EP4506536C0 - Scrollvakuumpumpe und scrollvakuumpumpen-system - Google Patents

Scrollvakuumpumpe und scrollvakuumpumpen-system

Info

Publication number
EP4506536C0
EP4506536C0 EP24197612.5A EP24197612A EP4506536C0 EP 4506536 C0 EP4506536 C0 EP 4506536C0 EP 24197612 A EP24197612 A EP 24197612A EP 4506536 C0 EP4506536 C0 EP 4506536C0
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
scroll vacuum
scroll
pump system
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP24197612.5A
Other languages
English (en)
French (fr)
Other versions
EP4506536B1 (de
EP4506536A1 (de
Inventor
Gernot Bernhardt
Maik Schäfer
Heiko Schäfer
Jörn Tönnissen
Jan Hofmann
Sebastian Latta
Jonas Becker
Wolfgang Söhngen
Jannik Germann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP24197612.5A priority Critical patent/EP4506536B1/de
Publication of EP4506536A1 publication Critical patent/EP4506536A1/de
Application granted granted Critical
Publication of EP4506536C0 publication Critical patent/EP4506536C0/de
Publication of EP4506536B1 publication Critical patent/EP4506536B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253—Details concerning the base
    • F04C18/0261—Details of the ports, e.g. location, number, geometry
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0269—Details concerning the involute wraps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/807—Balance weight, counterweight
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
EP24197612.5A 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system Active EP4506536B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP24197612.5A EP4506536B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP23190388.1A EP4253720B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system
EP24197612.5A EP4506536B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP23190388.1A Division-Into EP4253720B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system
EP23190388.1A Division EP4253720B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system

Publications (3)

Publication Number Publication Date
EP4506536A1 EP4506536A1 (de) 2025-02-12
EP4506536C0 true EP4506536C0 (de) 2025-12-17
EP4506536B1 EP4506536B1 (de) 2025-12-17

Family

ID=87567462

Family Applications (5)

Application Number Title Priority Date Filing Date
EP24197627.3A Active EP4506537B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe
EP23190388.1A Active EP4253720B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system
EP25156934.9A Active EP4530471B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system
EP25156928.1A Pending EP4530470A3 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system
EP24197612.5A Active EP4506536B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system

Family Applications Before (4)

Application Number Title Priority Date Filing Date
EP24197627.3A Active EP4506537B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe
EP23190388.1A Active EP4253720B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system
EP25156934.9A Active EP4530471B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system
EP25156928.1A Pending EP4530470A3 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system

Country Status (3)

Country Link
EP (5) EP4506537B1 (de)
CN (1) CN120693445A (de)
WO (1) WO2025032188A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4407183A1 (de) 2024-05-31 2024-07-31 Pfeiffer Vacuum Technology AG Scrollvakuumpumpe und ihr betriebsverfahren
EP4467810A3 (de) 2024-07-15 2025-02-26 Pfeiffer Vacuum Technology AG Scrollvakuumpumpe und verfahren zum herstellen einer scrollvakuumpumpe
EP4538532A3 (de) * 2025-02-25 2025-08-27 Pfeiffer Vacuum Technology AG Scrollvakuumpumpe
EP4621238A3 (de) * 2025-07-16 2025-11-12 Pfeiffer Vacuum Technology AG Verfahren zur montage einer scrollvakuumpumpe
EP4636251A2 (de) 2025-09-09 2025-10-22 Pfeiffer Vacuum Technology AG Scrollvakuumpumpe

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB809445A (en) * 1954-02-27 1959-02-25 Heraeus Gmbh W C Improvements in or relating to rotary high vacuum pumps
JPS60206989A (ja) * 1984-03-30 1985-10-18 Mitsubishi Electric Corp スクロ−ル形流体機械
US6884047B1 (en) * 2003-10-20 2005-04-26 Varian, Inc. Compact scroll pump
DE102006058842A1 (de) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Lüfter
FR2968731B1 (fr) * 2010-12-13 2015-02-27 Danfoss Commercial Compressors Systeme thermodynamique equipe d'une pluralite de compresseurs
CN102817840B (zh) * 2011-06-07 2014-08-27 思科涡旋科技(杭州)有限公司 一种带有绕动式推力轴承的涡卷式容积位移装置
US9605676B2 (en) * 2013-05-31 2017-03-28 Emerson Climate Technologies, Inc. Variable speed scroll compressor
US20150004039A1 (en) * 2013-06-28 2015-01-01 Emerson Climate Technologies, Inc. Capacity-modulated scroll compressor
JP6165576B2 (ja) * 2013-09-30 2017-07-19 株式会社日立産機システム スクロール式流体機械
CN105443377A (zh) * 2014-06-10 2016-03-30 丹佛斯（天津）有限公司 涡旋压缩机
US10954944B2 (en) * 2015-04-27 2021-03-23 Emerson Climate Technologies, Inc. Compressor having counterweight assembly
EP3508727B1 (de) 2015-10-06 2020-05-13 Pfeiffer Vacuum Gmbh Scrollpumpe und verfahren zum betreiben einer scrollpumpe
JP6325041B2 (ja) * 2016-08-31 2018-05-16 三菱重工サーマルシステムズ株式会社 スクロール流体機械およびチップシール
US11193490B2 (en) * 2018-03-30 2021-12-07 Kabushiki Kaisha Toyota Jidoshokki Scroll compressor including bushing mounted on eccentric shaft containing cylindrical and auxiliary weight portions and balancer disposed above annular rotor remote from back pressure chamber
EP4336713A3 (de) * 2018-07-19 2024-06-05 Agilent Technologies, Inc. Vakuumpumpsystem mit ölgeschmierter vakuumpumpe
US12098642B2 (en) * 2019-04-30 2024-09-24 Agilent Technologies, Inc. Double sided oil film thrust bearing in a scroll pump
CN110159528B (zh) * 2019-05-23 2020-11-17 浙江大学 一种双侧双槽并联式无油涡旋空压机
CN110185614B (zh) * 2019-06-26 2020-10-02 浙江大学 一种干式双涡旋真空泵
JP2021014801A (ja) * 2019-07-10 2021-02-12 ダイキン工業株式会社 スクロール圧縮機
EP3647599B2 (de) 2019-10-07 2025-09-03 Pfeiffer Vacuum Gmbh Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche
JP7220692B2 (ja) * 2019-10-07 2023-02-10 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ、スクロールポンプ及びその製造方法
EP3617511B1 (de) 2019-10-07 2021-12-08 Pfeiffer Vacuum Gmbh Scrollpumpen und herstellungsverfahren für solche
EP4491877A3 (de) * 2020-07-22 2025-04-02 Pfeiffer Vacuum Technology AG Rückschlagventil, vakuumgerät und vakuumpumpe
JP7534951B2 (ja) * 2020-12-22 2024-08-15 サンデン株式会社 スクロール型圧縮機
CN113431781A (zh) * 2021-08-05 2021-09-24 临海市谭氏真空设备有限公司 干式涡旋真空泵
EP3940234B1 (de) * 2021-09-29 2023-08-23 Pfeiffer Vacuum Technology AG Pumpe und verfahren zur herstellung einer gleitschicht
CN116470689A (zh) * 2023-03-27 2023-07-21 北京通嘉宏瑞科技有限公司 一体轴式真空泵电机

Also Published As

Publication number Publication date
EP4253720C0 (de) 2025-10-01
EP4530471A3 (de) 2025-07-02
EP4253720B1 (de) 2025-10-01
EP4530470A2 (de) 2025-04-02
EP4530470A3 (de) 2025-07-02
EP4530471A2 (de) 2025-04-02
EP4253720A3 (de) 2024-06-19
EP4253720A2 (de) 2023-10-04
CN120693445A (zh) 2025-09-23
EP4530471B1 (de) 2026-02-25
EP4506537B1 (de) 2025-10-08
EP4530471C0 (de) 2026-02-25
WO2025032188A1 (de) 2025-02-13
EP4506536B1 (de) 2025-12-17
EP4506537C0 (de) 2025-10-08
EP4506536A1 (de) 2025-02-12
EP4506537A1 (de) 2025-02-12

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