GB202212161D0 - Vacuum pump and vacuum exhaust system - Google Patents

Vacuum pump and vacuum exhaust system

Info

Publication number
GB202212161D0
GB202212161D0 GBGB2212161.0A GB202212161A GB202212161D0 GB 202212161 D0 GB202212161 D0 GB 202212161D0 GB 202212161 A GB202212161 A GB 202212161A GB 202212161 D0 GB202212161 D0 GB 202212161D0
Authority
GB
United Kingdom
Prior art keywords
vacuum
exhaust system
vacuum pump
pump
vacuum exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB2212161.0A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of GB202212161D0 publication Critical patent/GB202212161D0/en
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Drying Of Semiconductors (AREA)
GBGB2212161.0A 2022-06-09 2022-08-22 Vacuum pump and vacuum exhaust system Ceased GB202212161D0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022093929A JP2023180545A (en) 2022-06-09 2022-06-09 Vacuum pump, and evacuation system

Publications (1)

Publication Number Publication Date
GB202212161D0 true GB202212161D0 (en) 2022-10-05

Family

ID=83902249

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB2212161.0A Ceased GB202212161D0 (en) 2022-06-09 2022-08-22 Vacuum pump and vacuum exhaust system

Country Status (4)

Country Link
JP (1) JP2023180545A (en)
GB (1) GB202212161D0 (en)
TW (1) TW202405313A (en)
WO (1) WO2023238804A1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3553310B2 (en) * 1997-03-11 2004-08-11 株式会社荏原製作所 Evacuation system
JP2006342791A (en) * 2005-05-13 2006-12-21 Boc Edwards Kk Vacuum pump
JP2019012812A (en) * 2017-06-29 2019-01-24 株式会社荏原製作所 Exhaust facility system
FR3093544B1 (en) * 2019-03-05 2021-03-12 Pfeiffer Vacuum Turbomolecular vacuum pump and purge process

Also Published As

Publication number Publication date
TW202405313A (en) 2024-02-01
WO2023238804A1 (en) 2023-12-14
JP2023180545A (en) 2023-12-21

Similar Documents

Publication Publication Date Title
EP3871756A4 (en) Exhaust gas treatment system and method
EP4030060A4 (en) Vacuum pump and vacuum pump system
IL288993A (en) Multiple vacuum chamber exhaust system and method of evacuating multiple vacuum chambers
GB202400537D0 (en) Vacuum exhaust system and vacuum pump
GB202212161D0 (en) Vacuum pump and vacuum exhaust system
GB202212159D0 (en) Vacuum pump and vacuum exhaust system
GB2603897B (en) Vacuum pump exhaust system
EP3816453A4 (en) Vacuum pump, stator column, base, and vacuum pump exhaust system
GB202319010D0 (en) Exhaust gas aftertreatment system
GB202314023D0 (en) Vacuum pumping system and method
GB202314028D0 (en) Vacuum pumping system and method
GB202208028D0 (en) Vacuum exhaust system
EP4033097A4 (en) Suction muffler
GB202406705D0 (en) Vacuum pumping system and method
EP4108919A4 (en) Vacuum pump, detoxifying device, and exhaust gas processing system
GB202217635D0 (en) Vacuum exhaust system and cleaning method
GB2615531B (en) Rotor and vacuum pump
GB202217034D0 (en) Vacuum chamber and vacuum system
GB202317428D0 (en) Vacuum pump and operating method for vacuum pump
GB202218673D0 (en) Exhaust discharge system
GB202400531D0 (en) Vacuum exhaust device
GB2616440B (en) Pumping system
GB2615021B (en) Exhaust gas aftertreatment system
GB202219222D0 (en) Exhaust gas treatment system
EP4163477C0 (en) An exhaust aftertreatment system

Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)