EP4206474C0 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
EP4206474C0
EP4206474C0 EP21218345.3A EP21218345A EP4206474C0 EP 4206474 C0 EP4206474 C0 EP 4206474C0 EP 21218345 A EP21218345 A EP 21218345A EP 4206474 C0 EP4206474 C0 EP 4206474C0
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP21218345.3A
Other languages
English (en)
French (fr)
Other versions
EP4206474A1 (de
EP4206474B1 (de
Inventor
Heiko Brück
Martin Lohse
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP21218345.3A priority Critical patent/EP4206474B1/de
Priority to EP25210475.7A priority patent/EP4663959A3/de
Publication of EP4206474A1 publication Critical patent/EP4206474A1/de
Application granted granted Critical
Publication of EP4206474B1 publication Critical patent/EP4206474B1/de
Publication of EP4206474C0 publication Critical patent/EP4206474C0/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/58Cooling; Heating; Diminishing heat transfer
    • F04D29/582Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5826Cooling at least part of the working fluid in a heat exchanger
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/58Cooling; Heating; Diminishing heat transfer
    • F04D29/582Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00Function
    • F05D2260/20Heat transfer, e.g. cooling
    • F05D2260/221Improvement of heat transfer
    • F05D2260/2214Improvement of heat transfer by increasing the heat transfer surface
    • F05D2260/22141Improvement of heat transfer by increasing the heat transfer surface using fins or ribs

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP21218345.3A 2021-12-30 2021-12-30 Vakuumpumpe Active EP4206474B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP21218345.3A EP4206474B1 (de) 2021-12-30 2021-12-30 Vakuumpumpe
EP25210475.7A EP4663959A3 (de) 2021-12-30 2021-12-30 Vakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP21218345.3A EP4206474B1 (de) 2021-12-30 2021-12-30 Vakuumpumpe

Related Child Applications (2)

Application Number Title Priority Date Filing Date
EP25210475.7A Division EP4663959A3 (de) 2021-12-30 2021-12-30 Vakuumpumpe
EP25210475.7A Division-Into EP4663959A3 (de) 2021-12-30 2021-12-30 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP4206474A1 EP4206474A1 (de) 2023-07-05
EP4206474B1 EP4206474B1 (de) 2025-12-03
EP4206474C0 true EP4206474C0 (de) 2025-12-03

Family

ID=79185670

Family Applications (2)

Application Number Title Priority Date Filing Date
EP25210475.7A Pending EP4663959A3 (de) 2021-12-30 2021-12-30 Vakuumpumpe
EP21218345.3A Active EP4206474B1 (de) 2021-12-30 2021-12-30 Vakuumpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP25210475.7A Pending EP4663959A3 (de) 2021-12-30 2021-12-30 Vakuumpumpe

Country Status (1)

Country Link
EP (2) EP4663959A3 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026042037A1 (en) * 2024-08-21 2026-02-26 Trillium Pumps Italy S.P.A. Bearing housing for fluid operating machines

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0888301A (ja) * 1994-09-19 1996-04-02 Mitsubishi Electric Corp 放熱フィン
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
DE102006058843A1 (de) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP5306741B2 (ja) * 2008-08-28 2013-10-02 バキュームプロダクツ株式会社 並列吸気ポンプ及びそれを用いた真空装置
JP6102222B2 (ja) * 2012-11-30 2017-03-29 株式会社島津製作所 真空ポンプ
JP2018132024A (ja) * 2017-02-17 2018-08-23 エドワーズ株式会社 コントローラ及び真空ポンプ装置
DE102018105732A1 (de) * 2018-03-13 2019-09-19 Nidec Gpm Gmbh Baukastensystem eines axial integrierten Pumpenaufbaus

Also Published As

Publication number Publication date
EP4206474A1 (de) 2023-07-05
EP4663959A3 (de) 2026-03-11
EP4663959A2 (de) 2025-12-17
EP4206474B1 (de) 2025-12-03

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