ES2046502T3 - Sensor interferometrico y su utilizacion en un dispositivo interferometrico. - Google Patents
Sensor interferometrico y su utilizacion en un dispositivo interferometrico.Info
- Publication number
- ES2046502T3 ES2046502T3 ES198989401518T ES89401518T ES2046502T3 ES 2046502 T3 ES2046502 T3 ES 2046502T3 ES 198989401518 T ES198989401518 T ES 198989401518T ES 89401518 T ES89401518 T ES 89401518T ES 2046502 T3 ES2046502 T3 ES 2046502T3
- Authority
- ES
- Spain
- Prior art keywords
- faces
- utilising
- optical fibre
- beams
- interferometric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013307 optical fiber Substances 0.000 abstract 3
- 239000011521 glass Substances 0.000 abstract 2
- 238000001228 spectrum Methods 0.000 abstract 2
- 239000012528 membrane Substances 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 230000006798 recombination Effects 0.000 abstract 1
- 238000005215 recombination Methods 0.000 abstract 1
- 230000000717 retained effect Effects 0.000 abstract 1
- 125000006850 spacer group Chemical group 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Pressure Sensors (AREA)
- Optical Transform (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
- Measuring Fluid Pressure (AREA)
- Spectrometry And Color Measurement (AREA)
- Measuring And Recording Apparatus For Diagnosis (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Gyroscopes (AREA)
Abstract
EL PRESENTE INVENTO COCIERNE UN CAPTADOR INTERFEROMETRICO CARACTERIZADO EN QUE COMPORTA DOS INTERFEROMETROS EN PARALELO UTILIZANDO UNOS HACES DE LUZ CONCENTRICOS (A) CENTRAL Y (B) EXTERIOR SALIDOS DE UNA FIBRA OPTICA COLOCADA EN EL FOCO DE UNA LENTE COLIMATRIZ (19), EL PRIMER INTERFEROMETRO UTILIZANDO UN HAZ CENTRAL (A) COMPORTA UNA MEMBRANA DEFORMABLE (115) CUYA DEFORMACION ES SENSIBLE A LA PRESION Y A LA TEMPERATURA QUE HACEN VARIAR SU POSICION EN RELACION A UNA DE LAS CARAS DE UNA PRIMERA LAMINA (13) DE VIDRIO CON CARAS PARALELAS EN FUNCION DE ESTOS DOS PARAMETROS, EL SEGUNDO INTERFEROMETRO UTILIZANDO EL HAZ EXTERIOR (B) EN EL CUAL LA DISTANCIA ENTRE DOS CARAS DE DOS LAMINAS DE VIDRIO CON CARAS PARALELAS (16,17) MANTENIDAS POR UN TIRANTE CILINDRICO (15) VARIA EN FUNCION DE LOS COEFICIENTES DE DILATACION DIFERENTES DE CADA UNA DE ESTAS DOS LAMINAS (16,15), LA LENTE COLIMATRIZ (19) DE LOS DOS HACES DE LUZ EN DIRECCION DE UNA FIBRA OPTICA (113), ESTOS DOS HACES OPTICOS TENIENDO DOS DIFERENCIAS DE MARCHA DIFERENTES CREAN CADA UNO UN ESPECTRO ACANALADO DE LA FUENTE, CADA ESPECTRO SE RECOMBINA SUMANDOSE HACIA LA FIBRA OPTICA (113).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8807389A FR2632404B1 (fr) | 1988-06-03 | 1988-06-03 | Capteur interferometrique et son utilisation dans un dispositif interferometrique |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2046502T3 true ES2046502T3 (es) | 1994-02-01 |
Family
ID=9366898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES198989401518T Expired - Lifetime ES2046502T3 (es) | 1988-06-03 | 1989-06-02 | Sensor interferometrico y su utilizacion en un dispositivo interferometrico. |
Country Status (10)
Country | Link |
---|---|
US (1) | US5032026A (es) |
EP (1) | EP0347277B1 (es) |
JP (1) | JP2716207B2 (es) |
AT (1) | ATE94983T1 (es) |
CA (1) | CA1335418C (es) |
DE (1) | DE68909320T2 (es) |
ES (1) | ES2046502T3 (es) |
FR (1) | FR2632404B1 (es) |
NO (1) | NO307584B1 (es) |
OA (1) | OA09049A (es) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5227859A (en) * | 1990-12-04 | 1993-07-13 | Grumman Aerospace Corporation | Passive coherent radiation detection system |
CA2055790A1 (en) * | 1991-01-04 | 1992-07-05 | Victor Vali | System for accurately detecting changes in temperature and pressure |
FR2673022B1 (fr) * | 1991-02-14 | 1993-06-11 | Bertin & Cie | Recepteur de demultiplexage parallele pour un reseau de capteurs optiques a codage de modulation spectrale. |
US5355423A (en) * | 1992-07-16 | 1994-10-11 | Rosemount Inc. | Optical temperature probe assembly |
US5446279A (en) * | 1993-08-27 | 1995-08-29 | Hughes Aircraft Company | Fiber optic sensor sensing curvature of a diaphragm |
CA2122782C (en) * | 1994-05-03 | 1999-07-27 | Wojtek J. Bock | Apparatus for measuring an ambient physical parameter applied to a highly birefringent sensing fiber and method |
US5994891A (en) * | 1994-09-26 | 1999-11-30 | The Boeing Company | Electrically small, wideband, high dynamic range antenna having a serial array of optical modulators |
FR2765964A1 (fr) * | 1997-07-08 | 1999-01-15 | Bertin & Cie | Dispositif optique de mesure de distance avec une grande precision |
US6160628A (en) * | 1999-06-29 | 2000-12-12 | Nikon Corporation | Interferometer system and method for lens column alignment |
JP3549153B2 (ja) * | 2000-09-20 | 2004-08-04 | 株式会社共和電業 | 光ファイバ干渉センサ、光ファイバ干渉センサの信号処理システム、信号処理方法および記録媒体 |
WO2002095365A2 (en) * | 2001-05-18 | 2002-11-28 | Farfield Sensors Limited | Method for determining a mass changing event |
FI116859B (fi) * | 2002-09-30 | 2006-03-15 | Noveltech Solutions Ltd | Fotoakustinen detektori |
US6839182B1 (en) * | 2003-03-26 | 2005-01-04 | Raytheon Company | Optical assembly having an optical device aligned to an optical collimator, and its fabrication |
DE10337896A1 (de) * | 2003-08-18 | 2005-03-17 | Robert Bosch Gmbh | Interferometrische Messvorrichtung zum Erfassen von Geometriedaten von Oberflächen |
EP1664706B1 (en) * | 2003-09-04 | 2011-07-27 | Baker Hughes Incorporated | Optical sensor with co-located pressure and temperature sensors |
DE102004020914B4 (de) * | 2004-04-28 | 2008-05-29 | Max Frank Gmbh & Co Kg | Kragplattenanschlusselement |
US7259862B2 (en) * | 2004-09-20 | 2007-08-21 | Opsens Inc. | Low-coherence interferometry optical sensor using a single wedge polarization readout interferometer |
AT500831B1 (de) * | 2004-09-27 | 2008-05-15 | Durst Phototech Digital Tech | Vorrichtung zum erzeugen eines mehrfarbigen, digitalen bildes |
US20060073276A1 (en) * | 2004-10-04 | 2006-04-06 | Eric Antonissen | Multi-zone atomic layer deposition apparatus and method |
JP4756845B2 (ja) * | 2004-10-12 | 2011-08-24 | 東京エレクトロン株式会社 | 温度測定装置,温度測定方法,温度測定システム,制御システム,制御方法 |
US7511823B2 (en) * | 2004-12-21 | 2009-03-31 | Halliburton Energy Services, Inc. | Fiber optic sensor |
JP5558005B2 (ja) * | 2006-01-23 | 2014-07-23 | ザイゴ コーポレーション | 物体をモニタする干渉計システム |
US7602198B2 (en) * | 2007-10-19 | 2009-10-13 | Dynamp, Llc | Accuracy enhancing mechanism and method for current measuring apparatus |
FR2985320B1 (fr) * | 2011-12-29 | 2014-02-14 | Alpao | Systeme a etalonnage commun et procede correspondant |
GB2500255B (en) * | 2012-03-16 | 2020-04-15 | Oxsensis Ltd | Optical sensor |
CN106415226A (zh) * | 2014-03-26 | 2017-02-15 | 新加坡科技研究局 | 传感装置和感测力的方法 |
CN103983309B (zh) * | 2014-06-06 | 2016-05-25 | 中国工程物理研究院流体物理研究所 | 一种用于冲击和爆轰实验的三合一光电探头 |
US9651359B2 (en) * | 2014-11-21 | 2017-05-16 | Kla-Tencor Corporation | Dual wavelength dual interferometer with combiner-splitter |
CN107356306B (zh) * | 2017-07-21 | 2023-08-11 | 吉林大学 | 一种基于扫频激光器解调的光纤干涉水位传感装置及方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE8006679L (sv) * | 1980-09-24 | 1982-03-25 | Asea Ab | Korrelerande fiberoptiskt metdon |
DE3044183A1 (de) * | 1980-11-24 | 1982-06-24 | Reinhard Dipl.-Phys. Dr. 7250 Leonberg Ulrich | Verfahren zur optischen messung von laengen und laengenaenderungen und anordnung zur durchfuehrung des verfahrens |
GB2106736B (en) * | 1981-09-03 | 1985-06-12 | Standard Telephones Cables Ltd | Optical transmission system |
GB8530809D0 (en) * | 1985-12-13 | 1986-01-22 | Gen Electric Co Plc | Sensor |
FR2595820B1 (fr) * | 1986-03-13 | 1990-01-05 | Bertin & Cie | Dispositif a fibres optiques pour la detection a distance d'une grandeur physique, en particulier de la temperature |
US4778982A (en) * | 1986-03-24 | 1988-10-18 | Data Card Corporation | System for entering integrated data on the face of an integrated chip card |
DE3611119C1 (de) * | 1986-04-03 | 1987-07-02 | Fraunhofer Ges Forschung | Sensoranordnung |
-
1988
- 1988-06-03 FR FR8807389A patent/FR2632404B1/fr not_active Expired - Fee Related
-
1989
- 1989-06-01 US US07/359,787 patent/US5032026A/en not_active Expired - Lifetime
- 1989-06-02 OA OA59585A patent/OA09049A/xx unknown
- 1989-06-02 AT AT89401518T patent/ATE94983T1/de active
- 1989-06-02 CA CA000601681A patent/CA1335418C/fr not_active Expired - Lifetime
- 1989-06-02 EP EP89401518A patent/EP0347277B1/fr not_active Expired - Lifetime
- 1989-06-02 JP JP1140949A patent/JP2716207B2/ja not_active Expired - Lifetime
- 1989-06-02 NO NO892249A patent/NO307584B1/no not_active IP Right Cessation
- 1989-06-02 DE DE68909320T patent/DE68909320T2/de not_active Expired - Fee Related
- 1989-06-02 ES ES198989401518T patent/ES2046502T3/es not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA1335418C (fr) | 1995-05-02 |
NO892249D0 (no) | 1989-06-02 |
DE68909320T2 (de) | 1994-05-19 |
EP0347277A1 (fr) | 1989-12-20 |
EP0347277B1 (fr) | 1993-09-22 |
NO307584B1 (no) | 2000-04-25 |
FR2632404A1 (fr) | 1989-12-08 |
FR2632404B1 (fr) | 1990-09-21 |
JPH0231113A (ja) | 1990-02-01 |
JP2716207B2 (ja) | 1998-02-18 |
US5032026A (en) | 1991-07-16 |
ATE94983T1 (de) | 1993-10-15 |
NO892249L (no) | 1989-12-04 |
OA09049A (fr) | 1991-03-31 |
DE68909320D1 (de) | 1993-10-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ES2046502T3 (es) | Sensor interferometrico y su utilizacion en un dispositivo interferometrico. | |
US4807950A (en) | Method for impressing gratings within fiber optics | |
JPS6147369B2 (es) | ||
SE7606737L (sv) | Optisk anordning for breddning av en ljusrida | |
NO914639L (no) | To-farve sensoranordning med fokalplanoppstilling | |
DE69103741T2 (de) | Analysevorrichtung für interferometrische Mikroverschiebungssensoren. | |
GB1476911A (en) | Optical interferometer | |
WO2018208018A1 (ko) | 광간섭 측정 장치 | |
KR850007466A (ko) | 규석격막모듈의 격막이 휘는 정도를 감지하기 위한 시스템 | |
ATE278177T1 (de) | Diffraktionsführung für schrägeinfallinterferometer | |
GB1454675A (en) | Optical system for objective refractor for the eye | |
RU2113697C1 (ru) | Оптический измеритель давления | |
SU1267193A1 (ru) | Устройство дл контрол качества поверхности зеркала | |
SU647601A1 (ru) | Оптико-механический преобразователь перемещений | |
SU1677506A1 (ru) | Микроинтерферометр | |
SU1226041A1 (ru) | Интерферометр дл контрол цилиндрических поверхностей | |
SU759845A1 (ru) | ИНТЕРФЕРОМЕТР ДЛЯ ИЗМЕРЕНИЯ НАРУЖНЫХ РАЗМЕРОВ ДЕТАЛЕЙ 1 "" ' / | |
SU627313A1 (ru) | Устройство дл юстировки интерферометров фабри-перо | |
SU1679301A1 (ru) | Устройство дл измерени показател преломлени прозрачных сред | |
SU1744452A1 (ru) | Интерферометр дл контрол плоскостности отражающих поверхностей | |
SU1462097A1 (ru) | Устройство дл измерени спектральных характеристик излучени | |
SU712654A1 (ru) | Интерферометр | |
SU1469364A1 (ru) | Сканирующий интерферометр типа Маха-Цендера | |
JPH02259512A (ja) | 一体型干渉測定装置 | |
JPS6412236A (en) | Wavelength variation monitor for semiconductor laser |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
Ref document number: 347277 Country of ref document: ES |