JPS6484105A - Laser interference length measuring machine - Google Patents

Laser interference length measuring machine

Info

Publication number
JPS6484105A
JPS6484105A JP62243298A JP24329887A JPS6484105A JP S6484105 A JPS6484105 A JP S6484105A JP 62243298 A JP62243298 A JP 62243298A JP 24329887 A JP24329887 A JP 24329887A JP S6484105 A JPS6484105 A JP S6484105A
Authority
JP
Japan
Prior art keywords
light
reflected
end surface
interference
splitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62243298A
Other languages
Japanese (ja)
Inventor
Tomohiko Akuta
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP62243298A priority Critical patent/JPS6484105A/en
Publication of JPS6484105A publication Critical patent/JPS6484105A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To take a measurement with high accuracy by simple structure and to facilitate optical axis alignment, etc., by providing a beam splitter with a total reflection mirror which reflects totally the reflected light of a half-mirror for incident light. CONSTITUTION:Coherent laser light emitted by a laser device 1 is guided to the beam splitter 6 through a polarization plane maintaining fiber 2. This light is split into two, reflected light BR is reflected totally at right angles by the total reflection mirror 6b formed on the end surface of the splitter 6 to travel to an opposite interference and surface 6c, and the transmitted light BT, on the other hand, is incident on a end surface focus type distributed index lens 11 as a total reflector fitted to an object 10 of distance measurement. Here, the light is reflected and returns to the splitter 6 through the same optical path with the transmitted light BT and the light is reflected here to travel to the interference end surface 6c. Therefore, the reflected light BB and transmitted light BT interfere with each other on the interference end surface 6c to form interference fringes, which are detected by photoelectric detecting means 8a and 8b and a distance calculating means calculates the movement distance of the object body 10 from the detected values.
JP62243298A 1987-09-28 1987-09-28 Laser interference length measuring machine Pending JPS6484105A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62243298A JPS6484105A (en) 1987-09-28 1987-09-28 Laser interference length measuring machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62243298A JPS6484105A (en) 1987-09-28 1987-09-28 Laser interference length measuring machine

Publications (1)

Publication Number Publication Date
JPS6484105A true JPS6484105A (en) 1989-03-29

Family

ID=17101755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62243298A Pending JPS6484105A (en) 1987-09-28 1987-09-28 Laser interference length measuring machine

Country Status (1)

Country Link
JP (1) JPS6484105A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111006582A (en) * 2019-12-06 2020-04-14 中国科学院光电技术研究所 Interference phase shift sensitivity enhancing method based on moire fringes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111006582A (en) * 2019-12-06 2020-04-14 中国科学院光电技术研究所 Interference phase shift sensitivity enhancing method based on moire fringes

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