ES2083248T3 - Metodo y aparato para realizar tratamientos de superficie. - Google Patents

Metodo y aparato para realizar tratamientos de superficie.

Info

Publication number
ES2083248T3
ES2083248T3 ES93301575T ES93301575T ES2083248T3 ES 2083248 T3 ES2083248 T3 ES 2083248T3 ES 93301575 T ES93301575 T ES 93301575T ES 93301575 T ES93301575 T ES 93301575T ES 2083248 T3 ES2083248 T3 ES 2083248T3
Authority
ES
Spain
Prior art keywords
surface treatments
performing surface
current
workpiece
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES93301575T
Other languages
English (en)
Inventor
Moisei Esterlis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
El-Plasma Ltd
Original Assignee
El-Plasma Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IL10113192A external-priority patent/IL101131A/en
Priority claimed from IL10161092A external-priority patent/IL101610A/en
Application filed by El-Plasma Ltd filed Critical El-Plasma Ltd
Application granted granted Critical
Publication of ES2083248T3 publication Critical patent/ES2083248T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00Heating by electric discharge
    • H05B7/18Heating by arc discharge
    • H05B7/20Direct heating by arc discharge, i.e. where at least one end of the arc directly acts on the material to be heated, including additional resistance heating by arc current flowing through the material to be heated
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/06Surface hardening
    • C21D1/09Surface hardening by direct application of electrical or wave energy; by particle radiation
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34Methods of heating
    • C21D1/38Heating by cathodic discharges
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055Arc discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/32532Electrodes
    • H01J37/32614Consumable cathodes for arc discharge
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/08Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for tubular bodies or pipes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Outer Garments And Coats (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

UN METODO Y UN APARATO PARA EL TRATAMIENTO DE LA SUPERFICIE DE UNA PIEZA DE TRABAJO QUE CONSISTE EN GENERAR ENTRE UNA PORCION PRINCIPAL EXPUESTA DE UN ANODO Y LAS AREAS LIMITADAS SUCESIVAS DE UNA PRIMERA SUPERFICIE DE LA PIEZA DE TRABAJO QUE ACTUA COMO CATODO, UNA DESCARGA EN ARCO EN EL VACIO QUE TENGA UNA CORRIENTE DE ARCO QUE NO SEA SUSTANCIALMENTE MENOR DE 50 AMP Y QUE TENGA UN GRADIENTE DE CORRIENTE EN FUNCION DE LA TENSION POSITIVO.
ES93301575T 1992-03-03 1993-03-02 Metodo y aparato para realizar tratamientos de superficie. Expired - Lifetime ES2083248T3 (es)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
IL10113192A IL101131A (en) 1992-03-03 1992-03-03 Method and apparatus for carrying out surface processes
IL10161092A IL101610A (en) 1992-04-16 1992-04-16 Method and apparatus for carrying out surface processes
BR9303638A BR9303638A (pt) 1992-03-03 1993-08-31 Disposicao construtiva introduzida em capotas para veiculos utilitarios
CA002105423A CA2105423A1 (en) 1992-03-03 1993-09-02 Method and apparatus for carrying out surface processes
AU46077/93A AU677214B2 (en) 1992-03-03 1993-09-03 Method and apparatus for carrying out surface processes

Publications (1)

Publication Number Publication Date
ES2083248T3 true ES2083248T3 (es) 1996-04-01

Family

ID=27506933

Family Applications (1)

Application Number Title Priority Date Filing Date
ES93301575T Expired - Lifetime ES2083248T3 (es) 1992-03-03 1993-03-02 Metodo y aparato para realizar tratamientos de superficie.

Country Status (9)

Country Link
US (2) US5393575A (es)
EP (1) EP0560526B1 (es)
JP (1) JPH07268660A (es)
AT (1) ATE129937T1 (es)
AU (1) AU677214B2 (es)
BR (1) BR9303638A (es)
CA (1) CA2105423A1 (es)
DE (1) DE69300749T2 (es)
ES (1) ES2083248T3 (es)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2123479C (en) * 1993-07-01 1999-07-06 Peter A. Sieck Anode structure for magnetron sputtering systems
DE19502133A1 (de) * 1995-01-25 1996-08-01 Tiller Hans Juergen Verfahren zur Sterilisation von metallischen medizinischen Instrumenten
DE19503718A1 (de) * 1995-02-04 1996-08-08 Leybold Ag UV-Strahler
IL119634A (en) * 1996-11-18 2000-12-06 Omerco Ltd Method and apparatus for the treatment of surfaces of large metal objects
BE1010913A3 (fr) * 1997-02-11 1999-03-02 Cockerill Rech & Dev Procede de recuit d'un substrat metallique au defile.
RU2145645C1 (ru) * 1999-02-16 2000-02-20 Центральный научно-исследовательский институт технологии судостроения Способ электродуговой обработки поверхности металлических изделий и установка для его реализации
WO2004103035A1 (ja) * 2003-05-14 2004-11-25 Sekisui Chemical Co., Ltd. プラズマ処理装置およびその製造方法
RU2279938C2 (ru) * 2004-09-06 2006-07-20 Елена Евгеньевна Никитина Способ транспортировки длинномерных объектов через вакуумную камеру и устройство для его осуществления
DE102006062375B4 (de) * 2006-12-19 2017-05-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anordnung und Verfahren zur Entfernung von Verunreinigungen oder Modifizierung von Oberflächen von Substraten mittels elektrischer Bogenentladung
SG2014013692A (en) * 2011-08-26 2014-05-29 Consarc Corp Purification of a metalloid by consumable electrode vacuum arc remelt process
US10123543B2 (en) 2012-03-14 2018-11-13 The Middleby Corporation Bypass circuit and wipe technique for contactor used to operate solid state relays that control heating elements
CN106164776B (zh) 2014-04-09 2019-04-23 Asml荷兰有限公司 用于清洁对象的装置
BR202015010013Y1 (pt) * 2015-05-04 2020-06-23 Ademilson Dos Reis De Mendonça Disposição construtiva aplicada em dispositivo de acionamento manual de capota marítima aplicada em veículos automotores

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4609564C2 (en) * 1981-02-24 2001-10-09 Masco Vt Inc Method of and apparatus for the coating of a substrate with material electrically transformed into a vapor phase
US4536640A (en) * 1981-07-14 1985-08-20 The Standard Oil Company (Ohio) High pressure, non-logical thermal equilibrium arc plasma generating apparatus for deposition of coatings upon substrates
AT376460B (de) * 1982-09-17 1984-11-26 Kljuchko Gennady V Plasmalichtbogeneinrichtung zum auftragen von ueberzuegen
US4620913A (en) * 1985-11-15 1986-11-04 Multi-Arc Vacuum Systems, Inc. Electric arc vapor deposition method and apparatus
DE3781551T2 (de) * 1987-06-29 1993-04-08 Hauzer Holding Verfahren und vorrichtung zur beschichtung von aushoehlungen von gegenstaenden.
AT387989B (de) * 1987-09-01 1989-04-10 Miba Gleitlager Ag Vorrichtung zur behandlung von als kathode geschalteten innenflaechen von gegenstaenden durch ionenbeschuss aus einer gasentladung
BE1001027A3 (nl) * 1987-10-21 1989-06-13 Bekaert Sa Nv Werkwijze en inrichting voor het reinigen van een langwerpig metalen substraat, zoals een draad, een band, een koord, enz., alsmede volgens die werkwijze gereinigde substraten en met dergelijke substraten versterkte voorwerpen uit polymeermateriaal.
DE59004614D1 (de) * 1989-06-27 1994-03-24 Hauzer Holding Verfahren und vorrichtung zur beschichtung von substraten.
DE69020553T2 (de) * 1990-07-24 1995-12-21 Inst Elektroniki Im U A Arifov Elektrische Lichtbogenbehandlung von Teilchen.
US5037522B1 (en) * 1990-07-24 1996-07-02 Vergason Technology Inc Electric arc vapor deposition device
JPH0772338B2 (ja) * 1990-12-25 1995-08-02 株式会社神戸製鋼所 真空アーク蒸着装置
US5269898A (en) * 1991-03-20 1993-12-14 Vapor Technologies, Inc. Apparatus and method for coating a substrate using vacuum arc evaporation

Also Published As

Publication number Publication date
AU677214B2 (en) 1997-04-17
US5496459A (en) 1996-03-05
AU4607793A (en) 1995-03-30
JPH07268660A (ja) 1995-10-17
EP0560526A1 (en) 1993-09-15
EP0560526B1 (en) 1995-11-08
BR9303638A (pt) 1994-04-05
ATE129937T1 (de) 1995-11-15
US5393575A (en) 1995-02-28
DE69300749D1 (de) 1995-12-14
CA2105423A1 (en) 1995-03-03
DE69300749T2 (de) 1996-06-13

Similar Documents

Publication Publication Date Title
ES2083248T3 (es) Metodo y aparato para realizar tratamientos de superficie.
AU622385B2 (en) Electrode for plasma arc torch and method for fabricating same
CA2052543A1 (en) Ion implantation and surface processing method and apparatus
GB9906886D0 (en) Method and apparatus for prolonging the life of an X-ray target
MY115990A (en) Surface treatment method and system
GB2224597B (en) Voltage supplying method in multistep focusing type electron gun
AU8678391A (en) Method and apparatus for applying surface treatment to metal foil
GB9807280D0 (en) Method of providing conductive tracks on a printed circuit and apparatus for use in carrying out the method
CA2129403A1 (en) Ion Implanting Apparatus and Ion Implanting Method
EP0856349A3 (en) Apparatus for processing gas by electron beam
TW242591B (en) Method and apparatus for carrying out surface processes
GB9402378D0 (en) Method for improving spectrum quality of low power pulsed anode magnetrons
DE60033314D1 (de) Plattierungsverfahren, -vorrichtung und -system
DK462383A (da) Fremgangsmaade til elektroplettering
KR960014043A (ko) 유리판 표면의 코팅을 제거하는 방법 및 장치
RU93004659A (ru) Способ газоразрядной оболочки металлической поверхности и устройство для его осуществления
IL69244A0 (en) Plasma cathode system and method for generating an electron beam
GB9317256D0 (en) Molecular processes and apparatus therefore
DE59203029D1 (de) Verfahren und Vorrichtung zur Instandsetzung einer Elektrode.
JPS57101700A (en) Treating method for cylinder surface in cylinder block made of al alloy
JPS5648042A (en) X-ray tube
JPS5591125A (en) Pattern formation method and apparatus using charged particle beam
RU96117552A (ru) Способ катодно-вакуумной обработки поверхности металлических деталей
JPS5665975A (en) Surface treatment of metal
EP0138199A3 (en) Method and electron gun for generating an electron beam, particularly of high current density at the surface of its utilisation

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 560526

Country of ref document: ES