ATE94983T1 - Interferometrischer sensor und seine anwendung in einer interferometrischen vorrichtung. - Google Patents

Interferometrischer sensor und seine anwendung in einer interferometrischen vorrichtung.

Info

Publication number
ATE94983T1
ATE94983T1 AT89401518T AT89401518T ATE94983T1 AT E94983 T1 ATE94983 T1 AT E94983T1 AT 89401518 T AT89401518 T AT 89401518T AT 89401518 T AT89401518 T AT 89401518T AT E94983 T1 ATE94983 T1 AT E94983T1
Authority
AT
Austria
Prior art keywords
faces
utilising
optical fibre
interferometric
beams
Prior art date
Application number
AT89401518T
Other languages
English (en)
Inventor
Philippe Jouve
Francois-Marie Robert
Jacques Pouleau
Xavier Desforges
Original Assignee
Elf Aquitaine
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elf Aquitaine filed Critical Elf Aquitaine
Application granted granted Critical
Publication of ATE94983T1 publication Critical patent/ATE94983T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
  • Optical Transform (AREA)
  • Pressure Sensors (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Measuring Fluid Pressure (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Measuring And Recording Apparatus For Diagnosis (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Gyroscopes (AREA)
AT89401518T 1988-06-03 1989-06-02 Interferometrischer sensor und seine anwendung in einer interferometrischen vorrichtung. ATE94983T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8807389A FR2632404B1 (fr) 1988-06-03 1988-06-03 Capteur interferometrique et son utilisation dans un dispositif interferometrique
EP89401518A EP0347277B1 (de) 1988-06-03 1989-06-02 Interferometrischer Sensor und seine Anwendung in einer interferometrischen Vorrichtung

Publications (1)

Publication Number Publication Date
ATE94983T1 true ATE94983T1 (de) 1993-10-15

Family

ID=9366898

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89401518T ATE94983T1 (de) 1988-06-03 1989-06-02 Interferometrischer sensor und seine anwendung in einer interferometrischen vorrichtung.

Country Status (10)

Country Link
US (1) US5032026A (de)
EP (1) EP0347277B1 (de)
JP (1) JP2716207B2 (de)
AT (1) ATE94983T1 (de)
CA (1) CA1335418C (de)
DE (1) DE68909320T2 (de)
ES (1) ES2046502T3 (de)
FR (1) FR2632404B1 (de)
NO (1) NO307584B1 (de)
OA (1) OA09049A (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227859A (en) * 1990-12-04 1993-07-13 Grumman Aerospace Corporation Passive coherent radiation detection system
CA2055790A1 (en) * 1991-01-04 1992-07-05 Victor Vali System for accurately detecting changes in temperature and pressure
FR2673022B1 (fr) * 1991-02-14 1993-06-11 Bertin & Cie Recepteur de demultiplexage parallele pour un reseau de capteurs optiques a codage de modulation spectrale.
US5355423A (en) * 1992-07-16 1994-10-11 Rosemount Inc. Optical temperature probe assembly
US5446279A (en) * 1993-08-27 1995-08-29 Hughes Aircraft Company Fiber optic sensor sensing curvature of a diaphragm
CA2122782C (en) * 1994-05-03 1999-07-27 Wojtek J. Bock Apparatus for measuring an ambient physical parameter applied to a highly birefringent sensing fiber and method
US5994891A (en) * 1994-09-26 1999-11-30 The Boeing Company Electrically small, wideband, high dynamic range antenna having a serial array of optical modulators
FR2765964A1 (fr) * 1997-07-08 1999-01-15 Bertin & Cie Dispositif optique de mesure de distance avec une grande precision
US6160628A (en) * 1999-06-29 2000-12-12 Nikon Corporation Interferometer system and method for lens column alignment
JP3549153B2 (ja) * 2000-09-20 2004-08-04 株式会社共和電業 光ファイバ干渉センサ、光ファイバ干渉センサの信号処理システム、信号処理方法および記録媒体
WO2002095365A2 (en) * 2001-05-18 2002-11-28 Farfield Sensors Limited Method for determining a mass changing event
FI116859B (fi) * 2002-09-30 2006-03-15 Noveltech Solutions Ltd Fotoakustinen detektori
US6839182B1 (en) * 2003-03-26 2005-01-04 Raytheon Company Optical assembly having an optical device aligned to an optical collimator, and its fabrication
DE10337896A1 (de) * 2003-08-18 2005-03-17 Robert Bosch Gmbh Interferometrische Messvorrichtung zum Erfassen von Geometriedaten von Oberflächen
WO2005024365A2 (en) * 2003-09-04 2005-03-17 Luna Energy, Llc Optical sensor with co-located pressure and temperature sensors
DE102004020914B4 (de) * 2004-04-28 2008-05-29 Max Frank Gmbh & Co Kg Kragplattenanschlusselement
US7259862B2 (en) * 2004-09-20 2007-08-21 Opsens Inc. Low-coherence interferometry optical sensor using a single wedge polarization readout interferometer
AT500831B1 (de) * 2004-09-27 2008-05-15 Durst Phototech Digital Tech Vorrichtung zum erzeugen eines mehrfarbigen, digitalen bildes
US20060073276A1 (en) * 2004-10-04 2006-04-06 Eric Antonissen Multi-zone atomic layer deposition apparatus and method
JP4756845B2 (ja) * 2004-10-12 2011-08-24 東京エレクトロン株式会社 温度測定装置，温度測定方法，温度測定システム，制御システム，制御方法
US7511823B2 (en) * 2004-12-21 2009-03-31 Halliburton Energy Services, Inc. Fiber optic sensor
WO2007087301A2 (en) * 2006-01-23 2007-08-02 Zygo Corporation Interferometer system for monitoring an object
US7602198B2 (en) * 2007-10-19 2009-10-13 Dynamp, Llc Accuracy enhancing mechanism and method for current measuring apparatus
FR2985320B1 (fr) * 2011-12-29 2014-02-14 Alpao Systeme a etalonnage commun et procede correspondant
GB2500255B (en) * 2012-03-16 2020-04-15 Oxsensis Ltd Optical sensor
CN106415226A (zh) * 2014-03-26 2017-02-15 新加坡科技研究局 传感装置和感测力的方法
CN103983309B (zh) * 2014-06-06 2016-05-25 中国工程物理研究院流体物理研究所 一种用于冲击和爆轰实验的三合一光电探头
US9651359B2 (en) * 2014-11-21 2017-05-16 Kla-Tencor Corporation Dual wavelength dual interferometer with combiner-splitter
CN107356306B (zh) * 2017-07-21 2023-08-11 吉林大学 一种基于扫频激光器解调的光纤干涉水位传感装置及方法
FR3150288A1 (fr) * 2023-06-22 2024-12-27 Paris Sciences Et Lettres Système de mesure de pression différentielle en milieu sous-marin

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE8006679L (sv) * 1980-09-24 1982-03-25 Asea Ab Korrelerande fiberoptiskt metdon
DE3044183A1 (de) * 1980-11-24 1982-06-24 Reinhard Dipl.-Phys. Dr. 7250 Leonberg Ulrich Verfahren zur optischen messung von laengen und laengenaenderungen und anordnung zur durchfuehrung des verfahrens
GB2106736B (en) * 1981-09-03 1985-06-12 Standard Telephones Cables Ltd Optical transmission system
GB8530809D0 (en) * 1985-12-13 1986-01-22 Gen Electric Co Plc Sensor
FR2595820B1 (fr) * 1986-03-13 1990-01-05 Bertin & Cie Dispositif a fibres optiques pour la detection a distance d'une grandeur physique, en particulier de la temperature
US4778982A (en) * 1986-03-24 1988-10-18 Data Card Corporation System for entering integrated data on the face of an integrated chip card
DE3611119C1 (de) * 1986-04-03 1987-07-02 Fraunhofer Ges Forschung Sensoranordnung

Also Published As

Publication number Publication date
US5032026A (en) 1991-07-16
NO307584B1 (no) 2000-04-25
NO892249L (no) 1989-12-04
FR2632404A1 (fr) 1989-12-08
DE68909320D1 (de) 1993-10-28
EP0347277B1 (de) 1993-09-22
CA1335418C (fr) 1995-05-02
EP0347277A1 (de) 1989-12-20
FR2632404B1 (fr) 1990-09-21
ES2046502T3 (es) 1994-02-01
NO892249D0 (no) 1989-06-02
DE68909320T2 (de) 1994-05-19
OA09049A (fr) 1991-03-31
JP2716207B2 (ja) 1998-02-18
JPH0231113A (ja) 1990-02-01

Similar Documents

Publication Publication Date Title
DE68909320D1 (de) Interferometrischer Sensor und seine Anwendung in einer interferometrischen Vorrichtung.
JP3059761B2 (ja) 光ファイバの非同期回折格子の形成方法及び装置
US5198872A (en) Apparatus for detecting the wavelength of laser light
SG73523A1 (en) Optical test system including interferometer with micromirror and piezoelectric translator for controlling test path mirror
SE7606737L (sv) Optisk anordning for breddning av en ljusrida
JPH0285719A (ja) 光学検出器
KR20010009101A (ko) 광섬유격자 제작 장치 및 방법
NO914639L (no) To-farve sensoranordning med fokalplanoppstilling
US5682447A (en) Photomechanical positioning and stabilization method and devices using optical fibers and feedback
WO2018208018A1 (ko) 광간섭 측정 장치
DE59102890D1 (de) Positionsmesseinrichtung.
DE69103741D1 (de) Analysevorrichtung für interferometrische Mikroverschiebungssensoren.
EP0797121A3 (de) Belichtungsapparat
KR850007466A (ko) 규석격막모듈의 격막이 휘는 정도를 감지하기 위한 시스템
SE8205021L (sv) Anordning for att separera stralknippen som utgar fran en optisk fiber
ATE278177T1 (de) Diffraktionsführung für schrägeinfallinterferometer
KR910008376A (ko) 렌즈의 표면질 측정방법
SU1267193A1 (ru) Устройство дл контрол качества поверхности зеркала
Manzardo et al. New design for an integrated fourier transform spectrometer
SU1677506A1 (ru) Микроинтерферометр
SU1656356A1 (ru) Способ измерени флуктуаций акустического давлени
JPS6412236A (en) Wavelength variation monitor for semiconductor laser
KR940006390A (ko) 조리개장치 및 이를 구비한 촬상장치
SU1283521A1 (ru) Интерферометр дл контрол изменени формы поверхности оптических элементов
SU1226041A1 (ru) Интерферометр дл контрол цилиндрических поверхностей