JPS6484105A - Laser interference length measuring machine - Google Patents
Laser interference length measuring machineInfo
- Publication number
- JPS6484105A JPS6484105A JP62243298A JP24329887A JPS6484105A JP S6484105 A JPS6484105 A JP S6484105A JP 62243298 A JP62243298 A JP 62243298A JP 24329887 A JP24329887 A JP 24329887A JP S6484105 A JPS6484105 A JP S6484105A
- Authority
- JP
- Japan
- Prior art keywords
- light
- reflected
- end surface
- interference
- splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Transform (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
PURPOSE:To take a measurement with high accuracy by simple structure and to facilitate optical axis alignment, etc., by providing a beam splitter with a total reflection mirror which reflects totally the reflected light of a half-mirror for incident light. CONSTITUTION:Coherent laser light emitted by a laser device 1 is guided to the beam splitter 6 through a polarization plane maintaining fiber 2. This light is split into two, reflected light BR is reflected totally at right angles by the total reflection mirror 6b formed on the end surface of the splitter 6 to travel to an opposite interference and surface 6c, and the transmitted light BT, on the other hand, is incident on a end surface focus type distributed index lens 11 as a total reflector fitted to an object 10 of distance measurement. Here, the light is reflected and returns to the splitter 6 through the same optical path with the transmitted light BT and the light is reflected here to travel to the interference end surface 6c. Therefore, the reflected light BB and transmitted light BT interfere with each other on the interference end surface 6c to form interference fringes, which are detected by photoelectric detecting means 8a and 8b and a distance calculating means calculates the movement distance of the object body 10 from the detected values.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62243298A JPS6484105A (en) | 1987-09-28 | 1987-09-28 | Laser interference length measuring machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62243298A JPS6484105A (en) | 1987-09-28 | 1987-09-28 | Laser interference length measuring machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6484105A true JPS6484105A (en) | 1989-03-29 |
Family
ID=17101755
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62243298A Pending JPS6484105A (en) | 1987-09-28 | 1987-09-28 | Laser interference length measuring machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6484105A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111006582A (en) * | 2019-12-06 | 2020-04-14 | 中国科学院光电技术研究所 | Interference phase shift sensitivity enhancing method based on moire fringes |
-
1987
- 1987-09-28 JP JP62243298A patent/JPS6484105A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111006582A (en) * | 2019-12-06 | 2020-04-14 | 中国科学院光电技术研究所 | Interference phase shift sensitivity enhancing method based on moire fringes |
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