GB202208028D0 - Vacuum exhaust system - Google Patents

Vacuum exhaust system

Info

Publication number
GB202208028D0
GB202208028D0 GBGB2208028.7A GB202208028A GB202208028D0 GB 202208028 D0 GB202208028 D0 GB 202208028D0 GB 202208028 A GB202208028 A GB 202208028A GB 202208028 D0 GB202208028 D0 GB 202208028D0
Authority
GB
United Kingdom
Prior art keywords
exhaust system
vacuum exhaust
vacuum
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB2208028.7A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of GB202208028D0 publication Critical patent/GB202208028D0/en
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
GBGB2208028.7A 2022-02-28 2022-05-31 Vacuum exhaust system Ceased GB202208028D0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022029407A JP2023125364A (en) 2022-02-28 2022-02-28 Evacuation system

Publications (1)

Publication Number Publication Date
GB202208028D0 true GB202208028D0 (en) 2022-07-13

Family

ID=82324099

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB2208028.7A Ceased GB202208028D0 (en) 2022-02-28 2022-05-31 Vacuum exhaust system

Country Status (4)

Country Link
JP (1) JP2023125364A (en)
GB (1) GB202208028D0 (en)
TW (1) TW202346716A (en)
WO (1) WO2023162985A1 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01277698A (en) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk Compound vacuum pump
JP2001132683A (en) * 1999-10-29 2001-05-18 Applied Materials Inc Turbo-molecular pump
KR102154082B1 (en) * 2014-05-30 2020-09-09 가부시키가이샤 에바라 세이사꾸쇼 Vacuum evacuation system
JP6616611B2 (en) * 2015-07-23 2019-12-04 エドワーズ株式会社 Exhaust system
GB2579360A (en) * 2018-11-28 2020-06-24 Edwards Ltd Multiple chamber vacuum exhaust system
GB2592043A (en) * 2020-02-13 2021-08-18 Edwards Ltd Axial flow vacuum pump

Also Published As

Publication number Publication date
JP2023125364A (en) 2023-09-07
TW202346716A (en) 2023-12-01
WO2023162985A1 (en) 2023-08-31

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)