ES2079282B1 - Dispositivo interferometrico y metodo para medir y para estabilizar la longitud de onda de diodo laser. - Google Patents
Dispositivo interferometrico y metodo para medir y para estabilizar la longitud de onda de diodo laser.Info
- Publication number
- ES2079282B1 ES2079282B1 ES9302041A ES9302041A ES2079282B1 ES 2079282 B1 ES2079282 B1 ES 2079282B1 ES 9302041 A ES9302041 A ES 9302041A ES 9302041 A ES9302041 A ES 9302041A ES 2079282 B1 ES2079282 B1 ES 2079282B1
- Authority
- ES
- Spain
- Prior art keywords
- measuring
- stabilizing
- wave length
- diode laser
- interferometric device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000000087 stabilizing effect Effects 0.000 title 1
- 230000003287 optical effect Effects 0.000 abstract 3
- 238000006073 displacement reaction Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J9/0246—Measuring optical wavelength
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
- H01S5/0687—Stabilising the frequency of the laser
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
DISPOSITIVO INTERFEROMETRICO Y METODO PARA MEDIR Y PARA ESTABILIZAR LA LONGITUD DE ONDA DE DIODO LASER. EL DISPOSITIVO (1) SE ACOPLA A CUALQUIER SISTEMA OPTICO DONDE SE REQUIERA DISPONER DEL VALOR REAL DE LA LONGITUD DE ONDA, Y COMPRENDE UN ELEMENTO (9) OPTICO UNICO QUE SE INTERPONE DIRECTAMENTE EN EL CAMINO DEL HAZ (11) LASER OBTENIENDO DOS HACES (13, 14) CUYA DIFERENCIA DE CAMINO RECORRIDO ES CONSTANTE PORQUE ESTA LIMITADA AL INTERIOR DEL ELEMENTO (9); LA INTENSIDAD LUMINOSA DEL CAMPO INTERFERENCIAL ES LA UNICA VARIABLE EN EL CALCULO DE LA LONGITUD DE ONDA. SE APLICA EL DISPOSITIVO (1) PREFERENTEMENTE EN INTERFEROMETROS DE MAQUINA HERRAMIENTA QUE MIDEN DESPLAZAMIENTOS LONGITUDINALES.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9302041A ES2079282B1 (es) | 1993-09-13 | 1993-09-13 | Dispositivo interferometrico y metodo para medir y para estabilizar la longitud de onda de diodo laser. |
DE19944429748 DE4429748A1 (de) | 1993-09-13 | 1994-08-22 | Interferometer und Verfahren zum Messen und Stabilisieren der Wellenlänge des von einer Laserdiode emittierten Lichts |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9302041A ES2079282B1 (es) | 1993-09-13 | 1993-09-13 | Dispositivo interferometrico y metodo para medir y para estabilizar la longitud de onda de diodo laser. |
Publications (3)
Publication Number | Publication Date |
---|---|
ES2079282A2 ES2079282A2 (es) | 1996-01-01 |
ES2079282R ES2079282R (es) | 1997-05-16 |
ES2079282B1 true ES2079282B1 (es) | 1997-11-16 |
Family
ID=8283162
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES9302041A Expired - Fee Related ES2079282B1 (es) | 1993-09-13 | 1993-09-13 | Dispositivo interferometrico y metodo para medir y para estabilizar la longitud de onda de diodo laser. |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE4429748A1 (es) |
ES (1) | ES2079282B1 (es) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19645029A1 (de) * | 1996-10-31 | 1998-05-07 | Laserspec Analytik Gmbh | Verfahren zum Betrieb einer Laserstrahlungsquelle |
DE59808542D1 (de) | 1997-03-26 | 2003-07-03 | Infineon Technologies Ag | Lasermodul mit wellenlängenstabilisierung |
GB9715022D0 (en) * | 1997-07-18 | 1997-09-24 | Renishaw Plc | Frequency stabilised laser diode |
EP1315259A1 (en) * | 2001-11-23 | 2003-05-28 | Agilent Technologies, Inc. (a Delaware corporation) | Optical apparatus and method therefor |
EP1554787B8 (en) * | 2002-09-13 | 2007-03-07 | Agilent Technologies, Inc. | Control of laser tuning velocity |
JP5558768B2 (ja) * | 2008-10-24 | 2014-07-23 | キヤノン株式会社 | 測定装置、光源装置、干渉測定装置、露光装置、及びデバイス製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3212809C2 (de) * | 1982-04-06 | 1984-12-20 | Fa. Carl Zeiss, 7920 Heidenheim | Meßeinrichtung für die Stabilisierung von Lasern |
DE3715627A1 (de) * | 1987-05-11 | 1988-12-08 | Hommelwerke Gmbh | Vorrichtung zur messung des abstandes zwischen der vorrichtung und einer messflaeche |
DE3911473A1 (de) * | 1989-04-08 | 1990-10-11 | Kerner Anna | Wellenlaengenstabilisierung |
DE3923885A1 (de) * | 1989-07-19 | 1991-01-24 | Rheinmetall Gmbh | Bombletgeschoss mit stabilisierungsband |
FR2650664B1 (fr) * | 1989-08-01 | 1991-11-15 | Micro Controle | Dispositif de mesure de deplacement par interferometrie |
DE3930273A1 (de) * | 1989-09-11 | 1991-03-14 | Helios Messtechnik | Messinterferometer, das mit dem licht eines lasers versorgt wird, welcher mit laserdioden angeregt ist |
JPH0436622A (ja) * | 1990-06-01 | 1992-02-06 | Mitsui Petrochem Ind Ltd | レーザ光の波長検出方法及び装置 |
JP2914748B2 (ja) * | 1990-10-20 | 1999-07-05 | 富士通株式会社 | 半導体レーザの周波数安定化装置 |
US5127731A (en) * | 1991-02-08 | 1992-07-07 | Hughes Aircraft Company | Stabilized two-color laser diode interferometer |
AT396841B (de) * | 1992-04-02 | 1993-12-27 | Rsf Elektronik Gmbh | Anordnung zur stabilisierung der wellenlänge des von einer laserdiode abgegebenen lichtstrahlesund laser-interferometer |
-
1993
- 1993-09-13 ES ES9302041A patent/ES2079282B1/es not_active Expired - Fee Related
-
1994
- 1994-08-22 DE DE19944429748 patent/DE4429748A1/de not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
ES2079282R (es) | 1997-05-16 |
DE4429748A1 (de) | 1995-03-16 |
ES2079282A2 (es) | 1996-01-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC2A | Transfer granted |
Owner name: FAGOR S.COOP. |
|
EC2A | Search report published |
Date of ref document: 19960101 Kind code of ref document: R Effective date: 19960101 |
|
FD1A | Patent lapsed |
Effective date: 20050914 |