ES2033492T3 - Procedimiento y dispositivo para poner en funcionamiento un cabezal palpador de tipo conmutador. - Google Patents

Procedimiento y dispositivo para poner en funcionamiento un cabezal palpador de tipo conmutador.

Info

Publication number
ES2033492T3
ES2033492T3 ES198989112800T ES89112800T ES2033492T3 ES 2033492 T3 ES2033492 T3 ES 2033492T3 ES 198989112800 T ES198989112800 T ES 198989112800T ES 89112800 T ES89112800 T ES 89112800T ES 2033492 T3 ES2033492 T3 ES 2033492T3
Authority
ES
Spain
Prior art keywords
probe head
procedure
operating
switching type
type probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES198989112800T
Other languages
English (en)
Inventor
Eckhard Enderle
Hans-Peter Aehnelt
Karl-Eugen Aubele
Michael Wirth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6359088&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ES2033492(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Application granted granted Critical
Publication of ES2033492T3 publication Critical patent/ES2033492T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

PARA SOLVENTAR LA FRICCION EN EL RODAMIENTO DE LA CABEZA DE PALPADO, EL PALPADOR (5/6) DESPUES DE CADA PROCEDIMIENTO DE PALPADO SE MANTIENE DURANTE UN TIEMPO DETERMINADO T OSCILANDO. PARA PRODUCIR LAS OSCILACIONES SE PUEDE USAR EL MISMO ELEMENTO PIEZOELECTRICO (17), QUE PRODUCE LA SEÑAL DE PALPADO EN LA CABEZA DE PALPADO.
ES198989112800T 1988-07-20 1989-07-13 Procedimiento y dispositivo para poner en funcionamiento un cabezal palpador de tipo conmutador. Expired - Lifetime ES2033492T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3824548A DE3824548A1 (de) 1988-07-20 1988-07-20 Verfahren und einrichtung fuer den betrieb eines tastkopfes vom schaltenden typ

Publications (1)

Publication Number Publication Date
ES2033492T3 true ES2033492T3 (es) 1993-03-16

Family

ID=6359088

Family Applications (1)

Application Number Title Priority Date Filing Date
ES198989112800T Expired - Lifetime ES2033492T3 (es) 1988-07-20 1989-07-13 Procedimiento y dispositivo para poner en funcionamiento un cabezal palpador de tipo conmutador.

Country Status (5)

Country Link
US (1) US5018280A (es)
EP (1) EP0351713B1 (es)
JP (1) JP2845959B2 (es)
DE (2) DE3824548A1 (es)
ES (1) ES2033492T3 (es)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0415579A1 (en) * 1989-08-30 1991-03-06 Renishaw plc Touch probe
DE4204632A1 (de) * 1990-08-28 1993-08-19 Leitz Messtechnik Zentriereinrichtung fuer einen mechanischen tastkopf
US5247751A (en) * 1990-09-29 1993-09-28 Nikon Corporation Touch probe
DE4238724C1 (de) * 1992-11-17 1993-12-23 Leitz Mestechnik Gmbh Zentriereinrichtung für einen mechanischen Taster
JP3267116B2 (ja) * 1995-09-19 2002-03-18 ミノルタ株式会社 接触式センサおよび移動体
DE69617148T3 (de) * 1995-09-25 2005-11-10 Mitutoyo Corp., Kawasaki Fühlerprobe
JP3075981B2 (ja) * 1996-04-05 2000-08-14 松下電器産業株式会社 形状測定装置
JP3126114B2 (ja) * 1997-11-12 2001-01-22 株式会社ミツトヨ 非接触表面粗さ測定装置
GB2336433B (en) * 1998-04-14 2002-02-06 Mitutoyo Corp Touch signal probe
GB9907643D0 (en) * 1999-04-06 1999-05-26 Renishaw Plc Measuring probe
JP3696432B2 (ja) * 1999-04-13 2005-09-21 株式会社ミツトヨ 一次元測定機
JP3352055B2 (ja) * 1999-06-16 2002-12-03 株式会社ミツトヨ タッチ信号プローブの着座機構
JP3359006B2 (ja) * 1999-06-18 2002-12-24 株式会社ミツトヨ 着座機構
DE10023713A1 (de) * 2000-05-16 2001-11-22 Wolfgang Madlener Messtaster mit einem auslenkbaren Taststift sowie Taststift für einen Messtaster
DE102005015889B4 (de) * 2005-02-24 2010-01-07 M & H Inprocess Messtechnik Gmbh Tastfühler
DE102005015890B4 (de) * 2005-02-24 2007-05-03 Wolfgang Madlener Tastfühler
JP4372759B2 (ja) * 2006-02-10 2009-11-25 株式会社ミツトヨ 形状測定装置、形状測定方法及び形状測定プログラム
GB0609022D0 (en) * 2006-05-08 2006-06-14 Renishaw Plc Contact sensing probe
CN105222715B (zh) * 2015-09-30 2019-08-02 北方民族大学 一种直接入射式光臂放大型一维线性测头
CN105136039B (zh) * 2015-10-12 2019-02-15 北方民族大学 一种光臂放大式一维线性测头
US9803972B2 (en) * 2015-12-17 2017-10-31 Mitutoyo Corporation Optical configuration for measurement device
US9791262B2 (en) * 2015-12-17 2017-10-17 Mitutoyo Corporation Measurement device with multiplexed position signals
US9835433B1 (en) 2017-05-09 2017-12-05 Tesa Sa Touch trigger probe

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4153998A (en) * 1972-09-21 1979-05-15 Rolls-Royce (1971) Limited Probes
US4136458A (en) * 1976-10-01 1979-01-30 The Bendix Corporation Bi-axial probe
DE2712181C3 (de) * 1977-03-19 1981-01-22 Fa. Carl Zeiss, 7920 Heidenheim Tastsystem
CH628137A5 (fr) * 1977-09-27 1982-02-15 Meseltron Sa Procede de mesure a l'aide d'une tete de mesure d'une machine a mesurer et tete de mesure pour la mise en oeuvre de ce procede.
US4166291A (en) * 1977-12-21 1979-08-28 Canron, Inc. Chord liner using angle measurement
GB2049198B (en) * 1979-05-01 1983-03-30 Renishaw Electrical Ltd Probe for use in measuring apparatus
SU1095065A2 (ru) * 1979-11-05 1984-05-30 Вильнюсский Филиал Экспериментального Научно-Исследовательского Института Металлорежущих Станков Измерительна головка
DE3229992C2 (de) * 1982-08-12 1986-02-06 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Mehrkoordinaten-Tastkopf
DE3320127C2 (de) * 1983-06-03 1994-09-08 Zeiss Carl Fa Taststiftwechselhalter
GB8319812D0 (en) * 1983-07-22 1983-08-24 Collingwood D Position sensing apparatus
SU1201667A1 (ru) * 1984-08-16 1985-12-30 Vni K I Sredstv Izmereniya V M Нулевая измерительная головка для координатных измерительных машин и станков с числовым программным управлением
GB8431746D0 (en) * 1984-12-17 1985-01-30 Renishaw Plc Contact-sensing probe
EP0242710B1 (en) * 1986-04-17 1990-07-25 Renishaw plc Contact-sensing probe
DE3623614A1 (de) * 1986-07-12 1988-01-14 Zeiss Carl Fa Koordinatenmessgeraet mit einem tastkopf vom schaltenden typ
US4780961A (en) * 1986-11-10 1988-11-01 Shelton Russell S Probe assembly and circuit for measuring machine
DE8717646U1 (de) * 1987-03-02 1989-08-10 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Mehrkoordinaten-Tastkopf
JPH055442Y2 (es) * 1987-10-07 1993-02-12

Also Published As

Publication number Publication date
EP0351713B1 (de) 1992-06-10
EP0351713A2 (de) 1990-01-24
EP0351713A3 (en) 1990-04-11
DE3824548A1 (de) 1990-01-25
JPH0269613A (ja) 1990-03-08
US5018280A (en) 1991-05-28
JP2845959B2 (ja) 1999-01-13
DE58901626D1 (de) 1992-07-16

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