plurality of polishing sheets
US6475070B1 (en) * 1999-02-04 2002-11-05 Applied Materials, Inc. Chemical mechanical polishing with a moving polishing sheet
US6491570B1 (en) 1999-02-25 2002-12-10 Applied Materials, Inc. Polishing media stabilizer
US6135859A (en) * 1999-04-30 2000-10-24 Applied Materials, Inc. Chemical mechanical polishing with a polishing sheet and a support sheet
US6626744B1 (en) 1999-12-17 2003-09-30 Applied Materials, Inc. Planarization system with multiple polishing pads
US6419559B1 (en) 2000-07-10 2002-07-16 Applied Materials, Inc. Using a purge gas in a chemical mechanical polishing apparatus with an incrementally advanceable polishing sheet
US6520841B2 (en) 2000-07-10 2003-02-18 Applied Materials, Inc. Apparatus and methods for chemical mechanical polishing with an incrementally advanceable polishing sheet
US6561884B1 (en) * 2000-08-29 2003-05-13 Applied Materials, Inc. Web lift system for chemical mechanical planarization
US6592439B1 (en) 2000-11-10 2003-07-15 Applied Materials, Inc. Platen for retaining polishing material
US6612917B2 (en) * 2001-02-07 2003-09-02 3M Innovative Properties Company Abrasive article suitable for modifying a semiconductor wafer
US6516926B2 (en) 2001-03-16 2003-02-11 Delphi Technologies, Inc. Piston rod surface finish requirement for MR dampening devices
US6503131B1 (en) 2001-08-16 2003-01-07 Applied Materials, Inc. Integrated platen assembly for a chemical mechanical planarization system
US6687962B2 (en) 2002-01-16 2004-02-10 Velcro Industries B.V. Fastener element patterning
BRPI0510534A (pt) * 2004-05-03 2007-10-30 3M Innovative Properties Co sapata para suportar uma fita abrasiva que tem uma face abrasiva e uma face traseira oposta, aparelho para promover a abrasão de uma superfìcie periférica externa de uma parede de empuxo, e, método para promover a abrasão de uma face de uma peça de trabalho
US8070933B2 (en) * 2005-05-06 2011-12-06 Thielenhaus Microfinishing Corp. Electrolytic microfinishing of metallic workpieces
US7115023B1 (en) * 2005-06-29 2006-10-03 Lam Research Corporation Process tape for cleaning or processing the edge of a semiconductor wafer
US7169028B1 (en) * 2005-11-02 2007-01-30 Barton Ii Kenneth A Flexible finishing shoe
JP4973048B2 (ja) * 2006-06-27 2012-07-11 株式会社不二越 テープラップ装置
JP5519943B2 (ja) * 2009-03-03 2014-06-11 富士紡ホールディングス株式会社 研磨テープ
JP2014508650A (ja) * 2011-01-26 2014-04-10 スリーエム イノベイティブ プロパティズ カンパニー 複製されたミクロ構造を有する裏材を備える研磨物品、及びこれを使用する方法
DE202014102403U1 (de) * 2014-05-22 2014-06-06 Thielenhaus Technologies Gmbh Andrückeinrichtung mit einem Zahnriemen
EP3224000B1 (en) 2014-11-26 2020-11-04 3M Innovative Properties Company Abrasive articles, assemblies, and methods with gripping material
US10086500B2 (en) 2014-12-18 2018-10-02 Applied Materials, Inc. Method of manufacturing a UV curable CMP polishing pad
US20210046613A1 (en) * 2018-03-14 2021-02-18 Mirka Ltd A method and an apparatus for abrading, and products and uses for such
CN108838772A (zh) * 2018-05-29 2018-11-20 宁波市鄞州大兴非标设备制造厂 轴类工件端面磨床及其加工方法
WO2022034397A1 (en) * 2020-08-10 2022-02-17 3M Innovative Properties Company Abrasive system and method of using the same

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Also Published As

Publication number Publication date
ATE166275T1 (de) 1998-06-15
EP0608743A1 (en) 1994-08-03
EP0608743B1 (en) 1998-05-20
AU671328B2 (en) 1996-08-22
JPH06278002A (ja) 1994-10-04
CA2113318A1 (en) 1994-07-29
US5618225A (en) 1997-04-08
KR100290187B1 (ko) 2001-05-15
KR940018162A (ko) 1994-08-16
AU5471194A (en) 1994-08-04
US5490808A (en) 1996-02-13
DE69410300T2 (de) 1998-11-26
DE69410300D1 (de) 1998-06-25
BR9400326A (pt) 1994-08-16

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