EP4530471A3 - Scrollvakuumpumpe und scrollvakuumpumpen-system - Google Patents

Scrollvakuumpumpe und scrollvakuumpumpen-system Download PDF

Info

Publication number
EP4530471A3
EP4530471A3 EP25156934.9A EP25156934A EP4530471A3 EP 4530471 A3 EP4530471 A3 EP 4530471A3 EP 25156934 A EP25156934 A EP 25156934A EP 4530471 A3 EP4530471 A3 EP 4530471A3
Authority
EP
European Patent Office
Prior art keywords
drive shaft
vacuum pump
scroll vacuum
balancing weight
pumping system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP25156934.9A
Other languages
English (en)
French (fr)
Other versions
EP4530471A2 (de
Inventor
Gernot Bernhardt
Maik Schäfer
Heiko Schäfer
Jörn TÖNNISSEN
Jan Hofmann
Sebastian Latta
Jonas Becker
Wolfgang Söhngen
Jannik GERMANN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP25156934.9A priority Critical patent/EP4530471A3/de
Publication of EP4530471A2 publication Critical patent/EP4530471A2/de
Publication of EP4530471A3 publication Critical patent/EP4530471A3/de
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253—Details concerning the base
    • F04C18/0261—Details of the ports, e.g. location, number, geometry
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0269—Details concerning the involute wraps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/807—Balance weight, counterweight
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Abstract

Die Erfindung betrifft unter anderem eine Scrollvakuumpumpe mit einem Pumpsystem, einer Antriebswelle, die einen Exzenterabschnitt zum Antreiben des Pumpsystems aufweist, und einem elektrischen Antriebsmotor für die Antriebswelle, wobei zumindest zwei entlang der Drehachse der Antriebswelle voneinander beabstandete Lagerstellen zur Drehlagerung der Antriebswelle vorgesehen sind, und wobei sich alle Lagerstellen auf der dem Exzenterabschnitt der Antriebswelle zugewandten Seite des Antriebsmotors und/oder zwischen einem vorderen Wuchtgewicht und einem hinteren Wuchtgewicht der Antriebswelle befinden.
EP25156934.9A 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system Pending EP4530471A3 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP25156934.9A EP4530471A3 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP25156934.9A EP4530471A3 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system
EP23190388.1A EP4253720B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP23190388.1A Division EP4253720B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system
EP23190388.1A Division-Into EP4253720B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system

Publications (2)

Publication Number Publication Date
EP4530471A2 EP4530471A2 (de) 2025-04-02
EP4530471A3 true EP4530471A3 (de) 2025-07-02

Family

ID=87567462

Family Applications (4)

Application Number Title Priority Date Filing Date
EP24197627.3A Active EP4506537B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe
EP25156928.1A Pending EP4530470A3 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system
EP23190388.1A Active EP4253720B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system
EP25156934.9A Pending EP4530471A3 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system

Family Applications Before (3)

Application Number Title Priority Date Filing Date
EP24197627.3A Active EP4506537B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe
EP25156928.1A Pending EP4530470A3 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system
EP23190388.1A Active EP4253720B1 (de) 2023-08-08 2023-08-08 Scrollvakuumpumpe und scrollvakuumpumpen-system

Country Status (3)

Country Link
EP (4) EP4506537B1 (de)
CN (1) CN120693445A (de)
WO (1) WO2025032188A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4407183A1 (de) 2024-05-31 2024-07-31 Pfeiffer Vacuum Technology AG Scrollvakuumpumpe und ihr betriebsverfahren
EP4467810A3 (de) 2024-07-15 2025-02-26 Pfeiffer Vacuum Technology AG Scrollvakuumpumpe und verfahren zum herstellen einer scrollvakuumpumpe
EP4621238A3 (de) * 2025-07-16 2025-11-12 Pfeiffer Vacuum Technology AG Verfahren zur montage einer scrollvakuumpumpe
EP4636251A2 (de) 2025-09-09 2025-10-22 Pfeiffer Vacuum Technology AG Scrollvakuumpumpe

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3617511A2 (de) * 2019-10-07 2020-03-04 Pfeiffer Vacuum Gmbh Scrollpumpen und herstellungsverfahren für solche
EP3647599A2 (de) * 2019-10-07 2020-05-06 Pfeiffer Vacuum Gmbh Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche
EP3708840A2 (de) * 2020-07-22 2020-09-16 Pfeiffer Vacuum Technology AG Rückschlagventil, vakuumgerät und vakuumpumpe
EP3940234A2 (de) * 2021-09-29 2022-01-19 Pfeiffer Vacuum Technology AG Pumpe und verfahren zur herstellung einer gleitschicht

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JPS60206989A (ja) * 1984-03-30 1985-10-18 Mitsubishi Electric Corp スクロ−ル形流体機械
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FR2968731B1 (fr) * 2010-12-13 2015-02-27 Danfoss Commercial Compressors Systeme thermodynamique equipe d'une pluralite de compresseurs
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US9605676B2 (en) * 2013-05-31 2017-03-28 Emerson Climate Technologies, Inc. Variable speed scroll compressor
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3617511A2 (de) * 2019-10-07 2020-03-04 Pfeiffer Vacuum Gmbh Scrollpumpen und herstellungsverfahren für solche
EP3647599A2 (de) * 2019-10-07 2020-05-06 Pfeiffer Vacuum Gmbh Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche
EP3708840A2 (de) * 2020-07-22 2020-09-16 Pfeiffer Vacuum Technology AG Rückschlagventil, vakuumgerät und vakuumpumpe
EP3940234A2 (de) * 2021-09-29 2022-01-19 Pfeiffer Vacuum Technology AG Pumpe und verfahren zur herstellung einer gleitschicht

Also Published As

Publication number Publication date
EP4506537C0 (de) 2025-10-08
EP4506537A1 (de) 2025-02-12
WO2025032188A1 (de) 2025-02-13
EP4253720C0 (de) 2025-10-01
EP4506536A1 (de) 2025-02-12
EP4530470A3 (de) 2025-07-02
EP4530470A2 (de) 2025-04-02
EP4506537B1 (de) 2025-10-08
EP4530471A2 (de) 2025-04-02
CN120693445A (zh) 2025-09-23
EP4253720A3 (de) 2024-06-19
EP4253720A2 (de) 2023-10-04
EP4253720B1 (de) 2025-10-01

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