EP4481090A1 - Élément métallique à surface lissée et son procédé de fabrication - Google Patents

Élément métallique à surface lissée et son procédé de fabrication Download PDF

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Publication number
EP4481090A1
EP4481090A1 EP22927301.6A EP22927301A EP4481090A1 EP 4481090 A1 EP4481090 A1 EP 4481090A1 EP 22927301 A EP22927301 A EP 22927301A EP 4481090 A1 EP4481090 A1 EP 4481090A1
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EP
European Patent Office
Prior art keywords
metal member
smoothened
less
oxide film
anodic oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22927301.6A
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German (de)
English (en)
Inventor
Ayumu NIIYAMA
Yuta Shimizu
Koichi Nakano
Takeshi Oshima
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Nippon Light Metal Co Ltd
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Nippon Light Metal Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Light Metal Co Ltd filed Critical Nippon Light Metal Co Ltd
Publication of EP4481090A1 publication Critical patent/EP4481090A1/fr
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/26—Anodisation of refractory metals or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C14/00—Alloys based on titanium

Definitions

  • the present invention relates to a metal member made of titanium or a titanium alloy that is required to have a smoothened surface, and a method for manufacturing the same.
  • titanium and titanium alloys have excellent corrosion resistance and high specific strength, and are used in a variety of applications, including structural members for aircrafts and bicycles, engine parts, optical members, electronic parts, and decorative items.
  • condition of the surface of members is often considered important, particularly in optical members and decorative items, and methods for smoothening the surface of members made of titanium or the titanium alloys have been investigated.
  • Patent Literature 1 JP 2008-223139 A discloses, in the method of electropolishing and/or electrochemical deburring of the surface of titanium or a titanium-containing alloy, a method for electrolytic polishing and/or electrochemical deburring of the surface of titanium or a titanium-containing alloy, characterized in that the electrolyte used comprises methanesulfonic acid and one or more alkanediphosphonic acids, and the one or more alkanediphosphonic acids can optionally be substituted with hydroxy and/or amino groups.
  • the electrolyte used is not combustible, is not especially corrosive and is easy to handle, and with normal handling, there is no increased risk for the people operating the electropolishing plant or working in the vicinity of this plant, or for the environment.
  • the electrolyte described here does not release any harmful gases or vapors.
  • Patent Literature 2 JP 2004-43850 A discloses a method for etching titanium or a titanium alloy, which is characterized by treating the titanium or titanium alloy with an aqueous solution containing (a) 5 to 30 weight of hydrogen peroxide, (b) 1 to 20 weight of a fluoride, (c) 1 to 10 % by weight of at least one acid selected from sulfuric acid, nitric acid, and phosphoric acid, and (d) 0.001 to 0.1 % by weight of a fluorine-containing surfactant, and in which the weight ratio of [(a) hydrogen peroxide concentration]/[(b) fluorine concentration of the fluoride] is 1.5 to 3.0.
  • the method for electrolytic polishing and/or electrochemical deburring described in the Patent Literature 1 provides a good working environment, but, as stated that "can achieve surface smoothening or deburring that is at least as good as, if not better than, that of the methods described in the prior art", the smoothness is not improved as compared to the prior art.
  • the etching method for titanium or a titanium alloy described in Patent Literature 2 can simultaneously achieve surface scale removal and smoothening, but the surface roughness obtained by smoothening is around 0.4 pm, which is not suitable for cases where higher smoothness is required.
  • Patent Literature 1 and Patent Literature 2 only provide a relatively narrow area having a good smooth surface, and it is difficult to efficiently reduce foreign matter and achieve a mirror finish over the entire surface of a large metal member. Further, when the metal member has corners with an extremely small radius of curvature, or when the metal member has openings or through holes, it is extremely difficult to smoothen these inner surfaces.
  • the object of the present invention is to provide, in a large metal member made of titanium or a titanium alloy, a surface-smoothened metal member in which the surface is smoothened to such an extent that a maximum height roughness (Rz) of a flat surface portion of the metal member is 1.1 pm or less, and a maximum height roughness (Rz) of a portion of the surface of the metal member having a radius of curvature of 0.05 to 2.5 mm is less than 2 ⁇ m; and a simple and efficient method for manufacturing the same.
  • another object of the present invention is to provide a surface-smoothened metal member in which, even in the case of a large metal member made of titanium or a titanium alloy or a metal member a having an opening or through hole, a maximum height roughness (Rz) of the inner wall of the through hole or opening is smoothened to an extent of less than 2 ⁇ m; and a simple and efficient method for manufacturing the same.
  • the inventors have done extensive study to methods for smoothening the surface of the metal member made of titanium or a titanium alloy, and have found that detaching an anodic oxide film formed under appropriate conditions is extremely effective, and then have reach the present invention.
  • the present invention also provides a surface-smoothened metal member comprising titanium or a titanium alloy, characterized in that:
  • a maximum length of the metal member is 50 to 1000 mm, and more preferably 100 to 500 mm. It is difficult to smoothen the entire surface of a large metal member by using conventionally known methods, but in the surface-smoothened metal member of the present invention, even in the metal members having a maximum length of 50 mm or more, the maximum height roughness (Rz) of a flat surface portion is 1.1 pm or less and the maximum height roughness (Rz) of a portion of the surface of the metal member having a radius of curvature of 0.05 to 2.5 mm is less than 2 pm. Further, by setting the maximum length of the metal member to 1000 mm or less, the maximum height roughness (Rz) of the portion having a radius of curvature of 0.05 to 2.5 mm can be exactly set to less than 2 pm.
  • the surface-smoothened metal member of the present invention has a through hole and/or an opening in the metal member, and that a maximum height roughness (Rz) of the inner wall of the through holes and/or the openings is also less than 2 pm.
  • Rz maximum height roughness
  • the present invention also provides a surface-smoothened metal member comprising titanium or a titanium alloy, characterized in that
  • a maximum length of the metal member is 50 to 1000 mm, and more preferably 100 to 500 mm. It is difficult to smoothen the entire surface of a large metal member by using conventionally known methods, but in the surface-smoothened metal member of the present invention, even in the metal members having a maximum length of 50 mm or more, the arithmetic mean roughness (Ra) of a portion of the surface of the metal member having a radius of curvature of 0.05 to 2.5 mm is less than 0.4 pm. Further, by setting the maximum length of the metal member to 1000 mm or less, the arithmetic mean roughness (Ra) of the portion having a radius of curvature of 0.05 to 2.5 mm can be exactly set to less than 0.4 pm.
  • the surface-smoothened metal member of the present invention has a through hole and/or an opening in the metal member, and that the arithmetic mean roughness (Ra) of the inner wall of the through hole and/or the opening is also less than 0.4 pm.
  • Ra arithmetic mean roughness
  • an equivalent circle diameter of the through hole and/or the opening is 0.1 to 5 mm.
  • the more preferable equivalent circle diameter is 0.2 to 2 mm, and the most preferable equivalent circle diameter is 0.5 to 1 mm.
  • the equivalent circle diameter of the through hole and/or opening is 0.1 mm or more, it is possible to reduce the variation in the arithmetic mean roughness (Ra) and the maximum height roughness (Rz) of the inner wall.
  • a depth of the through hole and/or the opening is 1 to 50 mm.
  • the more preferable depth of the opening is 1 to 10 mm, and the most preferable depth of the opening is 2 to 8 mm.
  • the surface-smoothened metal member of the present invention even when deep through hole and/or opening having the depth of 1 mm or more are formed, it is possible to reduce the arithmetic mean roughness (Ra) and the maximum height roughness (Rz) of the inner surface sufficiently. Further, when the depth of the through hole and/or opening is 50 mm or less, it is possible to reduce the variation in the arithmetic mean roughness (Ra) and the maximum height roughness (Rz) of the inner wall.
  • the metal member is a frame body.
  • the metal member By using the metal member as the frame body, it can be suitably used as, for example, a pellicle frame.
  • the present invention also provides a method for manufacturing a surface-smoothened metal member, comprising:
  • the convex portions of the substrate surface are consumed by the formation of the anodic oxide film to progress the smoothening, and the smoothened surface can be obtained by detaching the anodic oxide film.
  • the anodic oxide film can also be formed on a large substrate, making it possible to smoothen the surface of a large metal member.
  • a thickness of the anodic oxide film is 2 to 10 pm. More preferably, by setting the thickness of the anodic oxide film to 4 to 6 pm, not only are the convex portions on the surface of the substrate efficiently consumed, but the anodic oxide film can be naturally detached without the need for any special process.
  • a voltage applied in the anodization treatment is 20 to 100 V
  • the anodization treatment conditions are not particularly limited as long as the effects of the present invention are not impaired, and various conventionally known treatment conditions can be used, more preferably, by setting the applied voltage to 40 to 50 V, not only are the convex portions on the surface of the substrate efficiently consumed, but the anodic oxide film can be naturally detached without the need for any special process.
  • the method for manufacturing a surface-smoothened metal member of the present invention it is preferable to repeat the formation and detachment of the anodic oxide film until the arithmetic mean roughness (Ra) of less than 0.4 pm and/or the maximum height roughness (Rz) of less than 2 pm is obtained on the surface of the substrate.
  • a surface-smoothened metal member in which the surface is smoothened to such an extent that a maximum height roughness (Rz) of a flat surface portion of the metal member is 1.1 pm or less, and a maximum height roughness (Rz) of a portion of the surface of the metal member having a radius of curvature of 0.05 to 2.5 mm is less than 2 ⁇ m; and a simple and efficient method for manufacturing the same.
  • a surface-smoothened metal member in which, even in the case of a large metal member made of titanium or a titanium alloy or a metal member a having an opening or through hole, a maximum height roughness (Rz) of the inner wall of the through hole or opening is smoothened to an extent of less than 2 ⁇ m; and a simple and efficient method for manufacturing the same.
  • a pellicle frame will be taken up as a typical embodiment of the surface-smoothened metal member, typical embodiments of the surface-smoothened metal member and the manufacturing method thereof according to the present invention will be described in detail with reference to the drawings, but the present invention is not limited to only these examples. Further, the elements in the embodiment can be optionally combined with a part or the whole. In the following description, the same or equivalent parts are denoted by the same numerals, and there is a case that redundant explanation may be omitted. In addition, since the drawings are for conceptually explaining the present invention, dimensions of the respective constituent elements expressed and ratios thereof may be different from actual ones.
  • FIG. 1 shows a schematic view of a pellicle frame, which is one embodiment of the surface-smoothened metal member of the present invention.
  • the pellicle frame 1 is made of titanium or a titanium alloy, and all of its surfaces are smoothened.
  • the maximum length of the pellicle frame 1 is 50 to 1000 mm.
  • the maximum length of the pellicle frame 1 is the length of the diagonal line indicated by A in FIG. 1 .
  • the maximum length is preferably from 100 to 500 mm, and more preferably from 150 to 300 mm.
  • the maximum height roughness (Rz) of a flat surface portion is 1.1 pm or less and the maximum height roughness (Rz) of a portion of the surface of the metal member having a radius of curvature of 0.05 to 2.5 mm is less than 2 pm.
  • the maximum height roughness (Rz) of the portion having a radius of curvature of 0.05 to 2.5 mm can be exactly set to less than 2 pm.
  • the arithmetic mean roughness (Ra) of a portion of the surface having a radius of curvature of 0.05 to 2.5 mm is less than 0.4 pm. Further, by setting the maximum length to 1000 mm or less, the arithmetic mean roughness (Ra) of the portion having a radius of curvature of 0.05 to 2.5 mm can be exactly set to less than 0.4 pm.
  • the pellicle frame 1 has a through hole and/or an opening, and that the maximum height roughness (Rz) of the inner walls of the through hole and/or the opening is less than 2 pm and the arithmetic mean roughness (Ra) is less than 0.4 pm.
  • FIG. 1 shows a case where the through hole 2 is present, and FIG. 2 shows a cross-sectional view taken along line B-B' of FIG. 1 .
  • the inner surface of the through hole 2 indicated by the dotted line is also sufficiently smoothened, and the maximum height roughness (Rz) is less than 2 pm and the arithmetic mean roughness (Ra) is less than 0.4 pm.
  • an equivalent circle diameter (R in FIG. 2 ) of the opening of the through hole 2 is 0.1 to 5 mm.
  • the more preferable equivalent circle diameter is 0.2 to 2 mm, and the most preferable equivalent circle diameter is 0.5 to 1 mm.
  • the equivalent circle diameter of the through hole 2 is 0.1 mm or more, it is possible to reduce the variation in the arithmetic mean roughness (Ra) and the maximum height roughness (Rz) of the inner wall.
  • a depth (D in FIG. 2 ) of the through hole 2 is 1 to 50 mm.
  • the more preferable depth of the through hole 2 is 1 to 10 mm, and the most preferable depth of the through hole 2 is 2 to 8 mm.
  • the pellicle frame 1 even when deep through hole having the depth of 1 mm or more are formed, it is possible to reduce the arithmetic mean roughness (Ra) and the maximum height roughness (Rz) of the inner surface sufficiently. Further, when the depth of the through hole 2 is 50 mm or less, it is possible to reduce the variation in the arithmetic mean roughness (Ra) and the maximum height roughness (Rz) of the inner wall.
  • the shape of the pellicle frame 1 is not particularly limited as long as the effect of the present invention is not impaired, and various conventionally known shapes can be used depending on the shape of the light exposure original plate, and in general, the planar shape of the pellicle frame 1 is a ring shape, a rectangular shape, or a square shape, and has a size and a shape that cover a circuit pattern portion provided on the light exposure original plate.
  • the height (thickness) of the pellicle frame 1 is preferably 0.5 to 10 mm, more preferably 1 to 7 mm, and most preferably 1.0 to 3.0 mm.
  • the cross-sectional shape of the pellicle frame 1 is not particularly limited as long as the effect of the present invention is not impaired, and may be various conventionally known shapes, and preferable is a quadrilateral where the upper side and the lower side are parallel.
  • the upper side of the pellicle frame 1 needs a width for stretching the pellicle film, and the lower side needs a width for providing an adhesive layer for adhesion and adhering to the light exposure original plate. For this reason, the width of the upper side and the lower side of the pellicle frame 1 is preferably around 1 to 3 mm.
  • the pellicle frame 1 is made of titanium or a titanium alloy, the strength and Young's modulus are higher than those of the conventionally used pellicle frames made of aluminum alloys. Further, since titanium and titanium alloys are relatively light having a specific gravity of approximately 4.5, making it possible to suppress an increase in the weight of the pellicle frame 1.
  • the pellicle frame 1 is made of titanium or a titanium alloy, the linear expansion coefficient is lower than that of aluminum, and distortion during temperature rise is effectively suppressed. Further, since titanium and titanium alloys are metallic materials and have superior toughness compared to ceramics and cemented carbide, making them easy to handle. Furthermore, due to a good processability, the manufacturing cost can be reduced, and in addition, the pellicle frame 1 can be given high dimensional accuracy.
  • a linear expansion coefficient of the optical member is preferably 6 ⁇ 10 -6 to 11 ⁇ 10 -6 /K.
  • the thermal expansion coefficient of the optical member becomes close to that of a material made of ceramic, silicon, or the like. This makes it possible to reduce distortion and cracking caused by the difference in deformation due to thermal expansion when the temperature rises between the optical member and the member made of ceramic, silicon, or the like.
  • the optical member is a lens holder and the member made of ceramic, silicon, or the like is a lens for a camera or the like.
  • the linear expansion coefficient is set to 11 ⁇ 10 -6 K or less, distortion during temperature rise can be reduced.
  • a more preferable linear expansion coefficient is 7 ⁇ 10 -6 to 10 ⁇ 10 -6 /K, and a most preferable linear expansion coefficient is 8 ⁇ 10 -6 to 9 ⁇ 10 -6 /K.
  • the linear expansion coefficient is expressed as a value in the temperature range of 0 to 100°C.
  • the titanium alloy used for the pellicle frame 1 is not particularly limited as long as the effect of the present invention is not impaired, and various conventionally known titanium alloys can be used.
  • the titanium alloys include Ti-6A1-4V alloy, Ti-6A1-6V-2Sn alloy, Ti-6Al-2Sn-4Zr-6Mo alloy, Ti-10V-2Fe-3Al alloy, Ti-7Al-4Mo alloy, Ti-5Al-2.5Sn alloy, Ti-6Al-5Zr-0.5Mo-0.2Si alloy, Ti-5.5Al-3.5Sn-3Zr-0.3Mo-1Nb-0.3Si alloy, Ti-8Al-1Mo-1V alloy, Ti-6Al-2Sn-4Zr-2Mo alloy, Ti-5Al-2Sn-2Zr-4Mo-4Cr alloy, Ti-11.5Mo-6Zr-4.5Sn alloy, Ti-15V-3Cr-3Al-3Sn alloy, Ti-15Mo-5Zr-3Al alloy, Ti-15Mo-5Zr alloy, and Ti-13V-11Cr-3A
  • the pellicle frame 1 has been described as an example of the surface-smoothened metal member, but the surface-smoothened metal member is not limited thereto.
  • various optical members may be produced, and examples are the pellicle frame, a lens holder, a barrel, a shade, a reflector, and the like.
  • a frame body made of titanium or a titanium alloy is subjected to anodization treatment to form an anodic oxide film on the surface of the frame body, and the surface of the frame body is smoothened by removing the anodic oxide film.
  • FIG. 3 shows a schematic diagram of the surface smoothening process.
  • the convex portions of the surface of the frame body are consumed by the formation of the anodic oxide film to progress the smoothening, and the smoothened surface can be obtained by detaching the anodic oxide film.
  • the smoothened surface can be obtained by detaching the anodic oxide film.
  • foreign matters adhering to the surface of the frame body are removed by the detachment of the anodic oxide film, a clean surface can be obtained.
  • a thickness of the anodic oxide film formed on the surface of the frame body is 2 to 10 pm. More preferably, by setting the thickness of the anodic oxide film to 4 to 6 pm, not only are the convex portions on the surface of the frame body efficiently consumed, but the anodic oxide film can be naturally detached without the need for any special process. If the anodic oxide film remains, the anodic oxide film may be detached by applying ultrasonic vibrations, reverse electrolysis, or the like.
  • a voltage applied in the anodization treatment is 20 to 100 V
  • the anodization treatment conditions are not particularly limited as long as the effects of the present invention are not impaired, and various conventionally known treatment conditions can be used, more preferably, by setting the applied voltage to 40 to 50 V, not only are the convex portions on the surface of the frame body efficiently consumed, but the anodic oxide film can be naturally detached without the need for any special process.
  • the maximum height roughness (Rz) of the surface of the frame body becomes 2 pm or more after one formation and detachment of the anodic oxide film, it is preferable to repeat the formation and detachment of the anodic oxide film until the value becomes less than 2 pm. Since the formation and detachment of the anodic oxide film leads to the smoothening of the surface of the frame body, by repeating this process, it is possible to reliably obtain the maximum height roughness (Rz) of less than 2 pm on the surface of the substrate.
  • the arithmetic mean roughness (Ra) of the surface of the frame body becomes 0.4 pm or more after one formation and detachment of the anodic oxide film, it is preferable to repeat the formation and detachment of the anodic oxide film until the value becomes less than 0.4 pm. Since the formation and detachment of the anodic oxide film leads to the smoothening of the surface of the frame body, by repeating this process, it is possible to reliably obtain the arithmetic mean roughness (Ra) of less than 0.4 pm on the surface of the substrate.
  • a frame body having a long side of 160 mm and a short side of 130 mm was cut out from pure titanium to prepare a substrate for a pellicle frame.
  • the thickness and width of the substrate for the pellicle frame are the same, 1 mm and 4 mm, respectively.
  • the obtained substrate for the pellicle frame was subjected to the anodization treatment to form an anodic oxide film over the entire surface.
  • the anodization was conducted under the conditions that, as an anodization bath, an aqueous solution which dissolved 5 g/L of ammonium fluoride and 134 g/L of ammonium sulfate, at a bath temperature of 55° C and a voltage of 30 to 80 V for 15 minutes.
  • FIG. 4 shows scanning electron microscope (SEM) photographs of the surface of the substrate for the pellicle frame before the anodization treatment, the surface of the anodic oxide film, and the surface of the substrate for the pellicle frame from which the anodic oxide film has been detached, when the voltage set to 45 V
  • FIG. 5 shows an SEM photograph of the cross section of the detached anodic oxide film and the substrate for the pellicle frame.
  • SEM scanning electron microscope
  • the surface of the substrate for the pellicle frame has been significantly smoothened by the detachment of the anodic oxide film, and a good smooth surface completely free of foreign matters has been obtained. Further, it can be confirmed from the cross-sectional photograph that the unevenness of the surface of the substrate is less than 0.4 pm. Here, the smooth surface was formed over the entire surface of the substrate for the pellicle frame.
  • FIG. 6 shows SEM photographs of the surface of the substrate for the pellicle frame from which the anodic oxide film has been detached, the surface of the anodic oxide film, and a cross section of the anodic oxide film. Further, the thickness and detaching state of the anodic oxide film were also evaluated, and the results are shown together. When the voltage was 30 V, no spontaneous detachment of the anodic oxide film was observed.
  • Anodization treatment was carried out for 10 minutes at a voltage of 45 V in the same manner as in Example 1, except that cylindrical through holes having a diameter of 800 pm were provided in the thickness direction of the substrate for the pellicle frame.
  • FIG. 7 shows SEM photograph of the side surface of the through hole before anodization treatment and after detachment of the anodic oxide film. It can be seen that the surface from which the anodic oxide film was detached has been significantly smoothened compared to the surface before the anodization treatment.
  • a rectangular bar of pure titanium of 40 mm ⁇ 4 mm ⁇ 1 mm was cut out, and a through hole having a diameter of 0.8 mm was drilled through the 40 mm ⁇ 1 mm surface to the back side.
  • the surface of the rectangular bar was physically polished to remove burrs, and then chemically polished by using a chemical polishing solution (TCP-08) at 30° C for 10 seconds.
  • TCP-08 chemical polishing solution
  • the anodization treatment was carried out at a voltage of 45 V for 10 minutes.
  • FIG. 8 shows a schematic diagram of the measurement lines on the 40 mm ⁇ 1 mm surface.
  • the length of the measurement line in the longitudinal direction is 322 pm
  • the length of the measurement line in the lateral direction is 244 pm.
  • the measurement line on the inner surface of the through hole was 322 pm in the axial direction.
  • both the maximum height roughness (Rz) and the arithmetic mean roughness (Ra) are reduced by the detachment of the anodic oxide film. It can be seen that the maximum height roughness (Rz) of the flat surface portions is all 1.1 pm or less, and the maximum height roughness (Rz) of the inner surface of the through hole is less than 2 pm. Further, after the anodization treatment, the arithmetic mean roughness (Ra) was less than 0.4 pm in all the measurement regions.
  • FIG. 9 shows the microscopically observing images of the 40 mm ⁇ 1 mm surface
  • FIG. 10 shows the microscopically observing images of the inner surface of the through hole
  • FIG. 11 shows the SEM image of the inner surface of the through hole. In every image, it can be seen that the surface is smoothened by the detachment of the anodic oxide film.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
EP22927301.6A 2022-02-15 2022-11-22 Élément métallique à surface lissée et son procédé de fabrication Pending EP4481090A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022021180 2022-02-15
PCT/JP2022/043140 WO2023157410A1 (fr) 2022-02-15 2022-11-22 Élément métallique à surface lissée et son procédé de fabrication

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EP4481090A1 true EP4481090A1 (fr) 2024-12-25

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US (1) US20250146161A1 (fr)
EP (1) EP4481090A1 (fr)
JP (1) JPWO2023157410A1 (fr)
KR (1) KR20240144283A (fr)
CN (1) CN118786253A (fr)
TW (1) TW202336288A (fr)
WO (1) WO2023157410A1 (fr)

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JP2004043850A (ja) 2002-07-09 2004-02-12 Mitsubishi Gas Chem Co Inc チタンまたはチタン合金のエッチング方法
JP2006299388A (ja) * 2005-04-25 2006-11-02 Nippon Oil Corp 多孔質チタン−チタン酸化物複合体の製造方法
DE102007011632B3 (de) 2007-03-09 2008-06-26 Poligrat Gmbh Elektropolierverfahren für Titan
JP6525035B2 (ja) * 2017-08-29 2019-06-05 日本軽金属株式会社 アルミニウム部材及びその製造方法

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JPWO2023157410A1 (fr) 2023-08-24
WO2023157410A1 (fr) 2023-08-24
KR20240144283A (ko) 2024-10-02
US20250146161A1 (en) 2025-05-08
CN118786253A (zh) 2024-10-15

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